Chemical solution evaporation device and substrate processing device including the same

Patent metadata

Field	Value
Publication number	US-2022016580-A1
Application number	US-202117239644-A
Country	US
Kind code	A1
Filing date	Apr 25, 2021
Priority date	Jul 20, 2020
Publication date	Jan 20, 2022
Grant date	—

Abstract

A chemical solution vaporization device includes a chemical solution tank including chemical solution vaporization rooms, a chemical solution sensing room, and a chemical solution supply room. A first internal wall separating the plurality of chemical solution vaporization rooms from each other includes a first opening at a lower portion thereof. A second internal wall separating at least one of the plurality of chemical solution vaporization rooms from the chemical solution supply room includes a second opening at a lower portion thereof. A third internal wall separating at least one of the plurality of chemical solution vaporization rooms from the chemical solution sensing room includes a third opening at a lower portion thereof. And a lower portion of a fourth internal wall separating the chemical solution sensing room from the chemical solution supply room is combined with the lower wall.

First claim

1 . A chemical solution vaporization device comprising:
a chemical solution tank comprising a lower wall, first through fourth internal walls, an external wall defining a plurality of chemical solution vaporization rooms, a chemical solution sensing room, and a chemical solution supply room and configured to store a chemical solution, wherein:
the first internal wall is configured to separate the plurality of chemical solution vaporization rooms from each other and comprises a first opening at a lower portion thereof,
the second internal wall is configured to separate at least one of the plurality of chemical solution vaporization rooms from the chemical solution supply room and comprises a second opening at a lower portion thereof,
the third internal wall is configured to separate at least one of the plurality of chemical solution vaporization rooms from the chemical solution sensing room and comprises a third opening at a lower portion thereof, and
a lower portion of the fourth internal wall is configured to separate the chemical solution sensing room from the chemical solution supply room and is combined with the lower wall;
a chemical solution supply unit configured to supply the chemical solution to the chemical solution supply room; a bubbler configured to supply a vaporization gas for vaporizing the chemical solution into the chemical solution stored in the plurality of chemical solution vaporization rooms; and a level sensor in the chemical solution sensing room and configured to sense a level of the chemical solution.

2 . The chemical solution vaporization device of claim 1 , wherein:
the first opening comprises a gap between the first internal wall and the lower wall, the second opening comprises a gap between the second internal wall and the lower wall, and the third opening comprises a gap between the third internal wall and the lower wall.

3 . The chemical solution vaporization device of claim 2 , wherein a separation distance between the first internal wall and the lower wall in a vertical direction is greater than:
a separation distance between the second internal wall and the lower wall in the vertical direction, and a separation distance between the third internal wall and the lower wall in the vertical direction.

4 . The chemical solution vaporization device of claim 1 , wherein the chemical solution tank has a cuboid shape.

5 . The chemical solution vaporization device of claim 1 , wherein the level sensor comprises an ultrasonic sensor apart from a surface of the chemical solution in the chemical solution sensing room in a vertical direction.

6 . The chemical solution vaporization device of claim 1 , wherein the chemical solution supply unit comprises:
a lower surface configured to block a flow of the chemical solution in a vertical direction, and a side surface, comprising a plurality of chemical solution discharge holes of different heights from each other, that sprays the chemical solution in a direction horizontal to a surface of the chemical solution in the chemical solution supply room via the plurality of chemical solution discharge holes.

7 . The chemical solution vaporization device of claim 6 , wherein an area occupied by the plurality of chemical solution discharge holes among an area of a side surface of the chemical solution supply unit is about 20% to about 80%.

8 . The chemical solution vaporization device of claim 1 , wherein the bubbler comprises:
a vaporization gas injector configured to provide a path through which the vaporization gas moves; and a vaporization gas discharger connected to a lower portion of the vaporization gas injector and having a cross-sectional area greater than that of the vaporization gas injector, the vaporization gas discharger configured to discharge the vaporization gas into the chemical solution, wherein the vaporization gas discharger comprises a plurality of vaporization gas discharge holes in a radial shape having a constant distance from a center of the vaporization gas discharger on an upper surface thereof.

9 . The chemical solution vaporization device of claim 8 , wherein a distance between each of the vaporization gas discharge holes and a side surface of the vaporization gas injector is identical to a distance between the vaporization gas discharge hole and the first internal wall.

10 . A chemical solution vaporization device comprising:
a chemical solution tank comprising a plurality of chemical solution vaporization rooms, a chemical solution sensing room, and a chemical solution supply room; a chemical solution supply unit configured to supply a chemical solution to the chemical solution supply room; a bubbler configured to supply a vaporization gas into the chemical solution stored in the plurality of chemical solution vaporization rooms, the bubbler comprising:
a vaporization gas injector providing a path in which the vaporization gas moves; and
a vaporization gas discharger comprising a vaporization gas discharge group comprising a plurality of vaporization gas discharge holes in a radial shape having a constant distance from a center portion of the vaporization gas injector on an upper surface thereof, the vaporization gas discharger configured to discharge the vaporization gas into the chemical solution; and
a level sensor in the chemical solution sensing room and configured to sense a level of the chemical solution.

11 . The chemical solution vaporization device of claim 10 , wherein:
the vaporization gas discharger comprises no other vaporization gas discharge group than the vaporization gas discharge group, and the vaporization gas discharge group is on an upper surface of the vaporization gas discharger so that a distance between each of the vaporization gas discharge holes and a side surface of the vaporization gas injector is identical to a distance between the vaporization gas discharge hole and the first internal wall.

12 . The chemical solution vaporization device of claim 11 , wherein:
the plurality of vaporization gas discharge holes is 36 at an interval of about 10 degrees, and each of the plurality of vaporization gas discharge holes has a circular shape with a diameter of about 0.20 mm to about 0.50 mm.

13 . The chemical solution vaporization device of claim 11 , wherein:
the plurality of vaporization gas discharge holes is 18 at an interval of about 20 degrees, and each of the plurality of vaporization gas discharge holes has a circular shape with a diameter of about 0.40 mm to about 0.70 mm.

14 . The chemical solution vaporization device of claim 10 , wherein:
the chemical solution tank comprises a lower wall, first through fourth internal walls, and an external wall defining the plurality of chemical solution vaporization rooms, the chemical solution sensing room, and the chemical solution supply room, the first internal wall is configured to separate the plurality of chemical solution vaporization rooms from each other and has a first opening at a lower portion thereof, the second internal wall is configured to separate at least one of the plurality of chemical solution vaporization rooms from the chemical solution supply room and has a second opening at a lower portion thereof, the third internal wall is configured to separate at least one of the plurality of chemical solution vaporization rooms from the chemical solution sensing room and has a third opening at a lower portion thereof, and a lower portion of the fourth internal wall separates the chemical solution sensing room from the chemical solution supply room and is coupled with the lower wall.

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Assignees

• Samsung Electronics Co Ltd

Inventors

• Seo Wonguk
• Park Sungyong
• KIM Hongju
• Sul Ansook
• Heo Seok
• Xu Yinghu

Classifications

• G03F7/0751

  used as adhesion-promoting additives or as means to improve adhesion · CPC title

• G01F23/296

  Acoustic waves · CPC title

• G03F7/707

  Chucks, e.g. chucking or un-chucking operations or structural details · CPC title

• B01D3/346 Primary

  the gas being used for removing vapours, e.g. transport gas · CPC title

• B01D1/16

  by spraying (B01D1/22 takes precedence) · CPC title