Fe-Pt Based Magnetic Material Sintered Compact

Patent metadata

Field	Value
Publication number	US-2020357433-A1
Application number	US-202016933071-A
Country	US
Kind code	A1
Filing date	Jul 20, 2020
Priority date	Sep 21, 2012
Publication date	Nov 12, 2020
Grant date	—

Abstract

Provided is an Fe—Pt based magnetic material sintered compact, comprising BN and SiO 2 as non-magnetic materials, wherein Si and O are present in a region where B or N is present at a cut surface of the sintered compact. A high density sputtering target is provided which enables production of a magnetic thin film for heat-assisted magnetic recording media, and also reduces the amount of particles generated during sputtering.

First claim

I claim:

1 . A Fe—Pt based magnetic material sintered compact, consisting of iron, platinum and 0.5 mol % or more and 10.0 mol % or less of one or more elements selected from the group consisting of B, Ru, Ag, Au and Cu forming a sintered alloy and particles of hexagonal BN and SiO 2 dispersed in the sintered alloy, wherein, in an element mapping image obtained by a Field Emission Electron Probe Micro Analyzer (FE-EPMA) of a cross-sectional surface of the sintered compact, elements of Si and O are detected in the same area as that where elements of B and N are detected, and wherein, in X-ray diffraction analysis of a cross-sectional surface of the sintered compact which is parallel to a pressurized face of the sintered compact, an X-ray diffraction peak from (002) plane of hexagonal BN is present, and an X-ray diffraction peak from (101) plane of cristobalite as an intensity ratio of 1.40 or less to a back-ground intensity of the (101) X-ray diffraction peak.

2 . The Fe—Pt based magnetic material sintered compact according to claim 1 , wherein the X-ray diffraction peak from (002) plane of hexagonal BN has an intensity ratio of 1.50 or more to a back-ground intensity of the (002) X-ray diffraction peak.

3 . The Fe—Pt based magnetic material sintered compact according to claim 2 , wherein the content of SiO 2 has a ratio of 1% or more relative to the content of hexagonal BN.

4 . The Fe—Pt based magnetic material sintered compact according to claim 3 , wherein the sintered compact has a content of Pt in an amount of 5 mol % or more and 60 mol % or less, a content of BN in an amount of 1 mol % or more and 50 mol % or less, and a content of SiO 2 in an amount of 0.5 mol % or more and 20 mol % or less.

5 . The Fe—Pt based magnetic material sintered compact according to claim 1 , wherein a content of SiO 2 in the sintered compact has a ratio of 1% or more relative to a content of hexagonal BN.

6 . The Fe—Pt based magnetic material sintered compact according to claim 1 , wherein the sintered compact has a content of Pt in an amount of 5 mol % or more and 60 mol % or less, a content of BN in an amount of 1 mol % or more and 50 mol % or less, a content of SiO 2 in an amount of 0.5 mol % or more and 20 mol % or less.

7 . A Fe—Pt based magnetic material sintered compact, consisting of iron and platinum forming a sintered Fe—Pt alloy, particles of hexagonal BN and SiO 2 dispersed in the sintered Fe—Pt alloy, and at least one inorganic material selected from the group consisting of oxides other than SiO 2 , nitrides other than BN, carbides and carbon nitrides as an additive, wherein, in an element mapping image obtained by a Field Emission Electron Probe Micro Analyzer (FE-EPMA) of a cross-sectional surface of the sintered compact, elements of Si and O are detected in the same area as that where elements of B and N are detected, and wherein, in X-ray diffraction analysis of a cross-sectional surface of the sintered compact which is parallel to a pressurized face of the sintered compact, an X-ray diffraction peak from (002) plane of hexagonal BN is present, and an X-ray diffraction peak from (101) plane of cristobalite as an intensity ratio of 1.40 or less to a back-ground intensity of the (101) X-ray diffraction peak.

8 . The Fe—Pt based magnetic material sintered compact according to claim 7 , wherein the X-ray diffraction peak from (002) plane of hexagonal BN has an intensity ratio of 1.50 or more to a back-ground intensity of the (002) X-ray diffraction peak.

9 . The Fe—Pt based magnetic material sintered compact according to claim 8 , wherein the content of SiO 2 has a ratio of 1% or more relative to the content of hexagonal BN.

10 . The Fe—Pt based magnetic material sintered compact according to claim 9 , wherein the sintered compact has a content of Pt in an amount of 5 mol % or more and 60 mol % or less, a content of BN in an amount of 1 mol % or more and 50 mol % or less, and a content of SiO 2 in an amount of 0.5 mol % or more and 20 mol % or less.

11 . The Fe—Pt based magnetic material sintered compact according to claim 7 , wherein a content of SiO 2 in the sintered compact has a ratio of 1% or more relative to a content of hexagonal BN.

12 . The Fe—Pt based magnetic material sintered compact according to claim 7 , wherein the sintered compact has a content of Pt in an amount of 5 mol % or more and 60 mol % or less, a content of BN in an amount of 1 mol % or more and 50 mol % or less, a content of SiO 2 in an amount of 0.5 mol % or more and 20 mol % or less.

13 . A Fe—Pt based magnetic material sintered compact, consisting of iron, platinum and 0.5 mol % or more and 10.0 mol % or less of one or more elements selected from the group consisting of B, Ru, Ag, Au and Cu forming a sintered alloy and particles of hexagonal BN and SiO 2 dispersed in the sintered alloy and at least one inorganic material selected from the group consisting of oxides other than SiO 2 , nitrides other than BN, carbides and carbon nitrides as an additive, wherein, in an element mapping image obtained by a Field Emission Electron Probe Micro Analyzer (FE-EPMA) of a cross-sectional surface of the sintered compact, elements of Si and O are detected in the same area as that where elements of B and N are detected, and wherein, in X-ray diffraction analysis of a cross-sectional surface of the sintered compact which is parallel to a pressurized face of the sintered compact, an X-ray diffraction peak from (002) plane of hexagonal BN is present, and an X-ray diffraction peak from (101) plane of cristobalite as an intensity ratio of 1.40 or less to a back-ground intensity of the (101) X-ray diffraction peak.

14 . The Fe—Pt based magnetic material sintered compact according to claim 13 , wherein the X-ray diffraction peak from (002) plane of hexagonal BN has an intensity ratio of 1.50 or more to a back-ground intensity of the (002) X-ray diffraction peak.

15 . The Fe—Pt based magnetic material sintered compact according to claim 14 , wherein the content of SiO 2 has a ratio of 1% or more relative to the content of hexagonal BN.

16 . The Fe—Pt based magnetic material sintered compact according to claim 15 , wherein the sintered compact has a content of Pt in an amount of 5 mol % or more and 60 mol % or less, a content of BN in an amount of 1 mol % or more and 50 mol % or less, and a content of SiO 2 in an amount of 0.5 mol % or more and 20 mol % or less.

17 . The Fe—Pt based magnetic material sintered compact according to claim 13 , wherein a content of SiO 2 in the sintered compact has a ratio of 1% or more relative to a content of hexagonal BN.

18 . The Fe—Pt based magnetic material sintered compact according to claim 13 , wherein the sintered compact has a content of Pt in an amount of 5 mol % or more and 60 mol % or less, a content of BN in an amount of 1 mol % or more and 50 mol % or less, a content of SiO 2 in an amount of 0.5 mol % or more and 20 mol % or less.

Assignees

• Jx Nippon Mining & Metals Corp

Inventors

• Ogino Shin-Ichi

Classifications

• G11B5/851

  Coating a support with a magnetic layer by sputtering · CPC title

• C30B29/38

  Nitrides · CPC title

• C23C14/3414

  Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy · CPC title

• C22C33/0292

  with more than 5% preformed carbides, nitrides or borides · CPC title

• C22C5/04

  Alloys based on a platinum group metal · CPC title