Hardmask composition, hardmask layer, and method of forming patterns
US-2024377746-A1 · Nov 14, 2024 · US
US2022017687A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2022017687-A1 |
| Application number | US-201917296221-A |
| Country | US |
| Kind code | A1 |
| Filing date | Sep 4, 2019 |
| Priority date | Dec 6, 2018 |
| Publication date | Jan 20, 2022 |
| Grant date | — |
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A method of producing a polymer compound which is capable of improving yield while lowering the dispersity of the molecular weight is described. The method of producing polymer compound A containing a constitutional unit (1-2) having a group obtained by removing one or more hydrogen atoms present on Ar1 from a compound represented by the formula [1-2] involves a first step of separating high molecular weight components contained in a polymer compound B by a fractionation precipitation method from the polymer compound B containing a constitutional unit (1-1) having a group obtained by removing one or more hydrogen atoms present on Ar1 from a compound represented by the formula [1-1], to obtain a polymer compound C composed of the high molecular weight components, and a second step of converting the constitutional unit (1-1) contained in polymer compound C into constitutional unit (1-2), to obtain polymer compound A:
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1 . A method of producing a polymer compound A containing a constitutional unit (1-2) having a group obtained by removing one or more hydrogen atoms present on Ar 1 from a compound represented by the formula [1-2], comprising a first step of separating high molecular weight components contained in a polymer compound B, by a fractionation precipitation method, from the polymer compound B containing a constitutional unit (1-1) having a group obtained by removing one or more hydrogen atoms present on Ar 1 from a compound represented by the formula [1-1], to obtain a polymer compound C composed of the high molecular weight components, and a second step of converting said constitutional unit (1-1) contained in said polymer compound C obtained by said first step into said constitutional unit (1-2), to obtain said polymer compound A: wherein, Ar 1 represents an aryl group optionally having a substituent or a monovalent heterocyclic group optionally having a substituent, R A and R B each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group or a monovalent heterocyclic group, and these groups optionally have a substituent. 2 . The production method according to claim 1 , wherein said polymer compound B, a good solvent for said polymer compound B and a poor solvent for said polymer compound B are used in said fractionation precipitation method. 3 . The production method according to claim 1 , wherein said polymer compound A, said polymer compound B and said polymer compound C further contain a constitutional unit represented by the formula (X): wherein, a 1 and a 2 each independently represent an integer of 0 or more, Ar X1 and Ar X3 each independently represent an arylene group or a divalent heterocyclic group, and these groups optionally have a substituent, Ar X2 and Ar X4 each independently represent an arylene group, a divalent heterocyclic group, or a divalent group in which at least one arylene group and at least one divalent heterocyclic group are bonded directly, and these groups optionally have a substituent, when a plurality of Ar X2 and Ar X4 are present, they may be the same or different at each occurrence, R X1 , R X2 and R X3 each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group or a monovalent heterocyclic group, and these groups optionally have a substituent, when a plurality of R X2 and R X3 are present, they may be the same or different at each occurrence. 4 . The production method according to claim 1 , wherein said constitutional unit (1-1) is a constitutional unit represented by the formula (2-1), and said constitutional unit (1-2) is a constitutional unit represented by the formula (2-2): wherein, n1 and nA1 each independently represent an integer of 1 to 3, when a plurality of nA1 are present, they may be the same or different, m1 represents an integer of 1 or more, when a plurality of m1 are present, they may be the same or different, X represents a formyl group, a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group or a monovalent heterocyclic group, when X is an alkyl group, a cycloalkyl group, an aryl group or a monovalent heterocyclic group, these groups optionally have a substituent, when a plurality of X are present, they may be the same or different, however, at least one X is a formyl group, Ar A and Ar B each independently represent an arylene group or a divalent heterocyclic group, and these groups optionally have a substituent, Ar C represents an aromatic hydrocarbon ring or a heterocyclic group, and these groups optionally have a substituent, when a plurality of Ar B and Ar C are present, they may be the same or different at each occurrence, at least two or more of Ar A , Ar B and Ar C may be combined together to form a ring, R 1 represents a single bond or an aliphatic hydrocarbon group, and these groups optionally have a substituent, when a plurality of R 1 are present, they may be the same or different, however, nA1 is 1 when R 1 is a single bond, R C and R D each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group or a monovalent heterocyclic group, and these groups optionally have a substituent, when a plurality of R C and R D are present, they may be the same or different at each occurrence. 5 . The production method according to claim 1 , wherein said constitutional unit (1-1) is a constitutional unit represented by the formula (3-1), and said constitutional unit (1-2) is a constitutional unit represented by the formula (3-2): wherein, n2 and nA2 each independently represent an integer of 1 to 3, when a plurality of nA2 are present, they may be the same or different, m2 represents an integer of 1 or more, when a plurality of m2 are present, they may be the same or different, Y represents a formyl group, a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group or a monovalent heterocyclic group, when Y is an alkyl group, a cycloalkyl group, an aryl group or a monovalent heterocyclic group, these groups optionally have a substituent, when a plurality of Y are present, they may be the same or different, however, at least one Y is a formyl group, Ar D represents an aromatic hydrocarbon ring or a heterocyclic group, and these groups optionally have a substituent, Ar E represents an aromatic hydrocarbon ring or a heterocyclic group, and these groups optionally have a substituent, when a plurality of Ar E are present, they may be the same or different, R 2 represents a single bond or an aliphatic hydrocarbon group, and these groups optionally have a substituent, when a plurality of R 2 are present, they may be the same or different, R E and R F each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group or a monovalent heterocyclic group, and these groups optionally have a substituent, when a plurality of R E and R F are present, they may be the same or different at each occurrence. 6 . The production method according to claim 1 , wherein said constitutional unit (1-1) is a constitutional unit represented by the formula (4-1), and said constitutional unit (1-2) is a constitutional unit represented by the formula (4-2): wherein, n3 represents an integer of 1 to 3, Z represents a formyl group, a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group or a monovalent heterocyclic group, when Z is an alkyl group, a cycloalkyl group, an aryl group or a monovalent heterocyclic group, these groups optionally have a substituent, when a plurality of Z are present, they may be the same or different, however, at least one Z is a formyl group, Ar F represents an aromatic hydrocarbon ring or a heterocyclic group, and these groups optionally have a substituent, R G and R H each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group or a monovalent heterocyclic group, and these groups optionally have a substituent, when a plurality of R G and R H are present, they may be the same or different at each occurrence. 7 . The production method according to claim 1 , comprising a step of purifying the resultant polymer compound A using an ads
Side-chains having aromatic units · CPC title
containing carboxy groups (COOH) and/or -C(=O)O-moieties · CPC title
Suzuki reactions · CPC title
Purification · CPC title
fluorene-based, e.g. fluorene, indenofluorene, or spirobifluorene · CPC title
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