Optical device having a substrate and a laser unit that emits light into the substrate

Patent metadata

Field	Value
Publication number	US-2021351562-A1
Application number	US-202117443353-A
Country	US
Kind code	A1
Filing date	Jul 26, 2021
Priority date	Nov 30, 2012
Publication date	Nov 11, 2021
Grant date	—

Abstract

An optical device includes a first substrate, having first and second surfaces, and a second substrate having a third surface. The first substrate includes: a laser unit, having an active layer and emitting light into the first substrate from the active layer; a reflecting mirror, having a plane obliquely intersecting an optical axis of light emitted from the laser unit, and being formed on the first surface so as to reflect the light toward the second surface; and a convex lens, being formed in a region on the second surface, the region including an optical axis of the light reflected by the reflecting mirror. The second substrate is provided with a grating coupler and an optical waveguide on the third surface, the optical waveguide having light incident on the grating coupler propagating therethrough.

First claim

What is claimed is:

1 . An optical device comprising:
a first substrate formed of a semiconductor material and comprising a first surface and a second surface, the first substrate comprising:
a laser unit having an active layer laminated between the first surface and the second surface and configured to emit light into the first substrate from the active layer,
a first mirror configured to reflect the light emitted from the laser unit toward the second surface, and
a convex lens integrally provided within a region of the second surface and configured to propagate the light, reflected from the first mirror, toward a second mirror;
the second mirror configured to reflect the light, received from the convex lens, toward a third mirror; the third mirror configured to reflect the light, reflected from the second mirror, toward a second substrate; and the second substrate comprises a grating coupler and an optical waveguide,
wherein the light, incident on the grating coupler, propagates through the optical waveguide.

2 . The optical device of claim 1 , further comprising:
an isolator disposed between on a light path between the second mirror and the third mirror.

3 . The optical device of claim 1 , further comprising:
a third substrate, fixed to the second substrate, configured to hold the second mirror.

4 . The optical device of claim 3 , further comprising:
a fourth substrate, fixed to the second substrate, configured to hold the third mirror.

5 . The optical device of claim 1 , wherein an electrode is disposed on the second surface.

6 . The optical device of claim 5 , further comprising:
a laser submount is disposed to the electrode.

7 . The optical device of claim 6 , wherein the laser submount is fixed to a third substrate configured to hold the second mirror.

8 . The optical device of claim 5 , wherein the electrode is a first electrode, and
wherein the optical device further comprises:
a second electrode disposed on the first surface,
wherein the first electrode and the second electrode are used inject a current into the active layer.

9 . The optical device of claim 1 , wherein the second mirror is configurable to adjust an angle of the second mirror.

10 . The optical device of claim 1 , wherein the second mirror comprises a micro electro mechanical systems (MEMS) structure.

11 . The optical device of claim 1 , wherein the third mirror is configurable to adjust an angle of the third mirror.

12 . The optical device of claim 1 , wherein the third mirror comprises a micro electro mechanical systems (MEMS) structure.

13 . The optical device of claim 1 , wherein the light propagated from the convex lens is converged.

14 . The optical device of claim 1 , wherein the light propagated from the convex lens is parallelized.

15 . The optical device of claim 1 , wherein a normal line of a plane of the first mirror obliquely intersects an optical axis of the light, emitted from the laser unit, at 45 degrees.

16 . The optical device of claim 1 , wherein an optical axis of the light, reflected from the first mirror and passing through the convex lens, penetrates a center of the convex lens.

17 . The optical device of claim 1 , wherein a diameter of the convex lens is 90 μm.

18 . The optical device of claim 1 , wherein a radius of curvature of the convex lens is 125 μm.

19 . The optical device of claim 1 , wherein the optical waveguide has a triangular shape.

20 . The optical device of claim 1 , wherein the optical waveguide is a first optical waveguide; and
wherein the second substrate further comprises:
a second optical waveguide disposed to be in contact with the first optical waveguide.

Assignees

• Lumentum Japan Inc

Inventors

• Arimoto Hideo
• Adachi Koichiro
• Sagawa Misuzu
• Suzuki Takanori
• Sasaki Hiroyasu

Classifications

• G02B6/3518

  the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device (MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833) · CPC title

• G02B6/4219

  Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor · CPC title

• H01S5/185

  having only horizontal cavities, e.g. horizontal cavity surface-emitting lasers [HCSEL] (comprising a photonic bandgap structure H01S5/11) · CPC title

• H01S5/12

  the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers (comprising a photonic bandgap structure H01S5/11; surface-emitting lasers H01S5/18) · CPC title

• H01S5/0267 Primary

  Integrated focusing lens (H01S5/18388 takes precedence) · CPC title