Analyzer and analysis method

Patent metadata

Field	Value
Publication number	US-2022018743-A1
Application number	US-202117189940-A
Country	US
Kind code	A1
Filing date	Mar 2, 2021
Priority date	Jul 15, 2020
Publication date	Jan 20, 2022
Grant date	—

Abstract

An analysis system includes a stage that supports a sample. The analysis system includes a first supplier configured to provide a hydrophobic material on the sample, and surround an inspection region on the sample with the hydrophobic material. The analysis system includes a second supplier configured to provide an inspection liquid over the inspection region. The analysis system includes a collector configured to collect the inspection liquid. The analysis system includes an analyzer configured to analyze a component contained in the collected inspection liquid.

First claim

What is claimed is:

1 . An analysis system, comprising:
a stage that supports a sample; a first supplier configured to provide a hydrophobic material on the sample, and surround an inspection region on the sample with the hydrophobic material; a second supplier configured to provide an inspection liquid over the inspection region; a collector configured to collect the inspection liquid; and an analyzer configured to analyze a component contained in the collected inspection liquid.

2 . The analysis system according to claim 1 , further comprising:
a memory that stores coordinate information of the inspection region on the sample; and a first drive mechanism that moves the first supplier to surround the inspection region with the hydrophobic material, based upon the coordinate information.

3 . The analysis system according to claim 2 , further comprising:
a second drive mechanism that moves at least one of the second supplier or the collector above the inspection region, based upon the coordinate information.

4 . The analysis system according to claim 1 , wherein
the second supplier and the collector share the same nozzle.

5 . The analysis system according to claim 1 , wherein
the analyzer is configured to detect a metal component contained in the inspection liquid.

6 . The analysis system according to claim 1 , wherein
the hydrophobic material has hydrophobicity.

7 . The analysis system according to claim 1 , wherein
the inspection liquid includes at least one of: a liquid containing HF and H 2 O; a liquid containing HF and H 2 O 2 ; a liquid containing HF, HCl, and H 2 O 2 ; or a liquid containing HF, HNO 3 , and HCl.

8 . The analysis system according to claim 1 , wherein
the hydrophobic material is a liquid or a solid containing 1-bromopropane (CH 3 CH 2 CH 2 Br).

9 . The analysis system according to claim 1 , wherein
a contact angle between the inspection liquid and a surface of the sample including the hydrophobic material is between about 45 degrees and about 60 degrees.

10 . An analysis method using an analyzer including a stage, a first supplier configured to provide a hydrophobic material over a sample, a second supplier configured to supply an inspection liquid on the sample, a collector configured to collect the inspection liquid, and an analyzer configured to analyze a component contained in the inspection liquid, the method comprising:
placing the sample on the stage; providing the hydrophobic material on the sample to surround an inspection region on the sample with the hydrophobic material; supplying the inspection liquid on the inspection region; collecting the inspection liquid in the inspection region; and analyzing a component contained in the collected inspection liquid.

11 . The analysis method according to claim 10 using the analyzer further including a first drive mechanism that moves the first supplier, and a second drive mechanism that moves at least one of the second supplier or the collector, the method further comprising:
surrounding the inspection region with the hydrophobic material based upon coordinate information of the inspection region on the sample, wherein the inspection liquid is supplied to the inspection region to allow the inspection liquid to stay in the inspection region, and the inspection liquid is not supplied to an outside of the inspection region.

12 . The analysis method according to claim 10 , further comprising:
drying the hydrophobic material after the hydrophobic material is provided over the sample and before the inspection liquid is supplied.

13 . The analysis method according to claim 10 , wherein
the component includes a metal component.

14 . The analysis method according to claim 13 , wherein
the inspection region includes a metal forming region of the sample.

15 . The analysis method according to claim 10 , wherein
the hydrophobic material has hydrophobicity.

16 . The analysis method according to claim 10 , wherein
the inspection liquid includes at least one of: a liquid containing HF and H 2 O; a liquid containing HF and H 2 O 2 ; a liquid containing HF, HCl, and H 2 O 2 ; or a liquid containing HF, HNO 3 , and HCl.

17 . The analysis method according to claim 10 , wherein
the hydrophobic material is a liquid or a solid containing 1-bromopropane (CH 3 CH 2 CH 2 Br).

Assignees

• Kioxia Corp

Inventors

• Takimoto Miki

Classifications

• G01N2001/028

  Sampling from a surface, swabbing, vaporising · CPC title

• G01N1/38 Primary

  Diluting, dispersing or mixing samples · CPC title

• G01N2001/002

  Devices for supplying or distributing samples to an analysing apparatus · CPC title

• G01N33/202

  Constituents thereof · CPC title

• G01N1/02

  Devices for withdrawing samples {(sampling of foundation soil E02D1/04; collecting or conveying radioactive samples G01T7/00, e.g. G01T7/02, G01T7/08)} · CPC title