Information displaying method and computer program product for semiconductor manufacturing apparatus
US-2024231313-A1 · Jul 11, 2024 · US
US2021278830A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2021278830-A1 |
| Application number | US-201716328650-A |
| Country | US |
| Kind code | A1 |
| Filing date | Aug 30, 2017 |
| Priority date | Aug 30, 2016 |
| Publication date | Sep 9, 2021 |
| Grant date | — |
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System for diagnosing pneumatic control valve online include a sensor set having sensors, attached to a pneumatic control valve, for measuring the state of the pneumatic control valve, a smart data analyzer for processing sensor signal acquired in real time from the sensor set and generating pneumatic control valve state information for online automatic diagnosis of the pneumatic control valve, a data server for transmitting, to an online analysis server, the pneumatic control valve state information received in real time from the smart data analyzer and storing the pneumatic control valve state information for predetermined time period, the online diagnostic server for, by comparing the pneumatic control valve state information with pre-stored normal state data of the pneumatic control valve, determining whether the pneumatic control valve is in abnormal state and generating diagnostic information, and a client computer for displaying the diagnostic information received from the online diagnostic server.
Opening claim text (preview).
1 . A system for diagnosing a pneumatic control valve online, comprising: a sensor set including a plurality of sensors, attached to the pneumatic control valve, for measuring a state of the pneumatic control valve; a smart data analyzer for processing a sensor signal acquired in real time from the sensor set and generating pneumatic control valve state information for online automatic diagnosis of the pneumatic control valve; a data server for transmitting, to an online analysis server, the pneumatic control valve state information received in real time from the smart data analyzer and storing the pneumatic control valve state information for a predetermined time period; the online diagnostic server for determining whether the pneumatic control valve is in an abnormal state and generating diagnostic information by comparing the pneumatic control valve state information with pre-stored normal state data of the pneumatic control valve; and a client computer for displaying the diagnostic information received from the online diagnostic server. 2 . The system for diagnosing a pneumatic control valve online of claim 1 , wherein the sensor set includes at least one of: a stem force sensor, attached to a valve stem of the pneumatic control valve, for measuring a stem force; a stem displacement sensor for measuring a stem motion of the pneumatic control valve; and a pressure sensor for measuring an air pressure on a plurality of points of an air supply tube of a control loop that controls the pneumatic control valve. 3 . The system for diagnosing a pneumatic control valve online of claim 2 , wherein the smart data analyzer transmits a sensor signal including at least one of a stem force signal acquired from the stem force sensor, a stem displacement signal acquired from the stem displacement sensor and a plurality of pressure signals acquired from the pressure sensor to the data server. 4 . The system for diagnosing a pneumatic control valve online of claim 1 , wherein the smart data analyzer further generates detail analysis data for user detailed analysis for the pneumatic control valve by processing the sensor signal acquired from the sensor set in real time. 5 . The system for diagnosing a pneumatic control valve online of claim 4 , wherein the client computer receives the detail analysis data via the data server and the online diagnostic server, and includes an analysis tool such that a client is able to analyze a state of the pneumatic control valve based on the detail analysis data. 6 . The system for diagnosing a pneumatic control valve online of claim 4 , wherein the data server transmits the pneumatic control valve state information to the online diagnostic server with a first time interval, and transmits the detail analysis data to the online diagnostic server with a second time interval which is longer than the first time interval. 7 . The system for diagnosing a pneumatic control valve online of claim 4 , wherein the data server transmits the detail analysis data to the online diagnostic server in response to a request of the client computer. 8 . The system for diagnosing a pneumatic control valve online of claim 1 , wherein the system for diagnosing a pneumatic control valve online performs a diagnosis for states of a plurality of pneumatic control valves, and includes: a plurality of sensor sets, a plurality of smart data analyzers and a plurality of data servers corresponding to the plurality of pneumatic control valves. 9 . A method for diagnosing a pneumatic control valve online, comprising: measuring a state of the pneumatic control valve, by using a sensor set attached to the pneumatic control valve; generating, by a smart data analyzer, pneumatic control valve state information for online automatic diagnosis of the pneumatic control valve by processing a sensor signal acquired in real time from the sensor set; transmitting, by a data server, the pneumatic control valve state information received in real time from the smart data analyzer to an online analysis server, and storing the pneumatic control valve state information for a predetermined time period; generating diagnostic information, by the online diagnostic server, by determining whether the pneumatic control valve is in an abnormal state by comparing the pneumatic control valve state information with pre-stored normal state data of the pneumatic control valve; and displaying, by a client computer, the diagnostic information received from the online diagnostic server. 10 . The method for diagnosing a pneumatic control valve online of claim 9 , wherein the sensor set includes at least one of: a stem force sensor, attached to a valve step of the pneumatic control valve, for measuring a stem force; a stem displacement sensor for measuring a stem motion of the pneumatic control valve; and a pressure sensor for measuring an air pressure on a plurality of points of an air supply tube of a control loop that controls the pneumatic control valve. 11 . A storage medium readable by a computer for diagnosing a pneumatic control valve online, comprising a processor included in the computer to perform: a command for measuring a state of the pneumatic control valve, by using a sensor set attached to the pneumatic control valve; a command for generating, by a smart data analyzer, pneumatic control valve state information for online automatic diagnosis of the pneumatic control valve by processing a sensor signal acquired in real time from the sensor set; a command for transmitting, by a data server, the pneumatic control valve state information received in real time from the smart data analyzer to an online analysis server, and storing the pneumatic control valve state information for a predetermined time period; a command for generating diagnostic information, by the online diagnostic server, by determining whether the pneumatic control valve is in an abnormal state by comparing the pneumatic control valve state information with pre-stored normal state data of the pneumatic control valve; and a command for displaying, by a client computer, the diagnostic information received from the online diagnostic server.
Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods · CPC title
by measuring valve parameters · CPC title
for measuring valve parameters (F16K37/0033 takes precedence) · CPC title
actuated by fluid ({fluid-actuated lift valves F16K1/126} ; fluid-actuated check valves F16K15/00; fluid-actuated safety valves F16K17/00) · CPC title
Machine valves (testing valves for fluid tightness G01M3/00) · CPC title
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