Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type
US-10481500-B2 · Nov 19, 2019 · US
US2021215924A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2021215924-A1 |
| Application number | US-202016999228-A |
| Country | US |
| Kind code | A1 |
| Filing date | Aug 21, 2020 |
| Priority date | Jan 15, 2020 |
| Publication date | Jul 15, 2021 |
| Grant date | — |
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A freeform surface optical telescope imaging system is provided. The freeform surface optical telescope imaging system comprises a primary mirror, a secondary mirror, a compensating minor, and a spherical mirror. The primary minor, the secondary minor, the compensating minor, and the spherical mirror are spaced from each other. A surface shape of each of the primary mirror and the secondary mirror is a quadric surface. The primary mirror is used as an aperture stop. A surface shape of the compensating mirror is a freeform surface. A surface shape of the spherical mirror is a spherical surface. A light emitted from a light source would be reflected by the primary mirror, the secondary minor, the compensating mirror, and the spherical mirror to form an image on an image plane.
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What is claimed is: 1 . A freeform surface optical telescope imaging system, comprising: a primary mirror, a secondary mirror, a compensating mirror and a spherical mirror spaced away from each other, wherein a surface shape of each of the primary mirror and the secondary mirror is a quadric surface, the primary mirror is an aperture stop, a surface shape of the compensating mirror is a freeform surface, a surface shape of the spherical mirror is a spherical surface, and a light emitted from a light source is reflected by the primary mirror, the secondary minor, the compensating mirror, and the spherical mirror to form an image on a image plane. 2 . The freeform surface optical telescope imaging system of claim 1 , wherein a first three-dimensional rectangular coordinates system (X,Y,Z) is defined by a location of the primary mirror, a vertex of the primary mirror is an origin of the three-dimensional rectangular coordinates system (X,Y,Z), a reflective surface of the compensating mirror is an xy polynomial freeform surface; and an xy polynomial equation is z ( x , y ) = c ( x 2 + y 2 ) 1 + 1 - ( 1 + k ) c 2 ( x 2 + y 2 ) + ∑ i = 1 N A i x m y n , wherein z represents surface sag, c represents surface curvature, k represents conic constant, and Ai represents an ith term coefficient. 3 . The freeform surface optical telescope imaging system of claim 2 , wherein the reflective surface of compensating mirror is a fourth-order polynomial freeform surface of xy without odd items of x; and an equation of the fourth-order polynomial freeform surface of xy is: z ( x , y ) = c ( x 2 + y 2 ) 1 + 1 - ( 1 + k ) c 2 ( x 2 + y 2 ) + A 2 y + A 3 x 2 + A 5 y 2 + A 7 x 2 y +
on-axis systems with at least one of the mirrors having a central aperture · CPC title
off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements · CPC title
Optical design, e.g. procedures, algorithms, optimisation routines · CPC title
involving prisms or mirrors (G02B23/14 takes precedence) · CPC title
with curved faces · CPC title
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