Gas permeable superstrate and methods of using the same

Patent metadata

Field	Value
Publication number	US-2020286740-A1
Application number	US-201916293053-A
Country	US
Kind code	A1
Filing date	Mar 5, 2019
Priority date	Mar 5, 2019
Publication date	Sep 10, 2020
Grant date	—

Abstract

A gas permeable superstrate and method using the same is disclosed. The superstrate can include a body and an amorphous fluoropolymer layer on the body. The method of planarization can include dispensing a planarization precursor material over a substrate and contacting the planarization precursor material with a body of a superstrate. In one embodiment, the substrate includes a non-uniform surface topography. The method can also include curing the planarization precursor material to form a planarization layer over the substrate, where curing can be performed while the superstrate is contacting the planarization precursor material.

First claim

What is claimed is:

1 . A superstrate, comprising:
a body, wherein the body comprises a contact surface; and an amorphous fluoropolymer layer on the contact surface of the body, wherein the amorphous fluoropolymer layer is permeable to gases having an atomic mass greater than 4.

2 . The superstrate of claim 1 , wherein the amorphous fluoropolymer comprises a dioxolane ring.

3 . The superstrate of claim 1 , wherein the amorphous fluoropolymer comprises a perflurorodioxole tetrafluoroethylene copolymer

4 . The superstrate of claim 1 , wherein the amorphous fluoropolymer comprises perfluoro(3-butenyl vinyl ether).

5 . The superstrate of claim 1 , wherein the body comprises a hydrocarbon polymer layer between the contact surface and the amorphous fluoropolymer layer.

6 . The superstrate of claim 5 , wherein the hydrocarbon polymer layer comprises polytrimethylsilyl propyne, polymethyl methacrylate, polycarbonate polymers, polyimides, and any combination thereof.

7 . The superstrate of claim 1 , wherein the amorphous fluoropolymer layer has a critical surface tension of at least 20 mN/m and no more than 40 mN/m.

8 . The superstrate of claim 1 , wherein the amorphous fluoropolymer layer comprises:
—(CXY—CF2-)a-(—Z-)b-;
wherein X and Y comprise F, Cl, or H; and Z comprises a four (4), five (5), or six (6) member fluorocarbon ring structure containing at least one C—O—C linkage.

9 . The superstrate of claim 1 , wherein the amorphous fluoropolymer layer is permeable to nitrogen, oxygen, and argon.

10 . The superstrate of claim 1 , wherein the amorphous fluoropolymer layer comprises an oxygen permeation coefficient of greater than 1.0×10 −10 cm3*cm/cm2*S*cmHg.

11 . A method of planarization, comprising:
dispensing a planarization precursor material over a substrate, wherein the substrate includes a non-uniform surface topography; contacting the planarization precursor material with a superstrate, wherein the superstrate comprises: a body, wherein the body comprises a contact surface; and an amorphous fluoropolymer layer on the contact surface of the body, wherein the amorphous fluoropolymer layer is permeable to gases having an atomic mass greater than 4; and curing the planarization precursor material to form a planarization layer over the substrate, wherein curing is performed while the superstrate is contacting the planarization precursor material.

12 . The method of claim 11 , further comprising flowing a gas before contacting the planarization precursor material with the body of the superstrate.

13 . The method of claim 12 , wherein the gas comprises oxygen, nitrogen, argon, or any combination thereof.

14 . The method of claim 12 , wherein the inert gas does not comprise helium.

15 . The method of claim 11 , wherein the amorphous fluoropolymer comprises a dioxolane ring.

16 . The method of claim 11 , wherein the amorphous fluoropolymer comprises a perflurorodioxole tetrafluoroethylene copolymer.

17 . The method of claim 10 , wherein the amorphous fluoropolymer is a polymer or copolymer of perfluoro(3-butenyl vinyl ether).

18 . The method of claim 11 , wherein the amorphous fluoropolymer layer is permeable to nitrogen, oxygen, and argon.

19 . The method of claim 11 , wherein the amorphous fluoropolymer layer comprises an oxygen permeation coefficient of greater than 1.0×10 −1 ° cm3*cm/cm2*S*cmHg.

20 . A method of manufacturing an article, comprising:
depositing a formable material on a substrate; contacting the formable material on the substrate with a superstrate to form a planar layer, wherein the superstrate comprises:
a body, wherein the body comprises a contact surface; and
an amorphous fluoropolymer layer on the contact surface of the body, wherein the amorphous fluoropolymer layer is permeable to gases having an atomic mass greater than 4;
separating the superstrate and the planar layer on the substrate; processing the substrate on which the planar layer has been formed; and manufacturing the article from the processed substrate.

Assignees

• Canon Kk

Inventors

• De Young James P
• Liu Weijun
• Wan Fen

Classifications

• H10P14/683

  carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC · CPC title

• H10P95/06 Primary

  Planarisation of inorganic insulating materials · CPC title

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H10P72/0416

  with the semiconductor substrates being dipped in baths or vessels · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title