Methods and apparatus for a biosensor

Patent metadata

Field	Value
Publication number	US-2019376899-A1
Application number	US-201816005027-A
Country	US
Kind code	A1
Filing date	Jun 11, 2018
Priority date	Jun 11, 2018
Publication date	Dec 12, 2019
Grant date	—

Abstract

Various embodiments of the present technology may comprise a method and apparatus for a biosensor. The biosensor comprises a vertical flow channel that extends through a photodiode, and wherein the photodiode is lateral to the channel's vertical sidewall.

First claim

1 . A sensing device, comprising:
a sensor chip having a first horizontal surface and an opposing second horizontal surface, and comprising:
an array of pixels extending from the first horizontal surface to the second horizontal surface, wherein each pixel comprises at least one photodiode; and
a plurality of detection regions arranged vertically in the pixel array, wherein each detection region:
is defined by a substantially perpendicular sidewall extending between the first and second horizontal surfaces; and
comprises an opening at the first horizontal surface;

wherein a first photodiode from the array of pixels is positioned lateral to at least a portion of the sidewall of a first detection region from the plurality of detection regions.

2 . The sensing device of claim 1 , wherein the sensor chip further comprises: a metal layer adjacent to each photodiode and forming the first horizontal surface.

3 . The sensing device of claim 1 , wherein the sensor chip further comprises: a microlens arranged adjacent to the first horizontal surface and directly above the opening of the first detection region from the plurality of detection regions.

4 . The sensing device of claim 1 , further comprising: a passivation layer disposed on a surface of each photodiode in the array of pixels.

5 . The sensing device of claim 4 , further comprising: an electromagnetic wavelength filter disposed within the passivation layer adjacent to the detection region.

6 . The sensing device of claim 1 , wherein:
a first pixel from the array of pixels comprises the first photodiode and a second photodiode; and the first and second photodiodes are positioned concentric with each other and positioned laterally adjacent to the sidewall of the first detection region from the plurality of detection regions.

7 . The sensing device of claim 1 , wherein the first detection region from the plurality of detection regions is centrally located in one pixel of the array of pixels and the first photodiode is disposed concentrically around the sidewall.

8 . The sensing device of claim 1 , wherein the first detection region of the plurality of detection regions is centrally located within a pixel subset from the array, the pixel subset comprising at least the first photodiode and a second photodiode, and the first and second photodiodes are disposed laterally adjacent to at least a portion of the sidewall.

9 . The sensing device of claim 1 , wherein the sensor chip further comprises an isolation region disposed between adjacent photodiodes, and configured to prevent charge migration between the adjacent photodiodes.

10 . The sensing device of claim 1 , further comprising a carrier chip bonded to the second horizontal surface, and comprising a collection area.

11 . A method for detecting fluorescence in a fluid containing a biological material, comprising:
flowing the fluid through a channel arranged vertically in a pixel, wherein:
the pixel comprises a photodiode,
the channel comprises a substantially vertical sidewall, and
the photodiode is disposed laterally adjacent to at least a portion of the sidewall.

12 . The method of claim 11 , further comprising: generating an electric field in the fluid.

13 . The method of claim 11 , further comprising: filtering the fluorescence with an electromagnetic wavelength filter.

14 . The method of claim 11 , further comprising: flowing the fluid from the channel and into a collection area formed below the pixel.

15 . A sensing device adapted for detecting fluorescent radiation in a biological fluid, comprising:
a sensor chip, comprising:
an array of pixels, wherein each pixel comprises:
a photodiode comprising: a vertical thru-hole centrally located in the photodiode and defined by a vertical sidewall;
a passivation layer disposed on the photodiode; and
a metal layer disposed on the passivation layer and forming a first horizontal surface of the sensor chip; and

a carrier chip bonded to an opposing second horizontal surface of the sensor chip, and comprising a collection area configured to receive the biological fluid from the thru-hole.

16 . The sensing device of claim 15 , further comprising a microlens arranged adjacent to the metal layer and directly above the thru-hole.

17 . The sensing device of claim 15 , further comprising an electromagnetic wavelength filter disposed within the passivation layer between the vertical thru-hole and the photodiode.

18 . The sensing device of claim 15 , wherein each pixel comprises a plurality of concentric photodiodes disposed around the sidewall and concentric with the thru-hole.

19 . The sensing device of claim 15 , further comprising: an anti-reflective coating deposited on the sidewall.

20 . The sensing device of claim 15 , further comprising: an isolation region disposed between adjacent photodiodes.

Assignees

• Semiconductor Components Ind Llc

Inventors

• Borthakur Swarnal
• Boettiger Ulrich

Classifications

• G01N21/6486 Primary

  Measuring fluorescence of biological material, e.g. DNA, RNA, cells (G01N21/6428 takes precedence) · CPC title

• G01J2001/446

  Photodiode · CPC title

• G01N21/6454 Primary

  using an integrated detector array · CPC title

• H04N25/76

  Addressed sensors, e.g. MOS or CMOS sensors · CPC title

• G01N2021/6439

  with indicators, stains, dyes, tags, labels, marks · CPC title