System and method for selective autofocus

Patent metadata

Field	Value
Publication number	US-2020118786-A1
Application number	US-201816161031-A
Country	US
Kind code	A1
Filing date	Oct 15, 2018
Priority date	Oct 15, 2018
Publication date	Apr 16, 2020
Grant date	—

Abstract

A system and method for focusing a scanning electron microscope (SEM) comprise acquiring a first SEM image of a sample using a first focus condition, analyzing the first SEM image to determine contrast change measurements, determining a region of interest based on the contrast change measurements, adjusting the SEM from the first focus condition to a second focus condition based at least in part on the region of interest, wherein the first focus condition differs from the second focus condition, and acquiring a second SEM image of the sample using the second focus condition.

First claim

1 . A method for focusing a scanning electron microscope (SEM), the method comprising:
acquiring a first SEM image of a sample using a first focus condition; analyzing the first SEM image to determine contrast change measurements; determining a region of interest based on the contrast change measurements; acquiring two or more SEM images and determining a sharpness gradient for each of the two or more SEM images by analyzing the region of interest in each of the two more SEM images; adjusting the SEM from the first focus condition to a second focus condition based at least in part on the sharpness gradient for each of the two or more SEM images, wherein the first focus condition differs from the second focus condition; and acquiring a second SEM image of the sample using the second focus condition.

2 . The method of claim 1 , wherein the first SEM image comprises a plurality of pixels, and wherein analyzing the first SEM image comprises:
comparing each pixel of the plurality of pixels of the first SEM image to each neighboring pixel of the plurality of pixels; and determining a contrast change measurement for each pixel of the plurality of pixels.

3 . The method of claim 2 , wherein determining the region of interest comprises:
determining a maximum contrast change measurement from the contrast change measurements and a location of the maximum contrast change measurement within the first SEM image; and setting a position of the region of interest to correspond to the location of the maximum contrast change measurement.

4 . The method of claim 2 further comprising:
generating a contrast change map from each of contrast change measurements.

5 . The method of claim 2 , wherein analyzing the first SEM image further comprises:
determining a contrast change baseline from the first SEM image; and comparing each of the contrast change measurements with the contrast change baseline to generate baseline contrast change measurements.

6 . The method of claim 5 , wherein determining the contrast change baseline comprises determining an average contrast change measurement from the contrast change measurement.

7 . The method of claim 1 , wherein an area of the region of interest is smaller than an area of the first SEM image.

8 . A computer program product for focusing a scanning electron microscope (SEM), the computer program product comprising:
a non-transitory computer-readable storage medium having computer-readable program code embodied therewith, the computer-readable program code executable by one or more computer processors to:
acquire a first SEM image of a sample using a first focus condition;
analyze first SEM image to determine contrast change measurements;
determine a region of interest based on the contrast change measurements;
acquire two or more SEM images and determine a sharpness gradient for each of the two or more SEM images by analyzing the region of interest in each of the two more SEM images;
adjust the SEM from the first focus condition to a second focus condition based at least in part on the sharpness gradient for each of the two or more SEM images, wherein the first focus condition differs from the second focus condition; and
acquire a second image of the sample using the second focus condition.

9 . The computer program product of claim 8 , wherein the first SEM image comprises a plurality of pixels, and wherein analyzing the first SEM image comprises:
comparing each pixel of the plurality of pixels of the first SEM image to each neighboring pixel of the plurality of pixels; and determining a contrast change measurement for each pixel of the plurality of pixels.

10 . The computer program product of claim 9 , wherein determining the region of interest comprises:
determining a maximum contrast change measurement from the contrast change measurements and a location of the maximum contrast change measurement within the first SEM image; and setting a position of the region of interest to correspond to the location of the maximum contrast change measurement.

11 . The computer program product of claim 10 further comprising:
generating a contrast change map from each of contrast change measurements.

12 . The computer program product of claim 9 , wherein analyzing the first SEM image further comprises:
determining a contrast change baseline from the first SEM image; and comparing each of the contrast change measurements with the contrast change baseline to generate baseline contrast change measurements.

13 . The computer program product of claim 12 , wherein determining the contrast change baseline comprises determining an average contrast change measurement from the contrast change measurement.

14 . The computer program product of claim 8 , wherein an area of the region of interest is smaller than an area of the first SEM image.

15 . A testing device, comprising:
a scanning electron microscope (SEM); and a processing system coupled to the SEM, the processing system configured to:
acquire a first SEM image of a sample using a first focus condition;
analyze the first SEM image to determine contrast change measurements;
determine a region of interest based on the contrast change measurements;
acquire two or more SEM images and determine a sharpness gradient for each of the two or more SEM images by analyzing the region of interest in each of the two more SEM images;
adjust the SEM from the first focus condition to a second focus condition based at least in part on the sharpness gradient for each of the two or more SEM images, wherein the first focus condition differs from the second focus condition; and
acquire a second image of the sample using the second focus condition.

16 . The testing device of claim 15 , wherein the first SEM image comprises a plurality of pixels, and wherein analyzing the first SEM image comprises:
comparing each pixel of the plurality of pixels of the first SEM image to each neighboring pixel of the plurality of pixels; and determining a contrast change measurement for each pixel of the plurality of pixels.

17 . The testing device of claim 16 , wherein determining the region of interest comprises:
determining a maximum contrast change measurement from the contrast change measurements and a location of the maximum contrast change measurement within the first SEM image; and setting a position of the region of interest to correspond to the location of the maximum contrast change measurement.

18 . The testing device of claim 16 , wherein analyzing the first SEM image further comprises:
determining a contrast change baseline from the first SEM image; and comparing each of the contrast change measurements with the contrast change baseline to generate baseline contrast change measurements.

19 . The testing device of claim 18 , wherein determining the contrast change baseline comprises determining an average contrast change measurement from the contrast change measurement.

20 . The testing device of claim 15 , wherein an area of the region of interest is smaller than an area of the first SEM image.

Assignees

• Applied Materials Inc

Inventors

• Mueller Bernhard G
• Virdi Kulpreet Singh
• Knaub Nikolai

Classifications

• H01J2237/2809

  characterised by the imaging problems involved · CPC title

• H01J2237/24592

  Inspection and quality control of devices · CPC title

• H01J37/21 Primary

  Means for adjusting the focus · CPC title

• H01J37/222 Primary

  Image processing arrangements associated with the tube · CPC title

• H01J2237/216

  Automatic focusing methods · CPC title