Charged particle beam device and method for demagnetizing magnetic lens
US-2024274395-A1 · Aug 15, 2024 · US
US2022157505A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2022157505-A1 |
| Application number | US-202217667635-A |
| Country | US |
| Kind code | A1 |
| Filing date | Feb 9, 2022 |
| Priority date | Dec 25, 2019 |
| Publication date | May 19, 2022 |
| Grant date | — |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
A distributed demagnetizing coil system, a shielding device, and a demagnetizing method. The system includes turns of demagnetizing coils evenly wound on each shielding surface of a shielding body in the shielding device at intervals and connecting wires provided on outer side of the shielding surface in an inflection manner. One half of each turn is located on inner side of the wound shielding body and the other half of each turn s located on outer side of the wound shielding body for providing corresponding demagnetizing magnetic fields to form a closed magnetic flux loop. One half of each connecting wire is connected to the corresponding demagnetizing coil, the other half of each connecting wire is reversely inflected along an original path and is connected to a power supply module, so that corresponding demagnetizing current is introduced into each demagnetizing coil connected to the connecting wire.
Opening claim text (preview).
We claim: 1 . A distributed demagnetizing coil system, comprising a plurality of turns of demagnetizing coils and a plurality of connecting wires, wherein the plurality of turns of demagnetizing coils are evenly wound on each shielding surface of a shielding body in a shielding device at intervals, one half of each turn of demagnetizing coil is located on the inner side of the wound shielding body and the other half of each turn of demagnetizing coil is located on the outer side of the wound shielding body for providing corresponding demagnetizing magnetic fields to form a closed magnetic flux loop; the connecting wires are provided on the outer side of the shielding surface in an inflection manner, one half of each connecting wire is a current outlet connecting wire and is connected to the corresponding demagnetizing coil, the other half of each connecting wire is a current loop connecting wire and is reversely inflected along an original path, and the current outlet connecting wire and the current loop connecting wire are connected to a power supply module, so that corresponding demagnetizing current is introduced into each demagnetizing coil connected thereto; wherein the demagnetizing current introduced into the demagnetizing coil is a linear attenuation demagnetizing current, a second-order attenuation demagnetizing current or an exponential attenuation demagnetizing current; an envelope function expression of the linear attenuation demagnetizing current is: I E = I M ( 1 - tf D n ) where I M is the demagnetizing current that saturates the demagnetizing magnetic field in the direction, f D is an AC frequency, and n is the number of alternating periods; an envelope function expression of the second-order attenuation demagnetizing current is: I E = I M ( tf D n - 1 ) 2 an envelope function expression of the exponential attenuation demagnetizing current is: I E = I M e - b t f D n where I M is the demagnetizing current that saturates the demagnetizing magnetic field in the direction, f D is an AC frequency, n is the number of alternating periods, and b is an adjustment parameter used to adjust a decreasing speed of exponential attenuation; a current intensity expression of the demagnetizing current introduced into the demagnetizing coil is: I=I E sin(2π f D t ). 2 . The distributed demagnetizing coil system according to claim 1 , wherein in the connecting wires, the current loop connecting wire is arranged outside the current outlet connecting wire. 3 . The distributed demagnetizing coil system according to claim 1 , wherein the power supply module comprises a controller which is connected to each connecting wire and used for generating and sending a corresponding control instruction according to user input to control the demagnetizing current introduced into each demagnetizing coil; the control instruction generated by the controller comprises a digital waveform corresponding to the demagnetizing current; the power supply module further comprises: a digital-to-analog converter connected to the controller and used for receiving the digital waveform and converting the same into an analog signal; a voltage divider connected to the digital-to-analog converter and used for receiving the analog signal and adjusting an amplitude thereof, a low-pass filter connected to the voltage divider and used for receiving the analog signal with an adjusted amplitude and filtering a high-frequency interference signal therein; a power amplifier connected to the low-pass filter and used for receiving the filtered analog signal and outputting a high-power demagnetizing current; a transformer connected to the power amplifier and used for receiving the high-power demagnetizing current and filtering a DC bias of the demagnetizing current; and a relay connected to the transformer and the connecting wire and used for controlling switching of the corresponding demagnetizing coil. 4 . A shielding device, comprising the distributed demagnetizing coil system of claim 1 and at least one layer of the shielding body. 5 . The shielding device according to claim 4 , wherein the shielding body has a hollow cuboid structure with six plane shielding surfaces, and a plurality turns of demagnetizing coils are arranged on the six plane shielding surfaces; one half of each turn of demagnetizing coil is located on the inner side of the wound plane shielding surface and the other half is located on the outer side of the plane shielding surface; the turns of demagnetizing coils wound on the four plane shielding surfaces arranged in any direction are distributed in parallel at intervals to form a magnetic flux loop corresponding to the direction; and the corresponding demagnetizing coils on the six plane shielding surfaces form a three-direction orthogonal magnetic flux loop. 6 . The shielding device according to claim 5 , wherein the interval between the two adjacent turns of parallel demagnetizing coils wound on any shielding surface does not exceed ⅓ of a vertical dimension of the shielding surface along the demagnetizing coil. 7 . The shielding device according to claim 4 , wherein the shielding body has a hollow cylinder structure, and has an arc-shaped shielding surface and two planar circular shielding surfaces; on the arc-shaped shielding surface, the turns of demagnetizing coils are distributed in parallel at intervals along a circumferential direction of the cylinder, and on the upper and lower
Magnetic shielding materials · CPC title
Methods and devices for demagnetising of magnetic bodies, e.g. workpieces, sheet material (for erasing of information on magnetic record carriers G11B5/00) · CPC title
without armatures (cores H01F3/00; coils H01F5/00 {; shaping metal by applying magnetic forces B21D26/14; electromagnets specially adapted for NMR applications G01R33/381}) · CPC title
Networks using active elements · CPC title
Casings (standardised racks H05K9/0062) · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.