Hardmask composition, hardmask layer, and method of forming patterns
US-2024377746-A1 · Nov 14, 2024 · US
US2022127412A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2022127412-A1 |
| Application number | US-202217569564-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jan 6, 2022 |
| Priority date | Nov 18, 2014 |
| Publication date | Apr 28, 2022 |
| Grant date | — |
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Embodiments of the invention relate to a novel class of polymers with superior mechanical properties and chemical stability, as compared to known polymers. These polymers are particularly well suited for use in anion exchange membranes (AEMs), including those employed in fuel cells. Novel methods for the manufacture of these polymers are also described.
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What is claimed is: 1 . A polymer of formula 2A wherein r is from 100 to 1,000,000, Z is a quaternary ammonium group, and n is from 1 to 20. 2 . The polymer of claim 1 , wherein Z includes or combinations thereof. 3 . A polymer of formula 2B wherein r is from 100 to 1,000,000, Z is a quaternary ammonium group, and n is from 1 to 20. 4 . The polymer of claim 3 , wherein Z includes or combinations thereof.
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