Substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-2020321232-A1
Application number	US-202016825663-A
Country	US
Kind code	A1
Filing date	Mar 20, 2020
Priority date	Mar 11, 2011
Publication date	Oct 8, 2020
Grant date	—

Abstract

A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

First claim

What is claimed is:

1 . A substrate processing apparatus comprising:
a frame; a first arm connected to the frame, the first arm being a three link arm configured to extend and retract along a first radial axis and having an upper arm, a forearm and an end effector; a second arm connected to the frame, the second arm being a three link arm configured to extend and retract along a second radial axis and having an upper arm, a forearm and an end effector, where the first and second arms have a common axis of rotation on a common base from which the first and second arms depend, and the end effectors of each of the first and second arms move along a common transfer plane; and a drive section coupled to the first and second arms, the drive section having at least one degree of freedom, each of which degree of freedom is disposed co-axially forming at least a coaxial drive spindle and being configured to extend both the first and second arms with the coaxial drive spindle along respective radial axes and rotate both the first and second arms with the coaxial drive spindle about the common axis of rotation so that the extension and retraction of the first and second arms along the respective radial axes is decoupled and the first arm has at least one link of the three link arm with a different length than a corresponding link of the second arm.

Assignees

• Brooks Automation Inc

Inventors

• Caveney Robert T
• Krishnasamy Jayaraman
• Gilchrist Ulysses
• Drew Mitchell
• Moura Jairo

Classifications

• H10P72/3302 Primary

  Mechanical parts of transfer devices · CPC title

• H10P72/3202 Primary

  Mechanical details, e.g. rollers or belts · CPC title

• B25J11/0095

  Manipulators transporting wafers · CPC title

• B25J9/042 Primary

  comprising an articulated arm · CPC title

• B25J9/041

  Cylindrical coordinate type · CPC title