Method and system for searching for synthesis condition

Patent metadata

Field	Value
Publication number	US-2022034921-A1
Application number	US-202117387130-A
Country	US
Kind code	A1
Filing date	Jul 28, 2021
Priority date	Jul 29, 2020
Publication date	Feb 3, 2022
Grant date	—

Abstract

A method of searching for a synthesis condition includes: designating N+1 vertices separated from each other, each having an experimental condition corresponding to a designated location in an N-dimensional space including N axes, each corresponding to a different experimental variable; performing a reflection operation for moving the first vertex determined based on experimental values corresponding to the vertices to an opposite side of an N−1 dimensional simplex based on a center point of the N−1 dimensional simplex corresponding to remaining N vertices; performing a projection operation for moving again the first vertex back to a location where a movement path of the first vertex and a predetermined boundary of the N-dimensional space cross each other when the first vertex is moved outside the predetermined boundary; and determining, as the synthesis condition, an experimental condition of a final vertex determined based on experimental values corresponding to vertices after the projection operation.

First claim

What is claimed is:

1 . A method of searching for a synthesis condition, the method comprising:
designating N+1 vertices separated from each other in an N-dimensional space including N axes, each corresponding to a different experimental variable, wherein each of the N+1 vertices has an experimental condition corresponding to a designated location in the N-dimensional space, and N is a natural number; performing a reflection operation for moving a first vertex determined based on experimental values corresponding to the N+1 vertices to an opposite side of an N−1 dimensional simplex based on a center point of the N−1 dimensional simplex corresponding to remaining N vertices; performing a projection operation for moving again the first vertex back to a location where a movement path of the first vertex and a predetermined boundary of the N-dimensional space cross each other when the first vertex is moved outside the predetermined boundary of the N-dimensional space; and determining an experimental condition of a final vertex determined based on experimental values corresponding to vertices after the projection operation as the synthesis condition.

2 . The method of claim 1 , further comprising:
after the performing the projection operation, removing a second vertex determined based on experimental values corresponding to vertices located on the predetermined boundary when all of the N+1 vertices are located on the predetermined boundary.

3 . The method of claim 2 , further comprising:
after the removing the second vertex, reducing the N-dimensional space to an N−1 dimensional space, and after the reducing the N-dimensional space to the N−1 dimensional space, performing the reflection operation again with respect to N vertices of the N+1 vertices excluding the second vertex.

4 . The method of claim 1 , wherein the reflection operation comprises determining a vertex corresponding to the experimental value having the greatest difference from a target value among the experimental values as the first vertex.

5 . The method of claim 2 , wherein the removing the second vertex comprises determining a vertex having the greatest difference between a corresponding experimental value and a target value among the vertices located on the predetermined boundary as the second vertex.

6 . The method of claim 1 , wherein the determining the synthesis condition comprises determining a vertex having the least difference between a corresponding experimental value and a target value among the vertices after the projection operation as the final vertex.

7 . The method of claim 1 , further comprising:
designating N+1 vertices different from the N+1 vertices in a separated region from an existing region where the N+1 vertices are designated, wherein from the reflection operation is performed with respect to the vertices designated in the separated region.

8 . The method of claim 7 , wherein the determining the synthesis condition comprises determining an experiment condition of a final vertex having the least difference between a corresponding experimental value and a target value among the final vertices determined with respect to the vertices respectively designated in the existing region and the separated region as the synthesis condition.

9 . The method of claim 7 , further comprising:
designating the different N+1 vertices after determining the synthesis condition, wherein the designating the different N+1 vertices comprises determining a location of the separated region based on a movement record of the vertices designated in the existing region.

10 . A system for searching for a synthesis condition, the system comprising:
a controller which designates N+1 vertices separated from each other in an N-dimensional space including N axes, each corresponding to a different experimental variable, wherein each of the N+1 vertices has an experimental condition corresponding to a designated location in the N-dimensional space, and N is a natural number; an experiment unit which outputs experimental values corresponding to the N+1 vertices; and a search unit which determines a first vertex based on the experimental values, and moves the first vertex to an opposite side of an N−1 dimensional simplex based on a center point of the N−1 dimensional simplex corresponding to remaining N vertices, wherein the search unit moves the first vertex to a location where a movement path of the first vertex and a predetermined boundary of the N-dimensional space cross each other when the first vertex is moved outside the predetermined boundary of the N-dimensional space, and the controller determines a final vertex based on experimental values corresponding to vertices after moving the first vertex again, and determines an experimental condition of the final vertex as the synthesis condition.

11 . The system of claim 10 , wherein the search unit determines a second vertex based on experimental values corresponding to the vertices located on the predetermined boundary, when all of the N+1 vertices are located on the predetermined boundary, and removes the second vertex.

12 . The system of claim 11 , wherein the search unit reduces the N-dimensional space to an N−1 dimensional space, and determines the first vertex based on experimental values corresponding to N vertices excluding the second vertex.

13 . The system of claim 10 , wherein the search unit determines a vertex corresponding to an experimental value having the greatest difference from a target value among experimental values corresponding to the N+1 vertices as the first vertex.

14 . The system of claim 10 , wherein the search unit determines a vertex having the greatest difference between a corresponding experimental value and a target value among vertices located on the predetermined boundary as a second vertex when all of the N+1 vertices are located on the predetermined boundary.

15 . The system of claim 10 , wherein the search unit determines, as the final vertex, a vertex with the least difference between a corresponding experimental value and a target value among the N+1 vertices after moving the first vertex again.

16 . The system of claim 10 , wherein the controller designates N+1 vertices in a separated region, which are different from the N+1 vertices in an existing region, where the separated region is different from the existing region where the N+1 vertices are designated.

17 . The system of claim 16 , wherein the controller determines an experiment condition of a final vertex having the least difference between a corresponding experimental value and a target value among the final vertices determined with respect to the vertices designated in each of the existing region and the separated region.

18 . The system of claim 16 , wherein the controller determines a location of the separated region based on a movement record of vertices designated in the existing region.

19 . A recording medium comprising a computer-readable recording medium storing a program for executing the method of claim 1 .

Assignees

• Samsung Electronics Co Ltd

Inventors

• Lee Keechang
• Ko Yoonseok
• Jee Sangsoo

Classifications

• G06F30/20 Primary

  Design optimisation, verification or simulation (optimisation, verification or simulation of circuit designs G06F30/30) · CPC title

• G01N23/2258

  Measuring secondary ion emission, e.g. secondary ion mass spectrometry [SIMS] (mass-to-charge ratio analysis aspects of SIMS for material analysis G01N27/62) · CPC title

• G01N21/35

  using infrared light (G01N21/39 takes precedence) · CPC title

• G01N21/33

  using ultraviolet light (G01N21/39 takes precedence) · CPC title

• G06F2119/22

  Yield analysis or yield optimisation · CPC title