Multi-layered film and method of manufacturing the same
US-2017148975-A1 · May 25, 2017 · US
Piezoelectric laminate, piezoelectric element, and method of manufacturing the piezoelectric laminate
US2021036212A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2021036212-A1 |
| Application number | US-202016942808-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jul 30, 2020 |
| Priority date | Aug 2, 2019 |
| Publication date | Feb 4, 2021 |
| Grant date | — |
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Abstract
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There is provided a piezoelectric laminate, including: a substrate; an electrode film formed on the substrate; a layer comprised of lanthanum nickel oxide and formed on the electrode film; and a piezoelectric film formed on the layer comprised of lanthanum nickel oxide, and comprised of alkali niobium oxide of a perovskite structure represented by a composition formula of (K1−xNax)NbO3 (0<x<1), and containing a metallic element selected from a group consisting of Cu and Mn at a concentration of 0.2 at % or more and 2.0 at % or less, wherein the piezoelectric film has a breakdown voltage of 350 kV/cm or more.
First claim
Opening claim text (preview).
What is claimed is: 1 . A piezoelectric laminate, comprising: a substrate; an electrode film formed on the substrate; a layer comprised of lanthanum nickel oxide and formed on the electrode film; and a piezoelectric film formed on the layer comprised of lanthanum nickel oxide, and comprised of alkali niobium oxide of a perovskite structure represented by a composition formula of (K 1−x Na x )NbO 3 (0<x<1), and containing a metallic element selected from a group consisting of Cu and Mn at a concentration of 0.2 at % or more and 2.0 at % or less, wherein the piezoelectric film has a breakdown voltage of 350 kV/cm or more. 2 . The piezoelectric laminate according to claim 1 , wherein the piezoelectric film has a thickness of 0.5 μm or more and 5 μm or less. 3 . The piezoelectric laminate according to claim 1 , wherein the electrode film is comprised of a material different from lanthanum nickel oxide. 4 . A piezoelectric element, comprising: a substrate; a bottom electrode film formed on the substrate; a layer including lanthanum nickel oxide and formed on the bottom electrode film; a piezoelectric film formed on the layer comprised of lanthanum nickel oxide, and comprised of alkali niobium oxide of a perovskite structure represented by a composition formula of (K 1−x Na x )NbO 3 (0<x<1), and containing a metallic element selected from a group consisting of Cu and Mn at a concentration of 0.2 at % or more and 2.0 at % or less; and a top electrode film formed on the piezoelectric film, wherein the piezoelectric film has a breakdown voltage of 350 kV/cm or more. 5 . A method of manufacturing a piezoelectric laminate, comprising: forming an electrode film on a substrate; forming a layer comprised of lanthanum nickel oxide on the electrode film; and forming a piezoelectric film comprised of alkali niobium oxide of a perovskite structure represented by a composition formula of (K 1−x Na x )NbO 3 (0<x<1), containing a metallic element selected from a group consisting of Cu and Mn at a concentration of 0.2 at % or more and 2.0 at % or less, and having a breakdown voltage of 350 kV/cm or more, on the layer comprised of lanthanum nickel oxide.
Assignees
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Classifications
- H01L41/1873Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H10N30/8542Primary
Alkali metal based oxides, e.g. lithium, sodium or potassium niobates · CPC title
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- What does patent US2021036212A1 cover?
- There is provided a piezoelectric laminate, including: a substrate; an electrode film formed on the substrate; a layer comprised of lanthanum nickel oxide and formed on the electrode film; and a piezoelectric film formed on the layer comprised of lanthanum nickel oxide, and comprised of alkali niobium oxide of a perovskite structure represented by a composition formula of (K1−xNax)NbO3 (0<x<1),…
- Who is the assignee on this patent?
- Sumitomo Chemical Co
- What technology area does this patent fall under?
- Primary CPC classification H01L41/1873. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Thu Feb 04 2021 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).