Optimization of high resolution digitally encoded laser scanners for fine feature marking

Patent metadata

Field	Value
Publication number	US-2020251237-A1
Application number	US-202016786957-A
Country	US
Kind code	A1
Filing date	Feb 10, 2020
Priority date	Feb 21, 2013
Publication date	Aug 6, 2020
Grant date	—

Abstract

Disclosed herein are laser scanning systems and methods of their use. In some embodiments, laser scanning systems can be used to ablatively or non-ablatively scan a surface of a material. Some embodiments include methods of scanning a multi-layer structure. Some embodiments include translating a focus-adjust optical system so as to vary laser beam diameter. Some embodiments make use of a 20-bit laser scanning system.

First claim

1 .- 20 . (canceled)

21 . An apparatus, comprising:
a laser configured to produce a processing beam; an optical system; and a scan controller configured to receive a scan pattern defined as a plurality of scan vectors and configured to control the optical system to direct the processing beam to a scan area with a predetermined beam diameter; wherein the scan controller is configured to control the optical system to scan the processing beam with respect to the scan area so as to produce an exposed scan vector such that a transverse offset between the exposed scan vector and an intended scan vector is less than 1/10 of the predetermined beam diameter.

22 . The apparatus of claim 21 , wherein the scan area is rectangular and the transverse offset is less than 1/10 5 of a scan area length.

23 . The apparatus of claim 21 , wherein the scan area is rectangular and the transverse offset is less than 1/10 6 of a scan area length.

24 . The apparatus of claim 21 , wherein the scan controller couples scan control signals to the optical system so that the scan control signals correspond to the scan vectors to within at least 0.0015%.

25 . The apparatus of claim 21 , wherein the scan controller couples scan control signals to the optical system so that the scan control signals correspond to the scan vectors to within at least 0.0008%.

26 . The apparatus of claim 21 , wherein the scan controller couples scan control signals to the optical system so that the scan control signals correspond to the scan vectors to within at least 0.0004%.

27 . The apparatus of claim 21 , wherein the scan controller couples scan control signals to the optical system so that the scan control signals correspond to the scan vectors to within at least 0.0001%.

Assignees

• Nlight Inc

Inventors

• Gross Ken

Classifications

• H10F71/138 Primary

  Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes · CPC title

• G06F3/044

  by capacitive means · CPC title

• G21K5/04 Primary

  with beam-forming means · CPC title

• G06F3/04164

  Connections between sensors and controllers, e.g. routing lines between electrodes and connection pads · CPC title

• H05K3/02

  in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding · CPC title