On-chip polarization detection and polarimetric imaging

Patent metadata

Field	Value
Publication number	US-2021190593-A1
Application number	US-201816956988-A
Country	US
Kind code	A1
Filing date	Dec 21, 2018
Priority date	Dec 22, 2017
Publication date	Jun 24, 2021
Grant date	—

Abstract

A polarization sensor is described. It includes a quarter-wave plate to convert circularly polarized light into linearly polarized light. The quarter-wave plate is realized as a metasurface. The sensor also includes a linear polarizer to analyze the light generated by the quarter-wave plate, and a photodetector to receive the analyzed light. The sensor may be combined with other linear polarization sensors to form a sensor capable of complete measurement of the polarization state of incident light. An array of these sensors can be integrated directly onto image sensors to form a polarimetric imager.

First claim

1 - 25 . (canceled)

26 . A circular polarization sensor comprising:
a nanograting having an orientation; a spacer disclosed on the nanograting, wherein the spacer comprises a dielectric material; and a metasurface comprising an array of pillars disposed on the spacer, wherein each of the pillars is spaced apart and separated by a gap from adjacent pillars and each of the pillars comprises a high index of refraction material, wherein the orientation of the nanograting relative to the array of pillars blocks an incident light having a circular polarization state and passes incident light having an opposite circular polarization state.

27 . The polarization sensor of claim 26 , wherein each of the pillars comprises an anisotropic cross-sectional shape and comprises dimensions to create π/2 phase lag between electric field components of the incident light.

28 . The polarization sensor of claim 26 , wherein each pillar of the array of pillars comprises a dielectric material or a semiconductor material.

29 . The polarization sensor of claim 26 , wherein the nanograting comprises aluminum and the array of pillars comprise silicon.

30 . The polarization sensor of claim 29 , wherein each pillar of the plurality of pillars has a rectangular cross-sectional shape and dimensions of each pillar of the plurality of pillars comprise a length of 100 nm to 140 nm, a width of 50 nm to 80 nm, and a thickness of 100 nm to 200 nm.

31 . A polarization sensor comprising:
a nanostructured metasurface comprising a plurality of bars, wherein each of the plurality of bars comprises a dielectric material or a semiconductor material, and wherein the plurality of bars are oriented to provide a π/2 phase shift to a first linear component and a second linear component of circularly polarized incident light; a nanograting layer oriented with respect to the nanostructured metasurface to selectively block a linear polarized light having a first orientation relative to the metasurface and selectively transmit linear polarized light having a second orientation relative to the metasurface; and a dielectric layer disposed between the nanostructured metasurface and the linear polarizer layer.

32 . The polarization sensor of claim 31 , further comprising a photodetector.

33 . The polarization sensor of claim 31 , wherein the plurality of bars comprise gallium nitride and the nanograting layer comprises silicon.

34 . The polarization sensor of claim 33 , wherein each of the plurality of bars has an anisotropic cross-sectional shape and has a length of 300 nm, a width of 200 nm and a thickness of 200 nm, and wherein the dielectric layer comprises silicon dioxide and has a thickness of 300 nm.

35 . A polarization sensor comprising at least one pixel, the at least one pixel comprising:
a first sub-pixel for sensing circularly polarized light comprising,
a nanograting having a first orientation,
a spacer disclosed on the nanograting, wherein the spacer comprises a dielectric material, and
a metasurface comprising an array of pillars disposed on the spacer, wherein each of the pillars is spaced apart and separated by a gap from adjacent pillars and each of the pillars comprises a high index of refraction material, wherein the first orientation of the nanograting relative to the array of pillars blocks an incident light having left handed circular polarization and passes incident light having right circular polarization; and
a second sub-pixel for sensing circularly polarized light comprising,
a nanograting having a second orientation;
a spacer disclosed on the nanograting, wherein the spacer comprises a dielectric material; and
a metasurface comprising an array of pillars disposed on the spacer, wherein each of the pillars is spaced apart and separated by a gap from adjacent pillars and each of the pillars comprises a high index of refraction material, wherein the second orientation of the nanograting relative to the array of pillars blocks an incident light having right handed circular polarization and passes incident light having left circular polarization.

36 . The polarization sensor of claim 35 , wherein the at least one pixel further comprises,
a third sub-pixel comprising a first linear polarization sensor having a first orientation; a fourth sub-pixel comprising a second linear polarization sensor oriented plus 45° relative to the first orientation; a fifth sub-pixel comprising a third linear polarization sensor oriented minus 45° relative to the first orientation; and sixth sub-pixel comprising a fourth linear polarization sensor oriented 90° relative to the first orientation.

37 . The polarization sensor of claim 35 , wherein the at least one pixel further comprises one or more polarization insensitive sub-pixels.

38 . The polarization sensor of claim 35 , wherein the nanograting having the first orientation and the nanograting having the second orientation comprise a metal.

39 . The polarization sensor of claim 35 , wherein pillars of the metasurface of the first sub-pixel and pillars of the metasurface of the second sub-pixel have sub-wavelength dimensions.

40 . The polarization sensor of claim 35 , wherein the first sub-pixel and the second sub-pixel comprise a total transmission efficiency of 90% in an infrared wavelength range.

41 . The polarization sensor of claim 35 , wherein each sub-pixel further comprises a photodetecting element.

42 . The polarization sensor of claim 35 , wherein each sub-pixel comprise dimensions tuned to operate in a visible and/or an infrared wavelength range.

43 . The polarization sensor of claim 35 , wherein the array of pillars of the sub-pixel and the array of pillars of the second sub-pixel comprises a dielectric material or a semiconductor material.

44 . The polarization sensor of claim 35 , wherein each pillar of the array of pillars of the first sub-pixel and each pillar of the array of pillars of the second sub-pixel comprises an anisotropic cross-sectional shape.

45 . The polarization sensor of claim 35 , wherein the nanograting of the first sub-pixel and the nanograting of the second sub-pixel comprise a metal.

Assignees

• Univ Arizona State

Inventors

• Yao Yu
• Wang Chao
• Wang Chu
• Bai Jing
• Basiri Ali
• Chen Xiahui

Classifications

• G02B1/002 Primary

  made of materials engineered to provide properties not available in nature, e.g. metamaterials · CPC title

• B82Y20/00

  Nanooptics, e.g. quantum optics or photonic crystals · CPC title

• G02B5/3025

  Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state (G02B5/3008, G02B5/3016 take precedence) · CPC title

• G02B5/3083

  Birefringent or phase retarding elements (G02B5/3008, G02B5/3016 take precedence; systems for polarisation control G02B27/286; manufacturing phase modulating patterns by lithographic processes G03F7/001) · CPC title

• G02B5/3058

  comprising electrically conductive elements, e.g. wire grids, conductive particles · CPC title