Lock-in pixel with reduced noise current and sensors including the same

Patent metadata

Field	Value
Publication number	US-2021392280-A1
Application number	US-202117324855-A
Country	US
Kind code	A1
Filing date	May 19, 2021
Priority date	Jun 16, 2020
Publication date	Dec 16, 2021
Grant date	—

Abstract

An optical sensing apparatus includes an absorption region configured to receive an optical signal and to generate, in response to the optical signal, photo-generated electrons and photo-generated holes, a carrier steerer, and circuitry electrically coupled to the carrier steerer and a controller. The carrier steerer includes a first p-doped region, a first n-doped region electrically shorted with the first p-doped region, a first gate configured to control a flow of holes from the absorption region to the first p-doped region, and a second gate configured to control a flow of electrons from the absorption region to the first n-doped region. The circuitry is configured receive electrical signals from the controller to synchronize operation of the first and second gates so that during a first time period holes flow from the absorption region to the first p-doped region while electrons do not flow from the absorption region to the first n-doped region and during a second time period electrons flow from the absorption region to the first n-doped region while holes do not flow from the absorption region to the first p-doped region.

First claim

What is claimed is:

1 . An optical sensing apparatus comprising:
an absorption region configured to receive an optical signal and to generate, in response to the optical signal, photo-generated electrons and photo-generated holes; a carrier steerer comprising:
a first p-doped region;
a first n-doped region electrically shorted with the first p-doped region;
a first gate configured to control a flow of holes from the absorption region to the first p-doped region; and
a second gate configured to control a flow of electrons from the absorption region to the first n-doped region; and
circuitry electrically coupled to the carrier steerer and a controller, the circuitry configured receive electrical signals from the controller to synchronize operation of the first and second gates so that during a first time period holes flow from the absorption region to the first p-doped region while electrons do not flow from the absorption region to the first n-doped region and during a second time period electrons flow from the absorption region to the first n-doped region while holes do not flow from the absorption region to the first p-doped region.

2 . The optical sensing apparatus of claim 1 , wherein the carrier steerer is a first carrier steerer and the optical sensing apparatus further comprises a second carrier steerer comprising:
a second p-doped region; a second n-doped region electrically shorted with the second p-doped region; a third gate configured to control a flow of holes from the absorption region to the second p-doped region; and a fourth gate configured to control a flow of electrons from the absorption region to the second n-doped region.

3 . The optical sensing apparatus of claim 2 , wherein the circuitry is electrically coupled to the second carrier steerer, the circuitry configured receive electrical signals from the controller to synchronize operation of the third and fourth gates so that during the second time period holes flow from the absorption region to the second p-doped region while electrons do not flow from the absorption region to the second n-doped region and during the first time period electrons flow from the absorption region to the second n-doped region while holes do not flow from the absorption region to second the p-doped region.

4 . The optical sensing apparatus of claim 3 ,
wherein the circuitry comprises a first control circuit, a second control circuit, a third control circuit, and a fourth control circuit, wherein the first gate, the second gate, the third gate, and the fourth gate are electrically coupled to the controller respectively via an output of the first control circuit, an output of the second control circuit, an output of the third control circuit, and an output of the fourth control circuit, and wherein the output of the first control circuit generates a voltage that ranges from zero to a first positive value, the output of the second control circuit generates a voltage that ranges from a first negative value to zero, the output of the third control circuit generates a voltage that ranges from zero to the first positive value, and the output of the fourth control circuit generates a voltage that ranges from the first negative value to zero.

5 . The optical sensing apparatus of claim 4 , wherein the circuitry is configured to receive electrical signals from the controller so that, during the first time period, the output of the first control circuit generates a voltage at zero and the output of the second control circuit generates a voltage at the first negative value, and the output of the third control circuit generates a voltage at the first positive value and the output of the fourth control circuit generates a voltage at zero.

6 . The optical sensing apparatus of claim 5 , wherein the circuitry is configured to receive electrical signals from the controller so that, during the second time period, the output of the first control circuit generates a voltage at the first positive value and the output of the second control circuit generates a voltage at the zero, and the output of the third control circuit generates a voltage at zero and the output of the fourth control circuit generates a voltage at the first negative value.

7 . The optical sensing apparatus of claim 2 , wherein the first carrier steerer is coupled to a first readout circuit and the second carrier steerer is coupled to a second readout circuit,
the first carrier steerer being configured to provide a first photo-current to the first readout circuit and the second carrier steerer being configured to provide a second photo-current to the second readout circuit, and wherein a polarity of the first photo-current is opposite of a polarity of the second photo-current.

8 . The optical sensing apparatus of claim 1 , wherein the absorption region is composed of a first material.

9 . The optical sensing apparatus of claim 8 , wherein the carrier steerer is composed of the first material.

10 . The optical sensing apparatus of claim 8 , wherein at least a portion of the carrier steerer is composed of a second material.

11 . The optical sensing apparatus of claim 10 , wherein the first material comprises germanium, and wherein the second material comprises silicon.

12 . The optical sensing apparatus of claim 9 , wherein the first material comprises germanium or silicon.

13 . The optical sensing apparatus of claim 1 , comprising a plurality of pixels, one of the pixels comprising the absorption region and the carrier steerer.

14 . A time-of-flight sensor comprising an emitter and the optical sensing apparatus of claim 1 .

15 . A mobile device comprising the optical sensing apparatus of claim 1 .

16 . A light detection method, comprising:
during a first time period, configuring a first carrier steerer to direct holes created in an absorption region of an optical sensor to flow from the absorption region to a first p-doped region of the optical sensor and prevent electrons created in the absorption region from flowing from the absorption region to a first n-doped region of the optical sensor, the first n-doped region being electrically shorted with the first p-doped region; during a second time period, configuring the first carrier steerer to direct electrons created in the absorption region to flow from the absorption region to the first n-doped region and prevent holes created in the absorption region from flowing from the absorption region to the first p-doped region; receiving electrical signals from the optical sensor during the first and second times in response to the holes flowing to the first p-doped region during the first time period and the electrons flowing to the first n-doped region during the second time period; and processing the received electrical signals.

17 . The light detection method of claim 16 , further comprising
during the first time period, configuring a second carrier steerer to prevent holes created in the absorption region from flowing from the absorption region to a second p-doped region of the optical sensor and direct electrons created in the absorption region to flow from the absorption region to a second n-doped region of the optical sensor, the second n-doped region being electrically shorted with the second p-doped region; and during the second time period, configuring the second carrier steerer to direct holes created in the absorption region to flow from the absorption region to the second n-doped region and prevent electrons created in the absorption region from flowing from the absorption re

Assignees

• Artilux Inc

Inventors

• Na Yun-Chung

Classifications

• G01S7/4863 Primary

  Detector arrays, e.g. charge-transfer gates · CPC title

• H04N25/705

  Pixels for depth measurement, e.g. RGBZ · CPC title

• H04N25/76

  Addressed sensors, e.g. MOS or CMOS sensors · CPC title

• H04N25/63

  applied to dark current · CPC title

• H10F39/151

  Geometry or disposition of pixel elements, address lines or gate electrodes · CPC title