Calcium carbonate slurry

Patent metadata

Field	Value
Publication number	US-2020002575-A1
Application number	US-201816488140-A
Country	US
Kind code	A1
Filing date	Feb 21, 2018
Priority date	Feb 24, 2017
Publication date	Jan 2, 2020
Grant date	—

Abstract

A composition is provided that comprises a calcium carbonate slurry. The calcium carbonate slurry comprises a plurality of calcium carbonate particles suspended in a solution, where the solution comprises a dispersant and an anionic surfactant. The concentration of the calcium carbonate particles in the calcium carbonate slurry is equal to or less than about 2.0 wt. %.

First claim

1 - 22 . (canceled)

23 . A composition comprising:
a calcium carbonate slurry comprising a plurality of calcium carbonate particles suspended in a solution, wherein the solution comprises a dispersant and an anionic surfactant, wherein a concentration of the calcium carbonate particles in the calcium carbonate slurry is equal to or less than about 2.0 wt. %.

24 . The composition of claim 23 , wherein one or both of the dispersant and the anionic surfactant reduce a zeta potential of the slurry.

25 . The composition of claim 23 , wherein a zeta potential of the slurry is equal to or less than about −50 mV.

26 . The composition of claim 23 , wherein the dispersant includes sodium polyacrylate, sodium n-silicate, sodium tetrapyrophosphate, sodium hexametaphosphate, sodium polyalluminate, sodium tetraborate, sodium triphosphate, sodium citrate, or combinations thereof.

27 . The composition of claim 23 , wherein the anionic surfactant includes sodium dodecyl sulfate (SDS), polysorbate, octylphenol ethoxylate, or combinations thereof.

28 . The composition of claim 23 , wherein a pH of the slurry is between about 8.5 and about 10.5.

29 . The composition of claim 23 , wherein an average diameter of the plurality of calcium carbonate particles is between about 10 nm and about 3μm.

30 . The composition of claim 23 , wherein less than about 5% of a total number of the calcium carbonate particles has a diameter greater than about 4 μm.

31 . The composition of claim 23 , wherein a concentration of the dispersant is between about 0.1 wt. % and about 0.5 wt. % of the slurry.

32 . A method comprising:
polishing a surface of a substrate with a calcium carbonate slurry, wherein the substrate is coated with a soft material, wherein the calcium carbonate slurry comprises a dispersant, an anionic surfactant, and a plurality of calcium carbonate particles suspended in a solution.

33 . The method of claim 32 , wherein a concentration of the calcium carbonate particles in the calcium carbonate slurry is equal to or less than about 2.0 wt. %.

34 . The method of claim 32 , wherein the soft material includes an organic polymeric hydrogel.

35 . The method of claim 32 , further comprising:
mixing, prior to polishing the substrate, the plurality of calcium carbonate particles in the solution with the dispersant and the anionic surfactant using one or more of a magnetic stir bar, impeller type mixer, diaphragm pump, slurry pump, peristaltic pump, and high pressure pump.

36 . The method of claim 32 , wherein the substrate includes a plurality of features, each of the features having a diameter between about 1 nm and about 100 nm.

37 . The method of claim 32 , wherein polishing the surface of the substrate coated with the soft material occurs without substantially scratching the surface of the substrate.

38 . The method of claim 32 , wherein one or both of the dispersant and the anionic surfactant reduces a zeta potential of the slurry.

39 . The method of claim 32 , wherein a zeta potential of the slurry is equal to or less than −50 mV.

40 . The method of claim 32 , wherein the dispersant includes sodium polyacrylate, sodium n-silicate, sodium tetrapyrophosphate, sodium hexametaphosphate, sodium polyalluminate, sodium tetraborate, sodium triphosphate, sodium citrate, or combinations thereof, and wherein the anionic surfactant includes sodium dodecyl sulfate (SDS), polysorbate, octylphenol ethoxylate, or combinations thereof.

41 . The method of claim 32 , wherein an average diameter of the plurality of calcium carbonate particles is between about between about 10 nm and about 3 μm.

42 . The method of claim 32 , wherein a concentration of the dispersant is between about 0.1 wt. % and about 0.5 wt. % of the slurry.

43 . A method comprising:
mixing a dispersant and an anionic surfactant into a solution; and adding a plurality of calcium carbonate particles suspended in the solution to form a slurry, wherein a concentration of the calcium carbonate particles in the slurry is less than about 2.0 wt. %.

44 . The method of claim 43 , further comprising:
mixing the plurality of calcium carbonate particles over time to maintain suspension of the calcium carbonate particles in the solution.

Assignees

• Illumina Inc

Inventors

• Yang Robert
• Brittelle Samantha K
• Cheng You-Jung
• Bailey Scott William
• Tsay James M

Classifications

• H10P52/403

  of conductive or resistive materials · CPC title

• H10P52/402

  of semiconductor materials · CPC title

• C09K3/1409

  Abrasive particles per se (preparation of diamond C01B32/25) · CPC title

• C09G1/02 Primary

  containing abrasives or grinding agents {(abrasives as such C09K3/14; polishing of semi-conductors H10P52/40)} · CPC title

• C09K3/1463

  Aqueous liquid suspensions · CPC title