Miniature fluid control device
US-2018066649-A1 · Mar 8, 2018 · US
US2021363984A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2021363984-A1 |
| Application number | US-202117314197-A |
| Country | US |
| Kind code | A1 |
| Filing date | May 7, 2021 |
| Priority date | May 19, 2020 |
| Publication date | Nov 25, 2021 |
| Grant date | — |
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A fluid transportation actuator is disclosed and includes a silencing jet orifice plate, a chamber frame, an actuator, an insulation frame and a conductive frame. The silencing jet orifice plate includes a silencing plate, a suspension plate and a central aperture. The suspension plate is permitted to undergo a bending vibration. The central aperture is formed on a center of the suspension plate. The silencing plate is disposed and fixed in the central aperture disposed at the center of the suspension plate. The chamber frame is stacked on the suspension plate. The actuator is stacked on the chamber frame. The actuator generates the bending vibration in a reciprocating manner as a voltage is applied thereto. The actuator includes a piezoelectric-thin-plate pin. The insulation frame is stacked on the actuator. The conductive frame is stacked on the insulation frame and includes a conductive-frame pin.
Opening claim text (preview).
1 . A fluid transportation actuator, comprising: a silencing jet orifice plate, comprising; a silencing plate; a suspension plate permitted to undergo a bending vibration; and a central aperture formed on a center of the suspension plate, wherein the silencing plate is disposed and fixed on the central aperture disposed at the center of the suspension plate; a chamber frame carried and stacked on the suspension plate; an actuator carried and stacked on the chamber frame, wherein the actuator generates the bending vibration in a reciprocating manner as a voltage is applied thereto; an insulation frame carried and stacked on the actuator; and a conductive frame carried and stacked on the insulation frame, and comprising a conductive-frame pin, wherein a resonance chamber is collaboratively defined by the actuator, the chamber frame and the silencing jet orifice plate, wherein when the silencing jet plate orifice is driven by the actuator in resonance, the suspension plate of the silencing jet orifice plate is vibrated and displaced in the reciprocating manner, so as to achieve fluid transportation. 2 . The fluid transportation actuator according to claim 1 , wherein the actuator comprises: a piezoelectric thin plate carried and stacked on the chamber frame; a piezoelectric thick plate carried and stacked on the piezoelectric thin plate; and a piezoelectric element is carried and stacked on the piezoelectric thick plate, wherein the piezoelectric element drives the piezoelectric thin plate and the piezoelectric thick plate as the voltage applied, and generates the bending vibration in the reciprocating manner. 3 . The fluid transportation actuator according to claim 2 , wherein the piezoelectric thin plate and the piezoelectric thick plate are made of two metals having different thermal expansion coefficients, two different flexibilities and two different rigidities, and both are not stainless steel. 4 . The fluid transportation actuator according to claim 3 , wherein the piezoelectric thin plate has at least one first side length and at least one second side length, and the length of the at least one first side length and the length of the at least one second side length are the same; wherein the piezoelectric thick plate has at least one third side length and at least one fourth side length, and the length of the at least one third side length and the length of the at least one fourth side length are the same; wherein the piezoelectric element has at least one fifth side length and at least one sixth side length, and the length of the at least one fifth side length and the length of the at least one sixth side length are the same. 5 . The fluid transportation actuator according to claim 4 , wherein the length of the at least one first side length is greater than the length of the at least one third side length, the length of the at least one first side length is greater than the length of the at least one fifth side length, and the length of the at least one third side length is greater than or equal to the length of the at least one fifth side. 6 . The fluid transportation actuator according to claim 5 , wherein a ratio of the length of the at least one fifth side length to the length of the at least one third side length is in a range of 1:1 to 1:1.5. 7 . The fluid transportation actuator according to claim 5 , wherein the length of the at least one first side length and the length of the at least one second side length range from 5.0 mm to 16.0 mm. 8 . The fluid transportation actuator according to claim 5 , wherein the length of the at least one third side length and the length of the at least one fourth side length range from 3.5 mm to 9.5 mm. 9 . The fluid transportation actuator according to claim 5 , wherein the length of the at least one fifth side length and the length of the at least one sixth side length range from 2.95 mm to 9.0 mm. 10 . The fluid transportation actuator according to claim 3 , wherein the piezoelectric thin plate comprises at least one piezoelectric-thin-plate corner, the at least one piezoelectric-thin-plate corner is a rounded corner, and the rounded corner has a radius less than 2.0 mm, wherein the piezoelectric thin plate comprises at least another piezoelectric-thin-plate corner, which is a non-rounded corner. 11 . The fluid transportation actuator according to claim 3 , wherein the piezoelectric thick plate comprises at least one piezoelectric-thick-plate corner, the at least one piezoelectric-thick-plate corner is a rounded corner, and the rounded corner has a radius less than 2.0 mm. 12 . The fluid transportation actuator according to claim 11 , wherein the piezoelectric thick plate has a piezoelectric-thick-plate thickness, and the piezoelectric-thick-plate thickness ranges from 0.05 mm to 0.5 mm. 13 . The fluid transportation actuator according to claim 3 , wherein the piezoelectric element comprises four piezoelectric-element corners, and the four piezoelectric-element corners are square corners. 14 . The fluid transportation actuator according to claim 13 , wherein the piezoelectric thin plate has a piezoelectric-thin-plate thickness, and the piezoelectric-thin-plate thickness ranges from 0.05 mm to 0.2 mm.
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