Micro pump

Patent metadata

Field	Value
Publication number	US-2021048012-A1
Application number	US-202016919608-A
Country	US
Kind code	A1
Filing date	Jul 2, 2020
Priority date	Aug 14, 2019
Publication date	Feb 18, 2021
Grant date	—

Abstract

A micro pump includes a base plate, a valve membrane, an upper covering plate and a pump core module. The valve membrane is disposed in a valve membrane accommodation slot of the base plate, seals a fluid channel of the base plate and includes a valve aperture where a protruding portion of the base plate extended through. The upper covering plate is accommodated in an upper covering plate accommodation slot of the base plate and includes a fluid relief aperture sealed by the valve membrane, a fluid converging groove and a fluid converging channel between the fluid converging groove and a fluid-outlet channel of the base plate. The pump core module is accommodated within a pump accommodation slot of the base plate. By actuating the pump core module, the fluid passes through the fluid channel, the valve aperture, the fluid converging groove, and is discharged out through the fluid-outlet channel.

First claim

What is claimed is:

1 . A micro pump comprising:
a base plate having a first surface and a second surface, wherein the first surface and the second surface are two opposite surfaces, and the base plate comprises:
an upper covering plate accommodation slot recessed from the first surface of the base plate and having a bottom surface;
a valve membrane accommodation slot recessed from the bottom surface of the upper covering plate accommodation slot and having a bottom surface;
a protruding portion protruded from the bottom surface of the upper covering plate accommodation slot;
a pump accommodation slot recessed from the second surface of the base plate and having a bottom surface;
a fluid channel running through the bottom surface of the valve membrane accommodation slot and the bottom surface of the pump accommodation groove; and
a fluid-outlet channel;
a valve membrane disposed in the valve membrane accommodation slot of the base plate and comprising a valve aperture, wherein the protruding portion of the base plate is extended through the valve aperture, and the fluid channel of the base plate is sealed by the valve membrane; an upper covering plate accommodated in the upper covering plate accommodation slot of the base plate and comprising a fluid relief aperture, a fluid converging groove and a fluid converging channel, wherein the fluid relief aperture is sealed by the valve membrane, and the fluid converging groove is in fluid communication with the fluid-outlet channel of the base plate through the fluid converging channel; and a pump core module accommodated within the pump accommodation slot of the base plate, wherein after fluid is inhaled by the pump core module and flows into the pump core module, the fluid passes through the fluid channel of the base plate, pushes out the valve membrane, flows through the valve aperture of the valve membrane, enters the fluid converging groove of the upper covering plate, and is discharged out through the fluid-outlet channel of the base plate, so as to achieve fluid transportation.

2 . The micro pump according to claim 1 , wherein the fluid channel of the base plate has a sector profile.

3 . The micro pump according to claim 1 , wherein the valve membrane is a silicone sheet.

4 . The micro pump according to claim 1 , wherein the base plate further comprises a fluid-output tube extended outwardly from a side of the base plate and penetrated by the fluid-outlet channel.

5 . The micro pump according to claim 1 , wherein the valve membrane is in a circular shape.

6 . The micro pump according to claim 1 , wherein the valve membrane has a first surface and a second surface, and the valve aperture runs through the first surface and the second surface, wherein the valve membrane further comprises a valve peripheral wall and a valve space, and the valve peripheral wall is disposed on the second surface and defines the valve space.

7 . The micro pump according to claim 1 , wherein the fluid relief aperture of the upper covering plate and the protruding portion of the base plate are staggered with each other.

8 . The micro pump according to claim 1 , wherein the fluid converging groove of the upper covering plate and the fluid channel of the base plate are staggered with each other.

9 . The micro pump according to claim 1 , wherein the fluid relief aperture of the upper covering plate has an aperture diameter ranging between 0.5 millimeter and 2 millimeter.

10 . The micro pump according to claim 1 , wherein the fluid converging groove of the upper covering plate has a sector profile.

11 . The micro pump according to claim 1 , wherein the micro pump has a total thickness ranging between 1 millimeter and 6 millimeter.

12 . The micro pump according to claim 1 , wherein the pump core module comprises:
a fluid-inlet plate comprising at least one inlet aperture, at least one convergence channel and a convergence chamber, wherein the at least one inlet aperture allows the fluid to flow in and passes through the at least one convergence channel, and the at least one convergence channel and the convergence chamber are in fluid communication, so that the liquid inhaled through the at least inlet aperture is transported through the at least one convergence channel and converged into the convergence chamber; a resonance plate connected and attached to the fluid-inlet plate and having a central aperture, a movable part and a fixing part, wherein the central aperture is disposed at a center of the resonance plate and aligned with the convergence chamber of the fluid-inlet plate, the movable part surrounds the central aperture, and the fixing part is located at a peripheral portion of the resonance plate and is fixed on and attached to the fluid-inlet plate; and a piezoelectric actuator connected and attached to the resonance plate, wherein a resonance chamber is formed between the resonance plate and the piezoelectric actuator, whereby when the piezoelectric actuator is driven, the movable part of the resonance plate is in resonance with the piezoelectric actuator, and the fluid is introduced into the at least one inlet aperture of the fluid-inlet plate, converged to the convergence chamber along the at least one convergence channel, and flows into the central aperture of the resonance plate, so as to achieve fluid transportation.

13 . The micro pump according to claim 12 , wherein the piezoelectric actuator comprises:
a suspension plate being a square suspension plate and permitted to undergo a bending vibration; an outer frame arranged around the suspension plate; at least one bracket connected between the suspension plate and the outer frame for elastically supporting the suspension plate; and a piezoelectric element, wherein a length of a side of the piezoelectric element is smaller than or equal to a length of a side of the suspension plate, and the piezoelectric element is attached on a surface of the suspension plate to drive the suspension plate to undergo the bending vibration in response to an applied voltage.

14 . The micro pump according to claim 13 , wherein the pump core module further comprises a conducting plate, the piezoelectric actuator further comprises a first conductive pin extended outwardly from an outer edge of the outer frame, the conducting plate comprises a second conductive pin protruded from an outer edge of the conducting plate, the base plate further comprises a plurality of pin openings in fluid communication with the pump accommodation slot, and the first conducting pin and the second conductive pin are extended outside the base plate through the plurality of pin openings, respectively.

15 . The micro pump according to claim 12 , wherein the pump core module further comprises a first insulation plate, a conducting plate and a second insulation plate, wherein the fluid-inlet plate, the resonance plate, the piezoelectric actuator, the first insulation plate, the conducting plate and the second insulation plate are stacked sequentially.

16 . The micro pump according to claim 12 , wherein the piezoelectric actuator comprises:
a suspension plate being a square suspension plate and permitted to undergo a bending vibration; an outer frame arranged around the suspension plate; at least one bracket connected between the suspension plate and the outer frame for elastically supporting the suspension plate, wherein a non-coplanar structure is formed on a surface of the suspension plate and a surface of the outer frame to form the resonance chamber between the suspension plate and the resonance plate; and

Assignees

• Microjet Technology Co Ltd

Inventors

• Mou Hao-Jan
• Chen Shih-Chang
• Liao jia-yu
• Liao Hung-Hsin
• Kao Chung-Wei
• Han Yung-Lung
• Huang Chi-Feng
• Kuo Chun-Yi

Classifications

• F04B19/006

  Micropumps (F04B43/043 and F04B43/095 take precedence) · CPC title

• F04B43/046 Primary

  with piezoelectric drive · CPC title