Optical device production method

Patent metadata

Field	Value
Publication number	US-2021088725-A1
Application number	US-202017099515-A
Country	US
Kind code	A1
Filing date	Nov 16, 2020
Priority date	Jun 12, 2018
Publication date	Mar 25, 2021
Grant date	—

Abstract

A method for manufacturing an optical device includes a hydrogen-loading step, a laser irradiation step, and a light condensing point movement step. A continuous refractive index changed region is formed in a glass member by alternately repeating the laser irradiation step and the light condensing point movement step or performing the laser irradiation step and the light condensing point movement step in parallel. In the hydrogen-loading step, hydrogen is loaded into the glass member containing P 2 O 5 as a main component. In the laser irradiation step, a femtosecond laser beam having a repetition frequency of 10 kHz or higher is condensed in the hydrogen-loaded glass member, and a light-induced change in refractive index is caused in the glass member. In the light condensing point movement step, a light condensing point position of the femtosecond laser beam is moved relative to the glass member.

First claim

What is claimed is:

1 . A method for manufacturing an optical device comprising:
a hydrogen-loading step of injecting hydrogen into a glass member containing P 2 O 5 as a main component; a laser irradiation step of condensing a femtosecond laser beam having a repetition frequency of 10 kHz or more in the hydrogen-loaded glass member to cause a light-induced change in refractive index in the glass member; and a light condensing point movement step of moving a light condensing point position of the femtosecond laser beam relative to the glass member, wherein the laser irradiation step and the light condensing point movement step are alternately repeated or are performed in parallel to form a continuous refractive index changed region in the glass member.

2 . The method for manufacturing an optical device according to claim 1 ,
wherein the glass member contains at least one of Ge and B.

3 . The method for manufacturing an optical device according to claim 1 ,
wherein the glass member contains one or more of an alkali metal and an alkaline earth metal.

4 . The method for manufacturing an optical device according to claim 1 ,
wherein the glass member contains both Ge and B, and the femtosecond laser has a wavelength in a range from 420 nm to 530 nm.

5 . The method for manufacturing an optical device according to claim 1 ,
wherein the hydrogen-loading step includes a step of holding the glass member in a hydrogen atmosphere of 10 6 Pa or more.

Assignees

• Sumitomo Electric Industries

Inventors

• Nagano Shigehiro

Classifications

• G02B6/13 Primary

  Integrated optical circuits characterised by the manufacturing method · CPC title

• G02B6/12 Primary

  of the integrated circuit kind (electric integrated circuits H10B, H10D84/00 - H10D89/00, H10F19/00, H10F39/00, H10H29/00, H10K19/00, H10K39/00, H10K59/00, H10N19/00, H10N39/00, H10N59/00, H10N69/00, H10N79/00, H10N89/00) · CPC title

• C03C21/007 Primary

  in gaseous phase · CPC title

• C03C23/0025

  by a laser beam · CPC title