Optical filter and spectrometer including sub-wavelength double grating structure, and optical apparatus including the optical filter and spectrometer

Patent metadata

Field	Value
Publication number	US-2021255037-A1
Application number	US-202117230636-A
Country	US
Kind code	A1
Filing date	Apr 14, 2021
Priority date	Mar 24, 2017
Publication date	Aug 19, 2021
Grant date	—

Abstract

An optical filter may include a first reflector and a second reflector. The first reflector may include a plurality of first gratings having a first sub-wavelength dimension and being arranged to recur at a first interval in a first direction. The second reflector may be spaced apart from the first reflector and include a plurality of second gratings having a second sub-wavelength dimension and arranged to recur at a second interval in a direction parallel to the first direction. The first reflector and the second reflector may include different materials or different geometric structures from each other. Accordingly, it is easy to adjust the transmission wavelength characteristics of the optical filter.

First claim

What is claimed is:

1 . An optical filter array comprising:
a plurality of optical filters including a first optical filter and a second optical filter, wherein each of the first optical filter and the second optical filter comprises: a first reflector comprising a plurality of first non-metallic gratings and a first material covering the plurality of first non-metallic gratings and having a lower refractive index than a refractive index of the plurality of first non-metallic gratings, the first non-metallic gratings having a first sub-wavelength dimension and being arranged to recur at a first constant interval in a first direction; and a second reflector stacked on and spaced apart from the first reflector, the second reflector comprising a plurality of second non-metallic gratings and a second material covering the plurality of second non-metallic gratings having a lower refractive index than a refractive index of the plurality of second non-metallic gratings, and the plurality of second non-metallic gratings having a second sub-wavelength dimension and being arranged to recur at a second constant interval in a second direction parallel to the first direction, wherein the first reflector and the second reflector have at least one of different materials and different geometric structures from each other, wherein the first optical filter and the second optical filter are arranged horizontally perpendicular to a stacking direction of the first reflector and the second reflector, and wherein the first optical filter and the second optical filter are configured to represent a transmission wavelength band that is different from each other.

2 . The optical filter array of claim 1 , wherein, as to at least one of the first optical filter and the second optical filter, the first constant interval is different from the second constant interval, and first widths of first cross-sections of the plurality of first gratings in a third direction perpendicular to a first longitudinal direction of the plurality of first gratings are different from second widths of second cross-sections of the plurality of second gratings in a fourth direction perpendicular to a second longitudinal direction of the plurality of second gratings.

3 . The optical filter array of claim 1 , wherein a difference between a center wavelength of the transmission wavelength band of the first optical filter and a center wavelength of the transmission wavelength band of the second optical filter is smaller than 10 nm.

4 . The optical filter array of claim 1 , wherein a full width at half maximum of a transmission spectrum of each the first optical filter and the second optical filter is smaller than 2 nm.

5 . The optical filter array of claim 1 , wherein the transmission wavelength band is from 820 nm to 880 nm.

6 . The optical filter array of claim 1 , wherein the transmission wavelength band is from 820 nm to 880 nm.

7 . The optical filter array of claim 2 , wherein the first cross-sections of the plurality of first gratings in the third direction and the second cross-sections of the plurality of second gratings in the fourth direction have one of rectangular shapes, trapezoidal shapes, polygonal shapes, circular shapes, elliptical shapes, semi-circular shapes, and semi-elliptical shapes.

8 . The optical filter array of claim 1 , further comprising:
a third optical filter arranged horizontally perpendicular to the stacking direction and are configured to represent different transmission wavelength band than the first optical filter and the second optical filter.

9 . The optical filter array of claim 8 , wherein the center wavelength of the transmission wavelength band of the first optical filter, the center wavelength of the transmission wavelength band of the second optical filter, and a center wavelength of the transmission wavelength band of the third optical filter are uniformly distributed in a range from 820 nm to 880 nm.

10 . A spectrometer comprising:
a sensor substrate comprising a plurality of light detection elements; and an optical filter array of claim 1 , the plurality of optical filters arranged to respectively correspond to the plurality of light detection elements.

11 . The spectrometer of claim 10 , wherein the plurality of first gratings included in the each of the plurality of optical filters have a uniform thickness.

12 . The spectrometer of claim 10 , wherein the plurality of second gratings included in the each of the plurality of optical filters have a uniform thickness.

13 . The spectrometer of claim 10 , wherein the sensor substrate and the plurality of optical filters are monolithically formed.

14 . A smart phone comprising the spectrometer of claim 10 .

15 . An optical apparatus comprising:
a light source configured to emit light to an object; a spectrometer of claim 10 , the spectrometer being located on an optical path of the light emitted by the light source and reflected from the object; and an analyzer configured to analyze at least one from among a physical property, a shape, a position, and a movement of the object by analyzing the light detected by the spectrometer.

16 . A smart phone comprising the optical apparatus of claim 15 .

Assignees

• Samsung Electronics Co Ltd

Inventors

• Baik Chanwook
• Kim Jaekwan
• Song Byonggwon
• Yang Kiyeon
• Lee Jaesoong
• Lee Jeongyub
• Cho Kyungsang

Classifications

• G02B5/284

  of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates (etalons for fibre optic multiplexing G02B6/29358; etalons for spectral measurement G01J3/26) · CPC title

• G02B5/1814

  structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings (G02B5/189 takes precedence) · CPC title

• G01J3/18 Primary

  using diffraction elements, e.g. grating (gratings per se G02B) · CPC title

• G01J3/021 Primary

  using plane or convex mirrors, parallel phase plates, or particular reflectors · CPC title

• G01J3/26

  using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters · CPC title