Transparent electrode for oxygen production, method for producing same, tandem water decomposition reaction electrode provided with same, and oxygen production device using same

Patent metadata

Field	Value
Publication number	US-2020173044-A1
Application number	US-202016784678-A
Country	US
Kind code	A1
Filing date	Feb 7, 2020
Priority date	Aug 9, 2017
Publication date	Jun 4, 2020
Grant date	—

Abstract

A method for producing a transparent electrode for oxygen production having a Ta nitride layer on a transparent substrate, including: a step of forming a Ta nitride precursor layer on the transparent substrate; and a step of nitriding the Ta nitride precursor layer with a mixed gas containing ammonia and a carrier gas.

First claim

1 . A method for producing a transparent electrode for oxygen production comprising a Ta nitride layer on a transparent substrate, comprising:
a step of forming a Ta nitride precursor layer on the transparent substrate; and a step of nitriding the Ta nitride precursor layer with a mixed gas comprising ammonia and a carrier gas.

2 . The production method according to claim 1 , wherein the Ta nitride layer is a Ta 3 N 5 layer.

3 . The production method according to claim 1 , wherein the transparent substrate is a sapphire substrate or a SiO 2 substrate.

4 . The production method according to claim 1 , wherein the carrier gas is nitrogen gas.

5 . A transparent electrode for oxygen production in which a nitride semiconductor layer and a Ta nitride layer are stacked in this order on a transparent substrate.

6 . The transparent electrode for oxygen production according to claim 5 , wherein the Ta nitride layer is a Ta 3 N 5 layer.

7 . The transparent electrode for oxygen production according to claim 5 , wherein the nitride semiconductor layer is a GaN layer.

8 . The transparent electrode for oxygen production according to claim 5 , wherein the transparent substrate is a sapphire substrate or a SiO 2 substrate.

9 . The transparent electrode for oxygen production according to claim 5 , wherein light transmittance at wavelength of 600 nm to 900 nm is 80% or more.

10 . A method for producing a tandem water splitting reaction electrode, comprising: a step of stacking a transparent electrode for oxygen production produced by the production method according to claim 1 and an electrode for hydrogen production.

11 . A tandem water splitting reaction electrode in which the transparent electrode for oxygen production according to claim 5 and an electrode for hydrogen production are stacked.

12 . A transparent electrode for oxygen production comprising Ta 3 N 5 to be used as an oxygen production-side electrode in a water splitting reaction, wherein light transmittance at 600 nm to 900 nm is 80% or more, and photocurrent density at 1.23 V RHE is 3 mA/cm 2 or more under AM1.5G irradiation.

13 . A tandem water splitting reaction electrode in which the transparent electrode for oxygen production according to claim 12 and an electrode for hydrogen production having an absorption peak at a wavelength longer than 600 nm are combined.

14 . A transparent electrode for oxygen production in which a nitride semiconductor layer and a Ti nitride layer are stacked in this order on a transparent substrate.

15 . The transparent electrode for oxygen production according to claim 14 , wherein the nitride semiconductor layer is a GaN layer.

16 . The transparent electrode for oxygen production according to claim 14 , wherein the transparent substrate is a sapphire substrate or a SiO 2 substrate.

17 . An oxygen production device comprising the transparent electrode for oxygen production according to claim 5 .

18 . A water splitting device comprising the transparent electrode for oxygen production according claim 5 and/or the tandem water splitting reaction electrode according to claim 11 .

19 . A water splitting device comprising the transparent electrode for oxygen production according claim 5 and/or the tandem water splitting reaction electrode according to claim 13 .

20 . A method of synthesizing a compound, comprising:
a step of reacting hydrogen and/or oxygen obtained by splitting water with the water splitting device according to claim 18 .

21 . A method of synthesizing a compound, comprising:
a step of reacting hydrogen and/or oxygen obtained by splitting water with the water splitting device according to claim 19 .

22 . The synthesis method according to claim 20 , wherein the compound is a lower olefin, ammonia, or alcohol.

23 . The synthesis method according to claim 21 , wherein the compound is a lower olefin, ammonia, or alcohol.

24 . A synthesis device comprising the water splitting device according to claim 18 and a reactor in which a catalyst is arranged, wherein
hydrogen obtained from the water splitting device and another raw material are introduced into the reactor and reacted in the reactor.

25 . A synthesis device comprising the water splitting device according to claim 19 and a reactor in which a catalyst is arranged, wherein
hydrogen obtained from the water splitting device and another raw material are introduced into the reactor and reacted in the reactor.

Assignees

• Mitsubishi Chem Corp
• Univ Tokyo
• Japan Tech Research Association Of Artificiall Photosynthetic Chemical Process
• Aist
• Japan Tech Research Association Of Artificial Photosynthetic Chemical Process

Inventors

• Nishiyama Hiroshi
• Higashi Tomohiro
• Sasaki Yutaka
• Yamada Taro
• Domen Kazunari
• Suzuki Yohichi
• Akiyama Seiji

Classifications

• C01P2006/60

  Optical properties, e.g. expressed in CIELAB-values · CPC title

• C25B11/0405

  Chemistry & Metallurgy · mapped topic

• C25B11/0447 Primary

  Chemistry & Metallurgy · mapped topic

• C25B1/04 Primary

  by electrolysis of water · CPC title

• C25B11/0415

  Chemistry & Metallurgy · mapped topic