Miniature fluid control device
US-2017218941-A1 · Aug 3, 2017 · US
US2021408362A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2021408362-A1 |
| Application number | US-202117349249-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jun 16, 2021 |
| Priority date | Jun 30, 2020 |
| Publication date | Dec 30, 2021 |
| Grant date | — |
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Official abstract text for this publication.
A piezoelectric actuator includes a square suspension plate, an outer frame, a plurality of brackets and a square piezoelectric ceramic plate. The outer frame is arranged around the suspension plate. A second surface of the outer frame and a second surface of the suspension plate are coplanar with each other. Each of the plurality of brackets has two ends, a first end is perpendicular to and connected with the suspension plate, and a second end is perpendicular to and connected with the outer frame for elastically supporting the suspension plate. Each bracket has a length in a range between 1.22 mm and 1.45 mm and a width in a range between 0.2 mm and 0.6 mm. A length of the piezoelectric ceramic plate is not larger than a length of the suspension plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate.
Opening claim text (preview).
What is claimed is: 1 . A piezoelectric actuator, comprising: a suspension plate having a square shape and with a central portion and a periphery portion, wherein the suspension plate is permitted to undergo a curvy vibration from the central portion to the periphery portion; an outer frame arranged around the suspension plate; a plurality of brackets, wherein each of the plurality of brackets has two ends, a first end is perpendicular to and connected with the suspension plate, and a second end is perpendicular to and connected with the outer frame for elastically supporting the suspension plate, and each bracket has a length in a range between 1.22 mm and 1.45 mm, and a width in a range between 0.2 mm and 0.6 mm; and a piezoelectric ceramic plate having a square shape, wherein a length of a side of the piezoelectric ceramic plate is equal to or less than a length of a side of the suspension plate, and the piezoelectric ceramic plate is attached on a first surface of the suspension plate to drive the suspension plate to undergo the curvy vibration when a voltage is applied to the piezoelectric ceramic plate. 2 . The piezoelectric actuator according to claim 1 , wherein the plurality of brackets are four brackets. 3 . The piezoelectric actuator according to claim 1 , wherein the first end of each bracket is perpendicular to and connected with a lateral rim of the suspension plate, and the second end of the bracket is perpendicular to and connected with an inner rim of the outer frame. 4 . The piezoelectric actuator according to claim 1 , wherein the length of each bracket is 1.30 mm. 5 . The piezoelectric actuator according to claim 1 , wherein the width of each bracket is 0.45 mm. 6 . The piezoelectric actuator according to claim 1 , wherein a thickness of the piezoelectric ceramic plate is in a range between 0.05 mm and 0.3 mm. 7 . The piezoelectric actuator according to claim 6 , wherein the thickness of the piezoelectric ceramic plate is 0.10 mm. 8 . The piezoelectric actuator according to claim 1 , wherein a length of the suspension plate is in a range between 7.5 mm and 12 mm, and a thickness of the suspension plate is in a range between 0.1 mm and 0.4 mm. 9 . The piezoelectric actuator according to claim 8 , wherein the length of the suspension plate is in a range between 9 mm and 10 mm, and the thickness of the suspension plate is 0.27 mm.
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