Methods and Systems for Coherent Imaging and Feedback Control for Modification of Materials
US-2015375336-A9 · Dec 31, 2015 · US
Processing apparatus, and manufacturing method of movable body
US2020353560A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2020353560-A1 |
| Application number | US-201716756604-A |
| Country | US |
| Kind code | A1 |
| Filing date | Oct 25, 2017 |
| Priority date | Oct 25, 2017 |
| Publication date | Nov 12, 2020 |
| Grant date | — |
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Abstract
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A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a measurement apparatus that measures a position of an irradiation area, which is formed on the surface of the object by the light irradiation apparatus, relative to the object.
First claim
Opening claim text (preview).
1 .- 72 . (canceled) 73 . A processing apparatus comprising: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a control apparatus that controls the light irradiation apparatus by using an information relating to a characteristic of the surface of the object. 74 . The processing apparatus according to claim 73 further comprising a measurement apparatus that measures a position of the light irradiation apparatus relative to the object. 75 . The processing apparatus according to claim 74 , wherein the information relating to the characteristic of the surface of the object relates to a position on the surface of the object. 76 . The processing apparatus according to claim 75 , wherein the control apparatus controls the light irradiation apparatus by using the position measured by the measurement apparatus and the information relating to the surface of the object. 77 . The processing apparatus according to claim 73 , wherein the measurement apparatus is a first measurement apparatus, the processing apparatus further comprises a second measurement apparatus that measures the characteristic of the surface of the object, the control apparatus controlling the light irradiation apparatus by using a measured result of the second measurement apparatus. 78 . The processing apparatus according to claim 73 , wherein the control apparatus sets an irradiation state of the processing light. 79 . The processing apparatus according to claim 78 , wherein the characteristic of the surface of the object includes a shape of the surface of the object. 80 . The processing apparatus according to claim 79 , wherein the irradiation state of the processing light includes a light concentration position of the processing light in a direction that intersects with the surface of the object. 81 . The processing apparatus according to claim 80 , wherein the control apparatus sets the light concentration position of the processing light on the surface of the object. 82 . The processing apparatus according to claim 80 , wherein the light irradiation apparatus emits processing light through an optical system, the control apparatus sets the light concentration position of the processing light so that the surface of the object is located within a range of a depth of focus of the optical system. 83 . The processing apparatus according to claim 80 , wherein the light irradiation apparatus emits processing light through an optical system, the irradiation state of the processing light includes a depth of focus of the optical system. 84 . The processing apparatus according to claim 83 , wherein the control apparatus sets the depth of focus so that the surface of the object is located within a range of the depth of focus of the optical system. 85 . The processing apparatus according to claim 78 , wherein the light irradiation apparatus irradiates the surface of the object with the processing light through an optical system, the irradiation state of the processing light includes a state of an image plane of the optical system. 86 . The processing apparatus according to claim 85 , wherein the state of the image plane includes a size of the image plane, the control apparatus sets the size of the image plane to a predetermined size. 87 . The processing apparatus according to claim 85 , wherein the state of the image plane includes a relative position of the image plane relative to the object, the control apparatus sets the relative position of the image plane relative to the object to a predetermined position. 88 . The processing apparatus according to claim 85 , wherein the state of the image plane includes a shape of the image plane, the control apparatus sets the shape of the image plane to a predetermined shape. 89 . The processing apparatus according to claim 88 , wherein the predetermined shape is a shape based on a shape of the surface of the object. 90 . The processing apparatus according to claim 88 , wherein the control apparatus sets the image plane so that at least a part of the image plane is curved or is inclined in accordance with a shape of the surface of the object. 91 . The processing apparatus according to claim 73 , wherein the characteristic of the surface of the object includes a reflectance or an absorptance of the object to a measurement light, an irradiation state of the processing light includes at least one of an intensity of the processing light, an irradiation time of the processing light and a wavelength of the processing light. 92 . The processing apparatus according to claim 91 further comprising a measurement apparatus that measures the characteristic of the surface of the object, the measurement apparatus comprising a projection apparatus that irradiates the surface of the object with the measurement light and a detection apparatus that detects an intensity of the measurement light through the surface of the object. 93 . The processing apparatus according to claim 91 , wherein the control apparatus determines a reflectance or an absorptance of the object to the processing light based on the reflectance or the absorptance of the object to the measurement light and sets the irradiation state of the processing light based on the determined reflectance or absorptance. 94 . The processing apparatus according to claim 93 , wherein the control apparatus sets the intensity of the processing light so that the intensity of the processing light becomes higher as the reflectance of the object to the processing light becomes higher or the absorptance of the object to the processing light becomes lower. 95 . The processing apparatus according to claim 93 , wherein the control apparatus sets the irradiation time of the processing light so that the irradiation time of the processing light becomes longer as the reflectance of the object to the processing light becomes higher or the absorptance of the object to the processing light becomes lower. 96 . The processing apparatus according to claim 93 , wherein the control apparatus sets the wavelength of the processing light so that the reflectance of the object to the processing light is equal to or higher than a first predetermined value or the absorptance of the object to the processing light is equal to or lower than a second predetermined value. 97 . The processing apparatus according to claim 91 , wherein the measurement light includes a light component a wavelength of which is same as the wavelength of the processing light. 98 . The processing apparatus according to claim 91 , wherein the measurement light is a light a wavelength of which is same as the wavelength of the processing light. 99 . The processing apparatus according to claim 97 , wherein the control apparatus sets the intensity of the processing light so that the intensity of the processing light becomes higher as the reflectance of the object to the measurement light becomes higher or the absorptance of the object to the measurement light becomes lower. 100 . The processing apparatus according to claim 97 , wherein the control apparatus sets the irradiation time of the processing light so that the irradiation time of the processing light becomes longer as the reflectance of the object to
Assignees
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Classifications
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Frequently asked questions
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- What does patent US2020353560A1 cover?
- A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a measurement apparatus that measures a position of an irradiation area, which is formed on the surface of the object by the light irradiation apparatus, relative to the object.
- Who is the assignee on this patent?
- Nikon Corp
- What technology area does this patent fall under?
- Primary CPC classification B23K26/03. Mapped technology areas include Operations & Transport.
- When was this patent published?
- Publication date Thu Nov 12 2020 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).