Sensor and inspection device

Patent metadata

Field	Value
Publication number	US-2021123796-A1
Application number	US-202017012338-A
Country	US
Kind code	A1
Filing date	Sep 4, 2020
Priority date	Oct 23, 2019
Publication date	Apr 29, 2021
Grant date	—

Abstract

According to an embodiment of the invention, a sensor includes a first element part. The first element part includes a first member and a first element. The first member is tubular and extends along a first direction. The first member includes a first opening and a second opening. A direction from the second opening toward the first opening is along the first direction. The first element includes a vibratile first membrane, and a first supporter supporting the first membrane. The second opening is between the first opening and the first membrane in the first direction.

First claim

What is claimed is:

1 . A sensor, comprising:
a first element part including
a first member extending along a first direction, the first member being tubular and including a first opening and a second opening, a direction from the second opening toward the first opening being along the first direction, and
a first element,
the first element including
a first membrane, the first membrane being vibratile, and
a first supporter supporting the first membrane,
the second opening being between the first opening and the first membrane in the first direction.

2 . The sensor according to claim 1 , wherein
the first member includes a first end portion and a first other portion, the first end portion corresponds to the first opening, a position in the first direction of the first other portion is between a position in the first direction of the first end portion and a position in the first direction of the first element, and a first thickness of the first end portion along a second direction crossing the first direction is less than a thickness of the first other portion along the second direction.

3 . The sensor according to claim 1 , wherein
the first member includes a first end portion corresponding to the first opening, a position in the first direction of at least a portion of the first supporter is between a position in the first direction of the first membrane and a position in the first direction of the first end portion, and a first thickness of the first end portion along a second direction crossing the first direction is less than a thickness of the first supporter along the second direction.

4 . The sensor according to claim 1 , wherein
the first thickness is less than a wavelength of a sound wave emitted from the first membrane.

5 . The sensor according to claim 4 , wherein
a length along the first direction of the first member is not less than 5 times the wavelength.

6 . The sensor according to claim 1 , further comprising:
a first link member, a plurality of the first element parts being provided, the first link member linking the first member of one of the plurality of first element parts and the first member of an other one of the plurality of first element parts, a distance along the first direction between the first link member and the first end portion of the first member of the one of the plurality of first element parts being not less than 5 times a wavelength of a sound wave emitted from the first membrane of the first element of the one of the plurality of first element parts.

7 . The sensor according to claim 1 , further comprising:
a second element part, the second element part including a second member and a second element, the first member being between the first element and the second element in the first direction, the second member being between the first member and the second element in the first direction, the second member being tubular, extending along the first direction, and including a third opening and a fourth opening, a direction from the third opening toward the fourth opening being along the first direction, the second element including
a second membrane, the second membrane being vibratile, and
a second supporter supporting the second membrane,
the fourth opening being between the third opening and the second membrane in the first direction.

8 . The sensor according to claim 7 , wherein
the first element emits a first sound wave, and the second element receives the first sound wave passing through the first member and through the second member.

9 . The sensor according to claim 7 , further comprising:
a first circuit connected to the first element; and a second circuit connected to the second element, the first circuit causing the first membrane to vibrate, the second circuit being configured to output a signal corresponding to a vibration of the second membrane.

10 . The sensor according to claim 7 , further comprising:
a first circuit connected to the first element; and an optical element, the first circuit causing the first membrane to vibrate, the optical element being configured to output a signal corresponding to a vibration of the second membrane.

11 . An inspection device, comprising:
the sensor according to claim 9 ; and a feeder moving an object between the first member and the second member.

Assignees

• Toshiba Kk

Inventors

• Itsumi Kazuhiro
• Ono Tomio
• Nakai Yutaka
• Yamamoto Noriko
• Kobayashi Tsuyoshi
• Hirao Akiko
• Hosono Yasuharu
• Saito Mitsunaga

Classifications

• G01B2210/44

  with detectors on both sides of the object to be measured · CPC title

• G07D7/189

  Detecting attached objects, e.g. tapes or clips (G07D7/187 takes precedence) · CPC title

• G07D7/164

  Thickness · CPC title

• G07D7/08

  Acoustic waves · CPC title

• G01N2291/2632

  flat · CPC title