Flexible display and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-2020203643-A1
Application number	US-202016795244-A
Country	US
Kind code	A1
Filing date	Feb 19, 2020
Priority date	Aug 11, 2015
Publication date	Jun 25, 2020
Grant date	—

Abstract

A flexible display and a method of manufacturing the same are disclosed. In one aspect, the method includes forming a sacrificial metal layer over a support substrate, the sacrificial metal layer formed of a metal material, and forming a barrier layer over the sacrificial metal layer, the barrier layer formed of an organic material. The method also includes exposing the sacrificial metal layer to oxygen so as to form a sacrificial metal oxide layer, forming a display unit over the barrier layer, and separating the barrier layer from the support substrate.

First claim

1 . A method of manufacturing a flexible display, the method comprising:
forming a sacrificial metal layer over a support substrate, the sacrificial metal layer formed of a metal material; forming a barrier layer over the sacrificial metal layer, the barrier layer formed of an organic material; exposing the sacrificial metal layer to oxygen so as to form a sacrificial metal oxide layer; forming a display unit over the barrier layer; and separating the barrier layer from the support substrate.

2 . The method of claim 1 , wherein the organic material has a viscosity greater than about 1 cP and equal to or less than about 100 cP.

3 . The method of claim 1 , wherein the barrier layer is formed of an imide-based, acrylic-based, phenylene-based, or siloxane-based material.

4 . The method of claim 1 , wherein the barrier layer has a thickness equal to or greater than about 10 nm and equal to or less than about 1 μm.

5 . The method of claim 1 , wherein the sacrificial metal layer is formed of molybdenum (Mo).

6 . The method of claim 1 , wherein the forming of the barrier layer comprises concurrently vaporizing the solvent from the organic material and forming the sacrificial metal oxide layer.

7 . The method of claim 1 , wherein the barrier layer is additionally formed of a cross-linking agent, and
wherein the method further comprises concurrently heating the barrier layer and forming the sacrificial metal oxide layer so as to cross-link the barrier layer with the cross-linking agent.

8 . The method of claim 1 , wherein the separating comprises radiating a laser beam onto the sacrificial metal oxide layer.

9 . The method of claim 1 , wherein the separating comprises dissolving the sacrificial metal oxide layer in water.

10 . The method of claim 1 , wherein the sacrificial metal oxide layer is formed after the barrier layer is formed.

11 . A method of manufacturing a flexible display, the method comprising:
depositing a metal over a support substrate so as to form a sacrificial metal layer; depositing an organic material over the sacrificial metal layer so as to form a barrier layer; exposing the sacrificial metal layer to oxygen so as to form a sacrificial metal oxide layer in a chamber; and separating the barrier layer from the support substrate.

12 . The method of claim 11 , further comprising forming a protective film over the barrier layer after the separating.

Assignees

• Samsung Display Co Ltd

Inventors

• Choi Jinhwan
• Kim Kihyun
• Seo Taean

Classifications

• H10P14/683

  carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC · CPC title

• H10K77/111 Primary

  Flexible substrates · CPC title

• H10K59/1201

  Manufacture or treatment · CPC title

• H10K71/80

  using temporary substrates · CPC title

• H10K59/12

  Active-matrix OLED [AMOLED] displays · CPC title