Systems and methods for communication and control in fluid delivery systems
US-2019022684-A1 · Jan 24, 2019 · US
US2021069658A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2021069658-A1 |
| Application number | US-202016997421-A |
| Country | US |
| Kind code | A1 |
| Filing date | Aug 19, 2020 |
| Priority date | Feb 23, 2018 |
| Publication date | Mar 11, 2021 |
| Grant date | — |
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A system includes a dispenser, first and second feed lines, and heating zones. The dispenser dispenses a first chemical precursor and a second chemical precursor. The first feed line permits flow of the first chemical precursor from a first source to the dispenser. The second feed line permits flow of the second chemical precursor from a second source to the dispenser. The heating zones are located along the first and second feed lines. The heating zones include a first heating zone located around a first portion of the first feed line and a second heating zone located around a first portion of the second feed line. The first heating zone and the second heating zone are independently controllable to independently control temperature around the first portion of the first feed line and temperature around the first portion of the second feed line.
Opening claim text (preview).
What is claimed is: 1 . A system comprising: a dispenser configured to dispense a first chemical precursor and a second chemical precursor; a first feed line configured to permit flow of the first chemical precursor from a first source to the dispenser; a second feed line configured to permit flow of the second chemical precursor from a second source to the dispenser; and a plurality of heating zones located along the first and second feed lines, wherein the plurality of heating zones includes a first heating zone located around a first portion of the first feed line and a second heating zone located around a first portion of the second feed line; wherein the first heating zone and the second heating zone are independently controllable to independently control temperature around the first portion of the first feed line that passes through the first heating zone and temperature around the first portion of the second feed line that passes through the second heating zone. 2 . The system of claim 1 , wherein the plurality of heating zones includes a third heating zone located around a second portion of the first feed line and a second portion of the second feed line, and wherein the third heating zone is controllable independently of the first and second heating zones. 3 . The system of claim 2 , wherein the second portion of the first feed line is downstream from the first portion of the first feed line, and wherein the second portion of the second feed line is downstream from the first portion of the second feed line. 4 . The system of claim 2 , wherein the dispenser is located in the third heating zone. 5 . The system of claim 1 , wherein each of the heating zones includes: a heating element configured to heat at least one of the first chemical precursor, the second chemical precursor, a block through which the first feed line passes, or a block through which the second feed line passes. 6 . The system of claim 5 , wherein each of the heating zones further includes: a temperature sensor configured to measure a temperature of the at least one of the first chemical precursor, the second chemical precursor, the block through which the first feed line passes, or the block through which the second feed line passes. 7 . The system of claim 6 , wherein each of the heating zones further includes: a controller configured to control the heating element based on indications of the measured temperature generated by the temperature sensor. 8 . The system of claim 7 , wherein the controller is configured to control the heating element by alternating, based on the indications of the measured temperature generated by the temperature sensor, between causing the heating element to be powered and causing the heating element to be unpowered. 9 . The system of claim 1 , further comprising: a first dispenser manifold comprising a first input block, wherein the first input block is the first heating zone and the first portion of the first feed line passes through the first input block; and a second dispenser manifold comprising a second input block, wherein the second input block is the second heating zone and the first portion of the second feed line passes through the second input block. 10 . The system of claim 9 , wherein: the first dispenser manifold further comprises a first output block, wherein the first output block is in a third heating zone through which a second portion of the first feed line passes; and the second dispenser manifold further comprises a second output block, wherein the second output block is in a fourth heating zone through which a second portion of the second feed line passes. 11 . The system of claim 10 , wherein: the first input block includes a first heating element configured to heat the first input block, a first temperature sensor configured to measure a temperature of the first input block, and a first controller configured to control operation of the first heating element based on the measured temperature from the first temperature sensor; the second input block includes a second heating element configured to heat the second input block, a second temperature sensor configured to measure a temperature of the second input block, and a second controller configured to control operation of the second heating element based on the measured temperature from the second temperature sensor; the first output block includes a third heating element configured to heat the first output block, a third temperature sensor configured to measure a temperature of the first output block, and a third controller configured to control operation of the third heating element based on the measured temperature from the third temperature sensor; and the second output block includes a fourth heating element configured to heat the second output block, a fourth temperature sensor configured to measure a temperature of the second output block, and a fourth controller configured to control operation of the fourth heating element based on the measured temperature from the fourth temperature sensor. 12 . The system of claim 11 , further comprising: a mixing cartridge manifold in the dispenser, wherein a fifth heating zone is in the mixing cartridge manifold, and wherein a third portion of the first feed line and a third portion of the second input line pass through the fifth heating zone in the mixing cartridge manifold. 13 . The system of claim 12 , wherein: the dispenser includes a fifth heating element configured to heat the mixing cartridge manifold, a fifth temperature sensor configured to measure a temperature of the mixing cartridge manifold, and a fifth controller configured to control operation of the fifth heating element based on the measured temperature from the fifth temperature sensor. 14 . The system of claim 13 , further comprising: a first hose coupled to a first input of the first dispenser manifold, wherein a fourth portion of the first feed line passes through the first hose, wherein the first hose includes a sixth heating element configured to heat the first chemical precursor passing through the fourth portion of the first feed line; and a second hose coupled to a second input of the second dispenser manifold, wherein a fourth portion of the second feed line passes through the second hose, wherein the second hose includes a seventh heating element configured to heat the second chemical precursor passing through the fourth portion of the second feed line. 15 . The system of claim 14 , further comprising: a sixth temperature sensor configured to measure a temperature of the first chemical precursor passing through the fourth portion of the first feed line; and a sixth controller configured to control operation of the sixth heating element based on the measured temperature from the sixth temperature sensor. 16 . The system of claim 10 , wherein the first output block further includes a secondary line configure to permit flow of a cleaning solution to the dispenser, wherein the secondary line passes through the third heating zone. 17 . A method comprising: dispensing, by a dispenser, a first chemical precursor and a second chemical precursor; permitting flow of the first chemical precursor from a first source, through a first feed line, and to the dispenser; permitting flow of the second chemical precursor from a second source, through a second feed line, and to the dispenser; independently controlling a first heating zone and a second heating zone of a plurality of heating zones located along the first and second fee
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