Corrosion-resistant ceramic

Patent metadata

Field	Value
Publication number	US-2022185740-A1
Application number	US-202017600849-A
Country	US
Kind code	A1
Filing date	Apr 1, 2020
Priority date	Apr 2, 2019
Publication date	Jun 16, 2022
Grant date	—

Abstract

A corrosion-resistant ceramic of the present disclosure contains yttrium zirconium oxide as a main component and has a plurality of open pores. The difference between an average value of inter-centroid distances of the open pores and an average value of diameters of the open pores is 50 μm or greater.

First claim

1 . A corrosion-resistant ceramic comprising yttrium zirconium oxide as a main component and comprising a plurality of open pores, wherein a difference between an average value of inter-centroid distances of the open pores and an average value of diameters of the open pores is 50 μm or greater.

2 . The corrosion-resistant ceramic according to claim 1 , wherein a kurtosis of the inter-centroid distances of the open pores is 0 or greater.

3 . The corrosion-resistant ceramic according to claim 1 , wherein the average value of the diameters of the open pores is 2.5 μm or less.

4 . The corrosion-resistant ceramic according to claim 1 , wherein a kurtosis of the diameters of the open pores is 0 or greater.

5 . The corrosion-resistant ceramic according to claim 1 , wherein a coefficient of variation of the diameters of the open pores is 0.7 or less.

6 . The corrosion-resistant ceramic according to claim 1 , wherein a surface area ratio of the open pores is 0.1% or less.

7 . The corrosion-resistant ceramic according to claim 1 , wherein an average particle size of crystal particles is from 0.2 μm to 0.5 μm.

8 . The corrosion-resistant ceramic according to claim 1 ,
wherein the corrosion-resistant ceramic has a shape of a cylindrical body, and in a cross section comprising an inner circumferential surface of the cylindrical body, a concentration of silicon on the inner circumferential surface is higher than a concentration of silicon on a virtual circumferential surface parallel to the inner circumferential surface, the virtual circumferential surface being located between the inner circumferential surface and an outer circumferential surface.

9 . The corrosion-resistant ceramic according to claim 1 , further comprising nickel, wherein a content of the nickel is 4 ppm by mass or less in terms of NiO.

10 . A plasma treatment device member comprising the corrosion-resistant ceramic described in claim 1 .

11 . A plasma treatment device comprising the plasma treatment device member described in claim 10 and a plasma generating device.

Assignees

• Kyocera Corp

Inventors

• Tanaka Manpei

Classifications

• C04B2111/20

  Resistance against chemical, physical or biological attack · CPC title

• C04B38/0058

  open porosity · CPC title

• C04B2235/9676

  against molten metals such as steel or aluminium · CPC title

• C04B2235/3225

  Yttrium oxide or oxide-forming salts thereof · CPC title

• C04B2235/785

  Submicron sized grains, i.e. from 0,1 to 1 micron · CPC title