Method for designing piezoelectric element unit, ultrasonic element having the piezoelectric element unit manufactured using the same, method for manufacturing the ultrasonic element, and acoustic pressure focusing device having the ultrasonic element

Patent metadata

Field	Value
Publication number	US-2022013711-A1
Application number	US-201917294672-A
Country	US
Kind code	A1
Filing date	Nov 4, 2019
Priority date	Nov 29, 2018
Publication date	Jan 13, 2022
Grant date	—

Abstract

A method for designing a piezoelectric element unit, a ultrasonic element having the piezoelectric element manufactured using the method, a method for manufacturing the ultrasonic element, and an acoustic pressure focusing device having the ultrasonic element are provided. In the method for designing a piezoelectric element unit, a target position and a target distance are selected. A basic information of a piezoelectric element base material is inputted. Each of a plurality of grids is grouped into a unit grid group. A size of an output acoustic pressure outputted at each unit grid group is calculated. The unit grid group outputting the output acoustic pressure included in a range of a reference acoustic pressure among a plurality of the unit groups is decided. The plurality of ring patterns being concentric is determined based on a pattern shape information.

First claim

1 . A method for designing a piezoelectric element unit having a plurality of ring patterns being concentric, the method comprising:
selecting a target position at which a maximum acoustic pressure is focused, and a target distance to the target position; inputting a basic information of a piezoelectric element base material having a circular shape; grouping each of a plurality of grids into a unit grid group, wherein a cross-section of the piezoelectric element base material along a height direction is divided into the plurality of girds which is formed along the height direction and a radial direction of the piezoelectric element base material; calculating a size of an output acoustic pressure outputted at each unit grid group; deciding the unit grid group outputting the output acoustic pressure included in a range of a reference acoustic pressure among a plurality of the unit groups, wherein the reference acoustic pressure is predetermined based on the maximum acoustic pressure, the target position and the target distance; and determining the plurality of ring patterns being concentric, based on a pattern shape information having a position and a width included in each of the decided unit grid groups, from the piezoelectric element base material.

2 . The method of claim 1 , wherein after a plurality of the target positions is selected, the piezoelectric element unit outputs an acoustic pressure so as to focus the maximum acoustic pressure required at each of the target positions.

3 . A ultrasonic element comprising:
a piezoelectric element unit having the plurality of ring patterns being concentric, wherein the piezoelectric element unit is manufactured using the method of claim 1 ; a lower electrode disposed under the piezoelectric element unit; and an upper electrode disposed on the piezoelectric element unit.

4 . The ultrasonic element of claim 3 , wherein the piezoelectric element unit further has a connecting pattern formed along a radial direction and connecting the ring patterns,
wherein the upper electrode comprises:
upper ring electrodes disposed on the ring pattern and spaced apart from each other; and
an upper connecting electrode disposed on the connecting pattern and connecting the upper ring electrodes with each other.

5 . The ultrasonic element of claim 3 , wherein the piezoelectric element unit has a base integrally formed under the ring patterns, and the lower electrode is entirely formed under the base.

6 . The ultrasonic element of claim 3 , wherein the piezoelectric element unit further has a connecting pattern formed along a radial direction and connecting the ring patterns, and the ring patterns are separated except for the connecting pattern,
wherein the lower electrode comprises:
lower ring electrodes disposed under the ring pattern and spaced apart from each other; and
a lower connecting electrode disposed under the connecting pattern and connecting the lower ring electrodes with each other.

7 . A method for manufacturing an ultrasonic element, the method comprising:
preparing a lower electrode having a circular plate shape; forming a piezoelectric element base material on the lower electrode; forming an upper electrode on the piezoelectric element base material; and machining the upper electrode and the piezoelectric element base material at the same time via a laser machining, so as to form a plurality of ring patterns having a ring shape based on a pattern shape information of the method of claim 1 .

8 . The method of claim 7 , wherein in the machining, an irradiated laser passes through the upper electrode and is blocked by the piezoelectric element base material, so that a lower portion of the piezoelectric element base material remains to be connected.

9 . The method of claim 7 , wherein in the machining, an irradiated laser passes through the upper electrode, the piezoelectric element base material and the lower electrode, so that the upper electrode, the piezoelectric element base material and the lower electrode are separated after the machining.

10 . An acoustic pressure focusing device comprising:
the ultrasonic element of claim 3 ; an absorbing part disposed at a rear of the ultrasonic element and configured to absorb an ultrasonic wave generated by the ultrasonic element; an inner housing configured to enclose an outer surface of the ultrasonic element and the absorbing part; and an outer housing configured to receive the inner housing and configured to expose a front of the ultrasonic element outwardly.

11 . The acoustic pressure focusing device of claim 10 , further comprising:
a coating layer configured to cover the outer housing and the ultrasonic element.

12 . The acoustic pressure focusing device of claim 11 , wherein the coating layer is further filled in a gap formed at the ultrasonic element.

13 . The acoustic pressure focusing device of claim 11 , further comprising:
an impedance matching part disposed between the upper electrode and the coating layer, or disposed at the gap of the ultrasonic element.

Assignees

• Korea Inst Mach & Materials
• Univ Hanyang Ind Univ Coop Found

Inventors

• Hur Shin
• Song Kyungjun
• Yoon Gilho
• Choi Hyunggyu

Classifications

• H04R17/00

  Piezoelectric transducers; Electrostrictive transducers (piezoelectric or electrostrictive elements in general H10N30/00; details of piezoelectric or electrostrictive motors, generators or positioners {H10N30/00}) · CPC title

• H01L41/047

  Electricity · mapped topic

• H01L41/053

  Electricity · mapped topic

• H01L41/09

  Electricity · mapped topic

• H01L41/25 Primary

  Electricity · mapped topic