Odor sensor and method for manufacturing odor sensor

Patent metadata

Field	Value
Publication number	US-2021262975-A1
Application number	US-201917255014-A
Country	US
Kind code	A1
Filing date	May 27, 2019
Priority date	Jul 12, 2018
Publication date	Aug 26, 2021
Grant date	—

Abstract

A smell sensor includes an ion sensor in which a sensing section provided with a sensitive film configured to change a potential in accordance with a state of a measurement target is formed on a semiconductor substrate; a substance adsorption film disposed on the sensitive film and configured to change the state with adsorption of a smell substance; and a reference electrode configured to apply a reference voltage to the substance adsorption film. The reference electrode is disposed to be separated from the sensitive film and not to overlap the sensing section when viewed in a thickness direction of the semiconductor substrate.

First claim

1 . A smell sensor comprising:
an ion sensor in which at least one sensing section provided with a sensitive film configured to change a potential in accordance with a state of a measurement target is formed on a substrate; a substance adsorption film as the measurement target, disposed on the sensitive film and configured to change the state with adsorption of a smell substance; and a reference electrode configured to apply a reference voltage to the substance adsorption film, wherein the reference electrode is disposed to be separated from the sensitive film and not to overlap the sensing section when viewed in a thickness direction of the substrate.

2 . The smell sensor according to claim 1 , further comprising:
a passivation layer provided to cover the ion sensor, wherein the substance adsorption film is provided to cover the passivation layer, wherein the sensitive film is in contact with the substance adsorption film through a first opening provided in the passivation layer, and wherein the reference electrode is provided between the substance adsorption film and the substrate, and is in contact with the substance adsorption film through a second opening provided in the passivation layer.

3 . The smell sensor according to claim 1 , further comprising:
a passivation layer provided to cover the ion sensor, wherein the substance adsorption film is provided to cover the passivation layer, wherein the sensitive film is in contact with the substance adsorption film through an opening provided in the passivation layer, and wherein the reference electrode is disposed at an outer edge portion of the sensing section when viewed in the thickness direction of the substrate, and includes a portion exposed inside the opening and in contact with the substance adsorption film.

4 . The smell sensor according to claim 1 , wherein the reference electrode is provided on at least a surface of the substance adsorption film opposite to the substrate.

5 . The smell sensor according to claim 1 ,
wherein the ion sensor has a plurality of sensing sections arranged one-dimensionally or two-dimensionally on the substrate, and wherein one substance adsorption film is disposed on the sensitive films of two or more sensing sections.

6 . The smell sensor according to claim 1 ,
wherein the ion sensor has a plurality of sensing sections arranged one-dimensionally or two-dimensionally on the substrate, and wherein a plurality of substance adsorption films are disposed on the sensitive films of different sensing sections.

7 . The smell sensor according to claim 1 ,
wherein the ion sensor has a plurality of sensing sections arranged one-dimensionally or two-dimensionally on the substrate, and wherein the reference electrode is disposed such that distances between the sensitive film of each of the plurality of sensing sections and the reference electrode are substantially the same.

8 . A method for manufacturing a smell sensor comprising:
a step of preparing an ion sensor in which a sensing section provided with a sensitive film configured to change a potential in accordance with a state of a measurement target is formed on a substrate; a step of disposing, on the sensitive film, a substance adsorption film as the measurement target configured to change the state with adsorption of a smell substance; and a step of disposing a reference electrode configured to apply a reference voltage to the substance adsorption film to be separated from the sensitive film and not to overlap the sensing section when viewed in a thickness direction of the substrate.

9 . The method for manufacturing a smell sensor according to claim 8 , wherein the substance adsorption film is provided to cover the sensitive film and the reference electrode after the reference electrode is disposed.

10 . The method for manufacturing a smell sensor according to claim 9 , further comprising:
a step of forming a passivation layer on the ion sensor to cover the reference electrode after the reference electrode is disposed; and a step of forming, in the passivation layer, a first opening for exposing at least a part of the sensitive film to the outside and a second opening for exposing at least a part of the reference electrode to the outside, wherein the substance adsorption film is provided to cover the passivation layer after the first opening and the second opening are formed, is in contact with the sensitive film through the first opening, and is in contact with the reference electrode through the second opening.

11 . The method for manufacturing a smell sensor according to claim 9 , further comprising:
a step of forming a passivation layer on the ion sensor to cover the reference electrode after the reference electrode is disposed at an outer edge portion of the sensing section when viewed in the thickness direction of the substrate; and a step of forming, in the passivation layer, an opening for exposing at least a part of the sensitive film and at least a part of the reference electrode to the outside, wherein the substance adsorption film is provided to cover the passivation layer after the opening is formed, and is in contact with the sensitive film and the reference electrode in the opening.

12 . The method for manufacturing a smell sensor according to claim 8 , wherein at least a part of the reference electrode is provided to cover a part of the substance adsorption film after the substance adsorption film is disposed.

Assignees

• Hamamatsu Photonics Kk
• National Univ Corporation Toyohashi Univ Of Technology

Inventors

• WAKAMORI Toshiki
• NAKAHIGASHI Shinichi
• Sawada Kazuaki

Classifications

• G01N27/4141 Primary

  specially adapted for gases · CPC title

• G01N33/0031

  comprising two or more sensors, e.g. a sensor array · CPC title

• G01N33/0019

  by preconcentration · CPC title