Multicathode deposition system and methods
US-12051576-B2 · Jul 30, 2024 · US
US2021331936A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2021331936-A1 |
| Application number | US-201816332125-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jul 17, 2018 |
| Priority date | Aug 30, 2017 |
| Publication date | Oct 28, 2021 |
| Grant date | — |
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A negative thermal expansion material and a preparation method thereof, and a negative thermal expansion film and a preparation method thereof are provided. The negative thermal expansion material includes Eu0.85Cu0.15MnO3-δ, wherein 0≤δ≤2.
Opening claim text (preview).
1 . A negative thermal expansion material, comprising Eu 0.85 Cu 0.15 MnO 3-δ , wherein 0≤δ≤2. 2 . The negative thermal expansion material according to claim 1 , wherein the negative thermal expansion material is formed from Eu 2 O 3 , CuO and Mn 2 O 3 powders by using a solid state sintering method. 3 . A method for preparing a negative thermal expansion material, comprising: mixing Eu 2 O 3 , CuO, and Mn 2 O 3 powders in a molar ratio of Eu:Cu:Mn=0.85:0.15:1; drying the powers mixed; molding the powders dried by pressing; and sintering the powders molded by pressing at a temperature above 1073 K. 4 . The method for preparing a negative thermal expansion material according to claim 3 , wherein the step of mixing Eu 2 O 3 , CuO, and Mn 2 O 3 powders comprises: firstly dry grinding the Eu 2 O 3 , CuO, and Mn 2 O 3 powders for 0.5 hours to 1.5 hours; and then grinding the Eu 2 O 3 , CuO, and Mn 2 O 3 powders for 0.5 hours to 1.5 hours with adding of anhydrous ethanol. 5 . The method for preparing a negative thermal expansion material according to claim 3 , wherein the step of sintering the powders molded by pressing at a temperature above 1073 K comprises: heating the powers molded by pressing from a room temperature to 1173 K to 1373 K at a heating rate of 3 K/min to 8 K/min, and maintaining the temperature of 1173 K to 1373 K for 10 hours to 24 hours. 6 . A negative thermal expansion film, comprising the negative thermal expansion material of claim 1 . 7 . A method for preparing a negative thermal expansion film, comprising: preparing an Eu 2 O 3 target, a CuO target, and an Mn 2 O 3 target, respectively; providing a substrate; placing the Eu 2 O 3 target, the CuO target, the Mn 2 O 3 target and the substrate in a reaction chamber; depositing Eu 2 O 3 , CuO, and Mn 2 O 3 film on the substrate by bombarding the targets, wherein the molar ratio of Eu, Cu and Mn is controlled to be 0.85:0.15:1; and maintaining the film deposited at a temperature above 1073 K. 8 . The method for preparing a negative thermal expansion film according to claim 7 , wherein the molar ratio of Eu, Cu, and Mn is controlled by controlling deposition time of the film. 9 . The method for preparing a negative thermal expansion film according to claim 7 , wherein the targets are bombarded by one of a radio frequency magnetron sputtering method and a pulsed laser method. 10 . A zero expansion material, comprising the negative thermal expansion material of claim 1 . 11 . A zero expansion composite film, comprising the negative thermal expansion film of claim 6 . 12 . An integrated circuit board, comprising the negative thermal expansion film of claim 6 . 13 . A negative thermal expansion film, comprising the negative thermal expansion material of claim 2 . 14 . A zero expansion material, comprising the negative thermal expansion material of claim 2 . 15 . The method for preparing a negative thermal expansion film according to claim 8 , wherein the targets are bombarded by one of a radio frequency magnetron sputtering method and a pulsed laser method. 16 . A zero expansion composite film, comprising the negative thermal expansion film of claim 13 . 17 . An integrated circuit board, comprising the negative thermal expansion film of claim 13 .
Ceramics or glasses (H10W40/254, H10W40/257, H10W40/255, H10W40/251, H10W40/253 take precedence) · CPC title
Burning or sintering processes (C04B33/32 takes precedence {; powder metallurgy B22F}) · CPC title
Milling · CPC title
based on manganites · CPC title
Thermal properties, e.g. thermal expansion coefficient · CPC title
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