Method for measuring semiconductor gas sensor based on virtual alternating current impedance

Patent metadata

Field	Value
Publication number	US-2022178866-A1
Application number	US-202117317866-A
Country	US
Kind code	A1
Filing date	May 11, 2021
Priority date	Dec 4, 2020
Publication date	Jun 9, 2022
Grant date	—

Abstract

The invention discloses a method for measuring a semiconductor gas sensor based on virtual alternating current impedance. The method comprises: combining measurement parameters of virtual measurement frequencies in a first predetermined range and virtual parallel capacitance values in a second predetermined range, and measuring gas with known concentrations at each characteristic quantity among nine characteristic quantities in the case of each combination; obtaining multiple characteristic values corresponding to the same gas concentration at each characteristic quantity after traversing all parameter combinations and all nine characteristic quantities; and selecting virtual measurement frequencies in a third range, virtual parallel capacitance values in a fourth range and one or several corresponding characteristic quantities as the finally selected measurement parameters for measuring the unknown gas concentration.

First claim

1 . A method for measuring a semiconductor gas sensor based on virtual alternating current impedance, comprising the following steps:
first step, measuring a resistance value of a semiconductor gas sensor exposed to a series of to-be-measured gases with known concentrations, second step, connecting the resistance value with virtual capacitance C in parallel and calculating corresponding virtual impedance characteristic quantities by the following alternating current impedance formulas:

Z
1

=

R

1
+

(

2
⁢

⁢
π
⁢

⁢
fCR

)

2

,

⁢

Z
2

=

-

R
2

⁢
C
⁢

⁢
2
⁢

⁢
π
⁢

⁢
f

1
+

(

2
⁢

⁢
π
⁢

⁢
fCR

)

2

,

⁢

Z
=

Z
1
2

+

Z
2
2

,

⁢

phase
=

arctan
⁡

(

Z
2

Z
1

)

,

⁢

P
=

1
phase

,

⁢

Y
=

1
Z

,

⁢

Y
1

=

1

Z
1

,

⁢

Y
2

=

1

Z
2

,

⁢

G
=

Z
1

Z
1
2

+

Z
2
2

,

wherein f represents a virtual alternating current measurement frequency, R represents the measured resistance value, and the meaning of the virtual impedance characteristic quantities is as follows: Y: calculated virtual admittance modulus, G: calculated real component modulus of the virtual admittance, Z: calculated virtual impedance modulus, Z 1 : calculated real component modulus of the virtual impedance, Z 2 : calculated imaginary component modulus of the virtual impedance, Y 1 : reciprocal of the calculated real component modulus of the virtual impedance, Y 2 : reciprocal of the imaginary component modulus of the virtual impedance, phase: calculated virtual phase, and P: reciprocal of the calculated virtual phase;
combining measurement parameters of virtual frequencies in a first predetermined range and virtual parallel capacitance values in a second predetermined range, and measuring a certain type of gas with known concentration at each virtual impedance characteristic quantity among the above nine virtual impedance characteristic quantities in the case of each combination;
obtaining a characteristic value corresponding to the known concentration at a certain virtual impedance characteristic quantity among the currently selected nine virtual impedance characteristic quantities at the end of each time of measurement;
obtaining multiple characteristic values corresponding to the same gas concentration at each virtual impedance characteristic quantity after traversing all parameter combinations and all nine virtual impedance characteristic quantities;
when considering the linearity and the signal-to-noise ratio between each characteristic value at all virtual impedance characteristic quantities and the known concentration, and making the linearity greater than or equal to a first threshold and the signal-to-noise ratio greater than or equal to a second threshold:
select

Assignees

• Univ Xi An Jiaotong

Inventors

• Yang Aijun
• Wang Dawei
• Wang Xiaohua
• Rong Mingzhe
• Pan Jianbin
• Huang Xianbo
• Chu Jifeng
• Yuan Huan

Classifications

• G01R27/2605

  Measuring capacitance (capacitive sensors G01D5/24) · CPC title

• G01N27/228 Primary

  Circuits therefor (measuring capacitance per se G01R27/26) · CPC title

• G01N27/028 Primary

  Circuits therefor (measuring impedance per se G01R27/02) · CPC title

• G01N27/12 Primary

  of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid {, for detecting components in the fluid} · CPC title