Digital immunochip and manufacture method of the same

Patent metadata

Field	Value
Publication number	US-2022163516-A1
Application number	US-202117355338-A
Country	US
Kind code	A1
Filing date	Jun 23, 2021
Priority date	Nov 26, 2020
Publication date	May 26, 2022
Grant date	—

Abstract

The present disclosure provides a digital immunochip and a manufacture method thereof. The digital immunochip includes a first substrate and a second substrate which are opposite to each other. The first substrate includes: a first base substrate; at least one driving electrode on the first base substrate and configured to drive an object to be detected to move; a dielectric layer on a side of the at least one driving electrode away from the first base substrate and covering the at least one driving electrode; and a first hydrophobic layer on a side of the dielectric layer away from the first base substrate. The second substrate includes: a second base substrate; and an immunoassay substance on a side of the second base substrate proximal to the first hydrophobic layer of the first substrate and including an antigen or an antibody.

First claim

What is claimed is:

1 . A digital immunochip, comprising a first substrate and a second substrate opposite to each other; wherein
the first substrate comprises:
a first base substrate;
at least one driving electrode on the first base substrate and configured to drive an object to be detected to move;
a dielectric layer on a side of the at least one driving electrode away from the first base substrate and covering the at least one driving electrode, and
a first hydrophobic layer on a side of the dielectric layer away from the first base substrate; and
the second substrate comprises:
a second base substrate; and
an immunoassay substance on a side of the second base substrate proximal to the first hydrophobic layer of the first substrate and comprising an antigen or an antibody.

2 . The digital immunochip of claim 1 , wherein
the second substrate further comprises:
a second hydrophobic layer between the immunoassay substance and the second base substrate, and
at least one sample portion in the second hydrophobic layer or on a side of the second hydrophobic layer proximal to the first substrate and configured to carry the immunoassay substance thereon.

3 . The digital immunochip of claim 2 , wherein
the at least one sample portion is in a groove of the second hydrophobic layer, and a surface of the second hydrophobic layer proximal to the first substrate is on the same plane as a surface of the at least one sample portion proximal to the first substrate.

4 . The digital immunochip of claim 3 , wherein
the at least one sample portion has a thickness the same as a thickness of the second hydrophobic layer.

5 . The digital immunochip of claim 2 , wherein
the at least one driving electrode comprises a plurality of driving electrodes arranged in a plurality of rows and a plurality of columns, the at least one sample portion comprises a plurality of sample portions arranged in a plurality of rows and a plurality of columns, the plurality of sample portions are in one-to-one correspondence with the plurality of driving electrodes, and an entire orthographic projection of each of the plurality of sample portions on the first base substrate is within an orthographic projection of a driving electrode corresponding to the sample portion on the first base substrate.

6 . The digital immunochip of claim 1 , wherein
the digital immunochip has a plurality of sample regions, the immunoassay substance in a sample region of the plurality of sample regions is different from the immunoassay substance in another sample region of the plurality of sample regions, and each of the plurality of sample regions is provided with a portion of the plurality of driving electrodes and the immunoassay substance therein.

7 . The digital immunochip of claim 2 , wherein the at least one sample portion comprises silicon dioxide.

8 . The digital immunochip of claim 1 , wherein the first hydrophobic layer comprises at least one of teflon or silicon nitride.

9 . The digital immunochip of claim 2 , wherein the second hydrophobic layer comprises at least one of teflon or silicon nitride.

10 . The digital immunochip of claim 1 , wherein
the first base substrate is a glass substrate, the second base substrate is a glass substrate, the at least one driving electrode comprises a conductive metal, and the dielectric layer comprises aluminum oxide or tantalum pentoxide.

11 . The digital immunochip of claim 1 , further comprising:
an inlet, through which the object to be detected enters the digital immunochip; an outlet, through which the object to be detected exits the digital immunochip; and a driving circuit, configured to provide a driving signal to the at least one driving electrode.

12 . A digital immunochip, comprising:
a first substrate comprising:
a first base substrate;
at least one driving electrode on the first base substrate and configured to drive an object to be detected to move;
a dielectric layer on a side of the at least one driving electrode away from the first base substrate and covering the at least one driving electrode, and
a first hydrophobic layer on a side of the dielectric layer away from the first base substrate; and
a second substrate comprising:
a second base substrate;
an immunoassay substance on a side of the second base substrate proximal to the first hydrophobic layer of the first substrate and comprising an antigen or an antibody;
a second hydrophobic layer between the immunoassay substance and the second base substrate; and
at least one sample portion in the second hydrophobic layer and configured to carry the immunoassay substance thereon, wherein
the at least one sample portion has a thickness the same as a thickness of the second hydrophobic layer, the at least one driving electrode comprises a plurality of driving electrodes, the at least one sample portion comprises a plurality of sample portions, the plurality of sample portions are in one-to-one correspondence with the plurality of driving electrodes, and an entire orthographic projection of each of the plurality of sample portions on the first base substrate is within an orthographic projection of a driving electrode corresponding to the sample portion on the first base substrate.

13 . A method for manufacturing a digital immunochip, comprising:
sequentially forming a driving electrode, a dielectric layer and a first hydrophobic layer on a first base substrate to form a first substrate; forming a plurality of sample portions on a second base substrate through a patterning process; forming an immunoassay substance on the plurality of sample portions to form a second substrate; and aligning and assembling the first substrate and the second substrate to form the digital immunochip.

14 . The method of claim 13 , wherein the forming the plurality of sample portions on the second base substrate through the patterning process comprises:
forming a second hydrophobic film layer and a photoresist layer on the second base substrate; removing a portion of the photoresist layer and the corresponding second hydrophobic film layer through an etching process to form a patterned photoresist layer and a patterned second hydrophobic layer; forming a sample portion film layer on the second base substrate, such that a portion of the sample portion film layer falls into hollow-out regions of the second hydrophobic layer, and the other portion of the sample portion film layer is on a side of the photoresist layer away from the second base substrate; and removing, through a stripping process, the patterned photoresist layer and the other portion of the sample portion film layer on the side of the photoresist layer away from the second base substrate, so as to form the plurality of sample portions.

15 . The method of claim 13 , wherein the forming the immunoassay substance on the plurality of sample portions comprises:
performing a hydroxyl-group activation on a surface of the plurality of sample portions to obtain the activated surface containing a hydroxyl group; modifying the hydroxyl group with an amino group, after the hydroxyl-group activation is finished; modifying the amino group with a carboxyl group after the amino group is modified; and modifying the plurality of sample portions with the immunoassay substance by bonding the immunoassay substance and the carboxyl group, after the carboxyl group is modified.

16 . The method of claim 13 , wherein the aligning and assembling the first substrate and the second substrate to form the digital immunochip co

Assignees

• Boe Technology Group Co Ltd

Inventors

• Liu Haonan
• Yin Yudan
• Ding Ding

Classifications

• G01N33/5438 Primary

  Electrodes · CPC title

• G01N33/54306 Primary

  Solid-phase reaction mechanisms · CPC title

• B01L3/502792

  for moving individual droplets on a plate, e.g. by locally altering surface tension · CPC title

• B01L2200/16

  Reagents, handling or storing thereof · CPC title

• B01L2300/161

  Control and use of surface tension forces, e.g. hydrophobic, hydrophilic · CPC title