Transparent electrode for oxygen production, method for producing same, tandem water decomposition reaction electrode provided with same, and oxygen production device using same

Patent metadata

Field	Value
Publication number	US-2022090278-A1
Application number	US-202117544166-A
Country	US
Kind code	A1
Filing date	Dec 7, 2021
Priority date	Aug 9, 2017
Publication date	Mar 24, 2022
Grant date	—

Abstract

A method foe producing a transparent electrode for oxygen production having a Ta nitride layer on a transparent substrate, including: a step of forming a Ta nitride precursor layer on the transparent substrate; and a step of nitriding the Ta nitride precursor layer with a mixed gas containing ammonia and a carrier gas.

First claim

1 . A transparent electrode for oxygen production in which a nitride semiconductor layer and a Ta nitride layer are stacked in this order on a transparent substrate.

2 . The transparent, electrode for oxygen production according to claim 1 , wherein the Ta nitride layer is a Ta 3 N 5 layer.

3 . The transparent electrode for oxygen production according to claim 1 , wherein the nitride semiconductor layer is a GaN layer.

4 . The transparent electrode for oxygen production according to claim 1 , wherein the transparent substrate is a sapphire substrate or a SiO 2 substrate.

5 . The transparent electrode for oxygen production according to claim 1 , wherein light transmittance at wavelength of 600 nm to 900 nm is 80% or more.

6 . A tandem water splitting reaction electrode in which the transparent electrode for oxygen production according to claim 1 and an electrode for hydrogen production are stacked.

7 . An oxygen production device comprising the transparent electrode for oxygen production according to claim 1 .

8 . A water splitting device comprising the transparent electrode for oxygen production according to claim 1 .

9 . A water splitting device comprising the tandem water splitting reaction electrode according to claim 6 .

10 . A water splitting device comprising:
the transparent electrode for oxygen production according claim 1 ; and a tandem water splitting reaction electrode in which another transparent electrode for oxygen production and an electrode for hydrogen production having an absorption peak at a wavelength longer than 300 nm are combined, wherein the another transparent electrode for oxygen production comprises Ta 3 N 5 to be used as an oxygen production-side electrode in a water splitting reaction, wherein light transmittance at 600 nm to 900 nm is 80% or more, and photocurrent density at 1.23 V RHE is 3 mA/cm or more under AM1.5G irradiation.

11 . A synthesis device comprising the water splitting device according to claim 3 and a reactor in which a catalyst is arranged, wherein
hydrogen obtained from the water splitting device and another raw material are introduced into the reactor and reacted in the reactor.

12 . A synthesis device comprising the water splitting device according to claim 9 and a reactor in which a catalyst is arranged, wherein
hydrogen obtained from the water splitting device and another raw material are introduced into the reactor and reacted in the reactor.

13 . A synthesis device comprising the water splitting device according to claim 10 and a reactor in which a catalyst is arranged, wherein
hydrogen obtained from the water splitting device and another raw material are introduced into the reactor and reacted in the reactor.

Assignees

• Mitsubishi Chem Corp
• Univ Tokyo
• Japan Tech Research Association Of Artificial Photosynthetic Chemical Process
• Aist

Inventors

• Nishiyama Hiroshi
• Higashi Tomohiro
• Sasaki Yutaka
• Yamada Taro
• Domen Kazunari
• Suzuki Yohichi
• Akiyama Seiji

Classifications

• B01J35/395

  Thickness of the active catalytic layer · CPC title

• B01J2235/15

  X-ray diffraction · CPC title

• B01J2235/00

  Indexing scheme associated with group B01J35/00, related to the analysis techniques used to determine the catalysts form or properties · CPC title

• C01B13/0207

  Water · CPC title

• C25B9/17

  Cells comprising dimensionally-stable non-movable electrodes; Assemblies of constructional parts thereof · CPC title