Crucible apparatus and deposition apparatus including the same

Patent metadata

Field	Value
Publication number	US-2022033959-A1
Application number	US-202117222895-A
Country	US
Kind code	A1
Filing date	Apr 5, 2021
Priority date	Jul 30, 2020
Publication date	Feb 3, 2022
Grant date	—

Abstract

An apparatus for making substrates of a display device includes: a crucible to vaporize a deposition material and including a first metal; and a sacrificial material electrically connected to the crucible and including a second metal having a second ionization energy less than a first ionization energy of the first metal.

First claim

What is claimed is:

1 . An apparatus for making substrates of a display device, the apparatus comprising:
a crucible to vaporize a deposition material and including a first metal; and a sacrificial material electrically connected to the crucible and including a second metal having a second ionization energy less than a first ionization energy of the first metal.

2 . The apparatus of claim 1 , wherein the second metal comprises an alkali metal.

3 . The apparatus of claim 1 , wherein the second metal comprises an alkaline earth metal.

4 . The apparatus of claim 1 , wherein the second metal comprises at least one of magnesium, aluminum, calcium, and zinc.

5 . The apparatus of claim 1 , wherein the first metal comprises at least one of iron, nickel, manganese, a stainless steel, titanium, and tantalum.

6 . The apparatus of claim 1 , wherein the deposition material comprises a halogen compound.

7 . The apparatus of claim 1 , wherein the crucible comprises a crucible unit and the sacrificial material comprises a sacrificial unit disposed outside the crucible unit.

8 . The apparatus of claim 7 , wherein the sacrificial material comprising a sacrificial unit is coupled to the crucible unit.

9 . The apparatus of claim 8 , wherein the sacrificial unit at least partially surrounds the crucible unit.

10 . The apparatus of claim 8 , wherein the sacrificial unit is disposed at least partially under the crucible unit.

11 . The apparatus of claim 7 , wherein the sacrificial until is electrically connected to the crucible unit by a wire.

12 . The apparatus of claim 1 , wherein the second metal comprises a source of electrons to be transferred to the first metal.

13 . A deposition apparatus comprising:
a deposition chamber in which a substrate may be received; a crucible disposed under the substrate; and a heating apparatus disposed outside the crucible to apply heat to the crucible, and wherein the crucible comprises:
a housing to receive and vaporize a deposition material and including a first metal; and
a sacrificial material electrically connected to the housing and including a second metal having a second ionization energy less than a first ionization energy of the first metal.

14 . The deposition apparatus of claim 13 , wherein the second metal comprises at least one of magnesium, aluminum, calcium, and zinc.

15 . The deposition apparatus of claim 13 , wherein the sacrificial material is disposed at least partially outside the crucible.

16 . The deposition apparatus of claim 15 , wherein the sacrificial material is coupled to the crucible.

17 . The deposition apparatus of claim 16 , wherein the sacrificial material at least partially surrounds the housing.

18 . The deposition apparatus of claim 16 , wherein the sacrificial material is disposed underneath the housing.

19 . The deposition apparatus of claim 13 , wherein the sacrificial material is electrically connected to the housing by a wire.

20 . The deposition apparatus of claim 13 , wherein the second metal comprises a source of electrons to be transferred to the first metal.

Assignees

• Samsung Display Co Ltd

Inventors

• Seo Dongkyu
• Lee Daeho
• Park Yeongrong
• Shin Junyong
• Yoo Byeongwook
• Lee Byungseok

Classifications

• C23C14/548

  Controlling the composition · CPC title

• C23C14/06

  characterised by the coating material ({C23C14/0021} , C23C14/04 take precedence) · CPC title

• C23C14/243 Primary

  Crucibles for source material (C23C14/28, C23C14/30 take precedence) · CPC title

• C23C14/564

  Means for minimising impurities in the coating chamber such as dust, moisture, residual gases · CPC title

• C23C14/56

  Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks · CPC title