Surface position detection apparatus, exposure apparatus, and exposure method
US-9927713-B2 · Mar 27, 2018 · US
Processing apparatus, and manufacturing method of movable body
US2021205920A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2021205920-A1 |
| Application number | US-201716756909-A |
| Country | US |
| Kind code | A1 |
| Filing date | Oct 25, 2017 |
| Priority date | Oct 25, 2017 |
| Publication date | Jul 8, 2021 |
| Grant date | — |
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Abstract
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A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a plurality of processing lights; and a first change apparatus that changes a relative positional relationship between light concentration positions of the plurality of processing lights in a direction that intersects with the surface of the object, the processing apparatus changes a thickness of a part of the object by irradiating the surface of the object with the plurality of processing lights.
First claim
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1 - 100 . (canceled) 101 . A processing apparatus comprising: a light irradiation apparatus that irradiates a surface of an object with a plurality of processing lights; and a change apparatus that changes a relative positional relationship between light concentration positions of the plurality of processing lights in a direction that intersects with the surface of the object, the processing apparatus changing a thickness of a part of the object by irradiating the surface of the object with the processing lights. 102 . The processing apparatus according to claim 101 , wherein the change apparatus changes the relative positional relationship between the light concentration positions of the plurality of processing lights based on a characteristic of the surface of the object. 103 . The processing apparatus according to claim 102 , wherein the characteristic of the surface of the object includes a shape of the surface of the object. 104 . The processing apparatus according to claim 102 , wherein the change apparatus changes the relative positional relationship between the light concentration positions of the plurality of processing lights so that the light concentration positions of the plurality of processing lights are set on the surface of the object. 105 . The processing apparatus according to claim 102 , wherein the light irradiation apparatus irradiates the plurality of processing lights through an optical system, the change apparatus changes a relative positional relationship between the light concentration positions of the plurality of processing lights and the object so that the surface of the object is located within a range of depth of focus of the optical system. 106 . The processing apparatus according to claim 102 further comprising a measurement apparatus that measures the characteristic of the surface of the object, the change apparatus changing the relative positional relationship between the light concentration positions of the plurality of processing lights by using an output of the measurement apparatus. 107 . The processing apparatus according to claim 101 , wherein the change apparatus changes the relative positional relationship between the light concentration positions when the surface of the object is irradiated with the processing lights. 108 . The processing apparatus according to claim 101 further comprising a movement apparatus that relatively moves the plurality of processing lights from the light irradiation apparatus and the object in a direction along the surface of the object. 109 . The processing apparatus according to claim 108 , wherein the change apparatus changes the relative positional relationship between the light concentration positions when the plurality of processing lights and the object are relatively moved by the movement apparatus. 110 . The processing apparatus according to claim 101 , wherein the change apparatus changes an intensity distribution of the plurality of processing lights in a plane that includes an axis intersecting with the surface of the object. 111 . A processing apparatus comprising: a light irradiation apparatus that irradiates a surface of an object with a plurality of processing lights; and a change apparatus that changes an intensity distribution of the plurality of processing lights in a plane that includes an axis intersecting with the surface of the object, the processing apparatus changing a thickness of a part of the object by irradiating the surface of the object with the processing lights. 112 . The processing apparatus according to claim 111 , wherein the change apparatus changes the intensity distribution of the plurality of processing lights based on a characteristic of the surface of the object. 113 . The processing apparatus according to claim 112 , wherein the characteristic of the surface of the object includes a shape of the surface of the object. 114 . The processing apparatus according to claim 111 further comprising a measurement apparatus that measures a characteristic of the surface of the object, the change apparatus changing the intensity distribution of the plurality of processing lights by using an output of the measurement apparatus. 115 . The processing apparatus according to claim 111 , wherein the change apparatus changes the intensity distribution when the surface of the object is irradiated with the processing lights. 116 . The processing apparatus according to claim 111 further comprising a movement apparatus that relatively moves the plurality of processing lights from the light irradiation apparatus and the object in a direction along the surface of the object. 117 . The processing apparatus according to claim 116 , wherein the change apparatus changes the intensity distribution when the plurality of processing lights and the object are relatively moved by the movement apparatus. 118 . The processing apparatus according to claim 101 , wherein the change apparatus changes shapes of the plurality of processing lights in a plane that includes an axis intersecting with the surface of the object 119 . A processing apparatus comprising: a light irradiation apparatus that irradiates a surface of an object with a plurality of processing lights; and a change apparatus that changes shapes of the plurality of processing lights in a plane that includes an axis intersecting with the surface of the object, the processing apparatus changing a thickness of a part of the object by irradiating the surface of the object with the processing lights. 120 . The processing apparatus according to claim 119 , wherein the change apparatus changes the shapes of the plurality of processing lights based on a characteristic of the surface of the object. 121 . The processing apparatus according to claim 120 , wherein the characteristic of the surface of the object includes a shape of the surface of the object. 122 . The processing apparatus according to claim 119 further comprising a measurement apparatus that measures a characteristic of the surface of the object, the change apparatus changing the shapes of the plurality of processing lights by using an output of the measurement apparatus. 123 . The processing apparatus according to claim 119 , wherein the change apparatus changes the shapes when the surface of the object is irradiated with the processing lights. 124 . The processing apparatus according to claim 119 further comprising a movement apparatus that relatively moves the plurality of processing lights from the light irradiation apparatus and the object in a direction along the surface of the object. 125 . The processing apparatus according to claim 124 , wherein the change apparatus changes the shapes when the plurality of processing lights and the object are relatively moved by the movement apparatus. 126 . The processing apparatus according to claim 101 , wherein the light irradiation apparatus irradiates the plurality of processing lights so that they intercross with each other at the surface of the object, the first change apparatus changes at least one of an intercrossing position and an intercrossing angle of the plurality of processing lights from the light irradiation apparatus.
Assignees
Inventors
Classifications
Coated articles {; Surface treated articles} · CPC title
Laser etching · CPC title
in at least three axial directions, e.g. manipulators, robots · CPC title
Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head · CPC title
- B23K26/0006Primary
taking account of the properties of the material involved (B23K26/32, B23K26/40 take precedence) · CPC title
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- What does patent US2021205920A1 cover?
- A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a plurality of processing lights; and a first change apparatus that changes a relative positional relationship between light concentration positions of the plurality of processing lights in a direction that intersects with the surface of the object, the processing apparatus changes a thickness …
- Who is the assignee on this patent?
- Nikon Corp
- What technology area does this patent fall under?
- Primary CPC classification B23K26/0006. Mapped technology areas include Operations & Transport.
- When was this patent published?
- Publication date Thu Jul 08 2021 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).