A process for electrochemical deposition of copper with different current densities
US-2024183052-A1 · Jun 6, 2024 · US
US2020399482A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2020399482-A1 |
| Application number | US-202016823383-A |
| Country | US |
| Kind code | A1 |
| Filing date | Mar 19, 2020 |
| Priority date | Jun 20, 2019 |
| Publication date | Dec 24, 2020 |
| Grant date | — |
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A method of constructing conductive material in arbitrary three-dimensional (3D) geometries, such as 3D printing. The method may include selective application of an aerosol-based colloidal solution containing a catalytic palladium nanoparticle material onto a substrate and then immersion of the coated substrate into an electro-less plating bath for deposition of conductive copper material. The above steps may be repeated to create arbitrary 3D geometric constructs containing conductive metallic patterns.
Opening claim text (preview).
1 . An arbitrary three-dimensional construct prepared by i. preparing a catalyst ink comprising a colloidal solution comprising a solvent and palladium nanoparticles; and ii. depositing the catalyst ink from step (i) onto a surface of a substrate using aerosol jet printing; iii. subjecting the substrate to electro-less plating to plate the palladium nanoparticles with copper; and iv. repeating steps ii and iii until the three-dimensional construct is formed. 2 . The construct of claim 1 further comprising sonicating the solvent in step i to disperse the palladium nanoparticles and to reduce aggregation of the palladium nanoparticles. 3 . The construct of claim 1 wherein the solvent is selected from toluene, dimethylformamide, tetrahydrofuran, xylenes, and combinations thereof. 4 . The construct of claim 1 wherein the catalyst ink further comprises a binder selected from poly-vinyl alcohol and carboxy-methyl cellulose or combinations thereof. 5 . The construct of claim 1 wherein the palladium nanoparticles have an average particle size of from about 15 to about 400 nm. 6 . The construct of claim 1 wherein the palladium nanoparticles are present in the catalyst ink in an amount of from 0.1 to 2.2 wt. %. 7 . The construct of claim 1 wherein the substrate is selected from glass, plastic, ceramic, or metal. 8 . The construct of claim 1 further comprising v. applying a non-conductive layer prior to or after repeating steps ii and iii. 9 . The construct of claim 1 wherein the catalyst ink further comprises a binder selected from poly-vinyl alcohol and carboxy-methyl cellulose or combinations thereof. 10 . The construct of claim 8 wherein the palladium nanoparticles have an average particle size of from about 15 to about 400 nm. 11 . The construct of claim 8 which construct is microelectronic circuitry.
Coating with copper · CPC title
characterised by features other than the chemical nature of the binder · CPC title
Dispersions or suspensions of nanosized particles · CPC title
Treatment of workpieces or articles during build-up, e.g. treatments applied to fused layers during build-up · CPC title
by jetting of binder onto a bed of metal powder · CPC title
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