Cr-si sintered body

Patent metadata

Field	Value
Publication number	US-2022017424-A1
Application number	US-201917295191-A
Country	US
Kind code	A1
Filing date	Nov 18, 2019
Priority date	Nov 22, 2018
Publication date	Jan 20, 2022
Grant date	—

Abstract

It is difficult for a Cr—Si-based sintered body composed of chromium silicide (CrSi2) and silicon (Si) to have high strength.Provided is a Cr—Si-based sintered body including Cr (chromium) and silicon (Si), in which the crystal structure attributed by X-ray diffraction is composed of chromium silicide (CrSi2) and silicon (Si), a CrSi2 phase is present at 60 wt % or more in a bulk, a density of the sintered body is 95% or more, and an average grain size of the CrSi2 phase is 60 μm or less.

First claim

1 . A Cr—Si-based sintered body comprising Cr (chromium) and silicon (Si), wherein the crystal structure attributed by X-ray diffraction is composed of chromium silicide (CrSi 2 ) and silicon (Si), a CrSi 2 phase is present at 60 wt % or more in a bulk, a density of the sintered body is 95% or more, and an average grain size of the CrSi 2 phase is 60 μm or less.

2 . The Cr—Si-based sintered body according to claim 1 , wherein a flexural strength is 100 MPa or more.

3 . The Cr—Si-based sintered body according to claim 1 , wherein an amount of oxygen in the bulk is 1 wt % or less.

4 . A sputtering target comprising the Cr—Si-based sintered body according to claim 1 .

5 . A method for producing a thin film, the method comprising performing sputtering using the sputtering target according to claim 4 .

Assignees

• Tosoh Corp

Inventors

• Hara Hiroyuki
• Kuramochi Hideto
• Itoh Kenichi

Classifications

• C23C14/3414 Primary

  Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy · CPC title

• C04B2235/6562

  Heating rate · CPC title

• C04B2235/775

  Products showing a density-gradient · CPC title

• C04B35/626

  Preparing or treating the powders individually or as batches {(pigments for ceramics C09C1/0009); preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B} · CPC title

• C04B2235/3891

  Silicides, e.g. molybdenum disilicide, iron silicide · CPC title