Vacuum ultraviolet excimer lamp with an inner axially symmetric wire electrode

Patent metadata

Field	Value
Publication number	US-2022076939-A1
Application number	US-201917291166-A
Country	US
Kind code	A1
Filing date	Nov 5, 2019
Priority date	Nov 5, 2018
Publication date	Mar 10, 2022
Grant date	—

Abstract

A dielectric barrier VUV excimer lamp has an elongated dielectric tube for holding an excimer-forming gas, a first electrode disposed within the dielectric tube, and a second electrode arranged outside of the dielectric tube. The first electrode is a wire electrode disposed along a centre axis of the dielectric tube, axially symmetric with respect to the centre axis, and physically connected to each end of the dielectric tube. The dielectric barrier VUV excimer lamp is an AC dielectric barrier discharge VUV excimer lamp or the dielectric barrier VUV excimer lamp is a pulsed DC dielectric barrier discharge VUV excimer lamp. A photochemical system has the dielectric barrier VUV excimer lamp. An excimer lamp system has the dielectric barrier VUV excimer lamp, and also has a power supply to supply electric power to the first electrode and the second electrode.

First claim

1 - 17 . (canceled)

18 . A dielectric barrier discharge VUV excimer lamp comprising:
an elongated dielectric tube having a center axis; an excimer-forming gas contained within the dielectric tube; a first wire electrode disposed within the dielectric tube along the center axis, the first wire axially symmetric with respect to the center axis and physically connected to each end of the dielectric tube; and a second electrode arranged outside of the dielectric tube.

19 . The lamp of claim 18 , wherein the lamp comprises an AC dielectric barrier discharge VUV excimer lamp.

20 . The lamp of claim 18 , wherein the lamp comprises a pulsed DC dielectric barrier discharge VUV excimer lamp having a pulsating direct current.

21 . The lamp of claim 20 , wherein the pulsating direct current has:
(a) a pulse width of less than 10 μs, (b) a pulse distance of greater than 1 ps and less than 100 s, or (c) a combination of (a) and (b).

22 . The lamp of claim 18 , wherein the first electrode has an outer diameter between 0.02 mm and 0.4 mm.

23 . The lamp of claim 18 , wherein:
the first electrode has a thickness according to the following equation:
( R/ro )/ In ( R/ro )>8, where
2*R is the inner diameter of the dielectric tube, and 2*ro the outer diameter of the first electrode.

24 . The lamp of claim 23 , wherein the first electrode has a thickness according to the following equation: (R/ro)/In(R/ro)>10.

25 . The lamp of claim 18 , wherein the dielectric tube has an elongated wall with cylindrical shape.

26 . The lamp of claim 18 , wherein a gas filling pressure of the dielectric tube is in a range between 300 mbar and 50 bar.

27 . The lamp of claim 26 , wherein:
the gas filling pressure is 340 mbar; and the dielectric tube has an outer diameter of 16 mm.

28 . The lamp of claim 18 , wherein the excimer-forming gas comprises Xe.

29 . The lamp of claim 28 , wherein the excimer-forming gas consists essentially of Xe.

30 . The lamp of claim 18 , wherein the excimer-forming gas contains less than about 10 ppm of impurities.

31 . The lamp of claim 18 , wherein the dielectric tube comprises quartz glass.

32 . The lamp of claim 18 , wherein:
the first electrode is tensioned and centered; and at least one spring is arranged on one at least one side of the first electrode.

33 . The lamp of claim 18 , wherein the dielectric tube comprises a fluorescent coating including luminescent compounds on an inside or an outside of the dielectric tube.

34 . The lamp of claim 18 , wherein the dielectric tube comprises a UV fluorescent coating including luminescent compounds on an inside or an outside of the dielectric tube.

35 . The lamp of claim 34 , wherein the dielectric tube comprises a UV-C fluorescent coating including luminescent compounds on the inside or the outside of the dielectric tube.

36 . The lamp of claim 35 , wherein the UV-C fluorescent coating comprises phosphorus compounds.

37 . A photochemical ozone generator comprising the dielectric barrier discharge VUV excimer lamp of claim 18 .

38 . An excimer lamp system comprising:
the dielectric barrier discharge VUV excimer lamp of claim 18 ; and a power supply configured to supply electric power to the first electrode and the second electrode.

Assignees

• Xylem Europe Gmbh

Inventors

• Salvermoser Manfred
• Brüggemann Nicole
• Fietzek Reiner
• Fiekens Ralf
• Kanigowski Uwe
• Wojciechowski Andre

Classifications

• H01J61/16

  having helium, argon, neon, krypton, or xenon as the principle constituent · CPC title

• H05B41/30

  in which the lamp is fed by pulses, e.g. flash lamp · CPC title

• H01J65/046 Primary

  the field being produced by using capacitive means around the vessel · CPC title

• H01J61/06 Primary

  Main electrodes · CPC title

• H01J61/32

  Special longitudinal shape, e.g. for advertising purposes {(H01J61/305 takes precedence)} · CPC title