Wash water processing method

Patent metadata

Field	Value
Publication number	US-2020255312-A1
Application number	US-201816760281-A
Country	US
Kind code	A1
Filing date	Oct 29, 2018
Priority date	Oct 31, 2017
Publication date	Aug 13, 2020
Grant date	—

Abstract

A wash water processing method and a wash water processing apparatus in a simple structure capable of effectively decomposing organic matters and killing bacteria contained in wash water, extending the life of a filter of a filtration apparatus and an ion-exchange resin and, furthermore, extending a bacteria-killing/washing interval of a washing processing part. In the wash water processing apparatus ( 11 ) and the washing method, a wash water accommodation part ( 12 ) into which processed water processed in a washing processing part ( 10 ) flows and a filtration mechanism part ( 14 ) are connected and the wash water accommodation part has connected in a circulatable manner thereto an inflow flow path and an outflow flow path of a sterilization and purification unit which organically couples respective functions of an ozone supply part which supplies ozone, an ultraviolet irradiation part which irradiates with ultraviolet rays, and a photocatalysis part which causes a photocatalyst to act.

First claim

1 - 10 . (canceled)

11 . A wash water processing method of reusing processed water formed of pure water used in a washing process in semiconductor or liquid-crystal manufacturing or electronic-component plating, wherein: a wash water accommodation part into which the processed water processed in a washing processing part flows and a filtration mechanism part to which the processed water is sent from this wash water accommodation part are connected; the wash water accommodation part has connected thereto, via an inflow flow path and an outflow flow path, a sterilization and purification unit which organically couples respective functions of an ozone supply part which supplies ozone, an ultraviolet irradiation part which irradiates with ultraviolet rays, and a photocatalysis part which causes a photocatalyst to act; the filtration mechanism part includes a microfiltration membrane and an ion-exchange resin; as selecting stop and restart of the sterilization and purification unit as appropriate, the processed water is connected to the wash water accommodation part in a circular manner to adjust a residual ozone concentration of the processed water by a step, by the ozone supply part, of mixing the processed water and ozone, a step, by the ultraviolet irradiation part and the photocatalysis part, of generating .OH (hydroxy radicals or OH radicals), a step of returning the processed water with sterilization and purification completed to the wash water accommodation part, a step of mixing with the processed water accommodated in the wash water accommodation part to dilute an ozone concentration of the processed water accommodated in the wash water accommodation part as a whole, and a step of sending the processed water containing diluted ozone water via a supply flow path to the filtration mechanism part; and proliferation of bacteria in the filtration mechanism part is suppressed and oxidative degradation of the microfiltration membrane and the ion-exchange resin is prevented.

Assignees

• Kitz Corp
• Toyo Valve Co Ltd

Inventors

• Yata Katsuhisa
• Sakurai Takako
• Ito Satoshi
• Tanaka Toshiharu

Classifications

• H10P52/00

  Grinding, lapping or polishing of wafers, substrates or parts of devices · CPC title

• C02F1/44

  by dialysis, osmosis or reverse osmosis {(general membrane separation processes B01D61/00, membrane modules B01D63/00, electrodialysis C02F1/4693, combination of membrane modules and bioreactors C02F3/1268)} · CPC title

• G02F1/13

  based on liquid crystals, e.g. single liquid crystal display cells · CPC title

• C02F1/283

  using coal, charred products, or inorganic mixtures containing them · CPC title

• B01D63/02

  Hollow fibre modules · CPC title