Method for Producing Polymer Film

Patent metadata

Field	Value
Publication number	US-2019345300-A1
Application number	US-201916425252-A
Country	US
Kind code	A1
Filing date	May 29, 2019
Priority date	Nov 30, 2016
Publication date	Nov 14, 2019
Grant date	—

Abstract

A method for producing a polymer film is disclosed herein. The method is capable of effectively forming a polymer film on a substrate, where the polymer film comprises highly aligned block copolymers without orientation defects, coordination number defects, distance defects, and the like. The method can be applied to production of various patterned substrates.

First claim

1 . A method for producing a polymer film, comprising:
annealing a polymer film having a block copolymer at a temperature (T1) on one side of the polymer film and at a temperature (T2) on the opposite side of the polymer film to form a self-assembled structure of the block copolymer, wherein the block copolymer having a polymer segment A and a polymer segment B that is different from the polymer segment A, and wherein the difference (T1−T2) is in a range of 40° C. to 500° C.

2 . The method for producing a polymer film according to claim 1 , wherein the self-assembled structure is a sphere, cylinder or lamellar structure.

3 . The method for producing a polymer film according to claim 1 , wherein the self-assembled structure is a vertically oriented structure.

4 . The method for producing a polymer film according to claim 1 , wherein T1 is maintained in a range of 100° C. to 300° C.

5 . The method for producing a polymer film according to claim 1 , wherein the polymer segments A and B are each any one segment selected from the group consisting of a polystyrene segment, a poly(alkyl (meth)acrylate) segment, a polyvinylpyrrolidone segment, a polylactic acid segment, a polyvinylpyridine segment, a polyalkylene oxide segment, a polybutadiene segment, a polyisoprene segment and a polyolefin segment.

6 . The method for producing a polymer film according to claim 1 , wherein the polymer segment A satisfies one or more of Conditions 1 to 3 below:
Condition 1: it exhibits a melting transition peak or an isotropic transition peak in a range of −80 to 200 in a DSC analysis: Condition 2: it exhibits an X-ray diffraction (XRD) peak having a half-value width in a range of 0.2 to 0.9 nm −1 within a scattering vector (q) range of 0.5 nm −1 to 10 nm −1 : Condition 3: it comprises a side chain, wherein the number (n) of chain-forming atoms in the side chain satisfies Equation 1 below with the scattering vector (q):
3 nm −1 to 5 nm −1 =nq /(2×π)  [Equation 11

wherein, n is a number of the chain-forming atoms and q is the smallest scattering vector (q) in which an XRD peak is observed for the block copolymer or the scattering vector (q) in which an XRD peak of the largest peak area is observed.

7 . The method for producing a polymer film according to claim 6 , wherein the absolute value of the difference in surface energy between the polymer segments A and B is in a range of 2.5 to 7 mN/m.

8 . The method for producing a polymer film according to claim 1 , wherein the polymer segment A comprises a side chain having 8 or more chain-forming atoms.

9 . The method for producing a polymer film according to claim 8 , wherein the polymer segment comprises a ring structure and the side chain is substituted on the ring structure.

10 . The method for producing a polymer film according to claim 9 , wherein no halogen atom is present in the ring structure.

11 . The method for producing a polymer film according to claim 8 , wherein the polymer segment B comprises 3 or more halogen atoms.

12 . The method for producing a polymer film according to claim 11 , wherein the polymer segment B comprises a ring structure and the halogen atoms are substituted on the ring structure.

13 . A method for producing a patterned substrate, comprising:
forming a polymer film on a substrate, wherein the polymer film comprises a block copolymer having a polymer segment A and a polymer segment B different from the segment A; and annealing the polymer film at a temperature (T1) on one side of the polymer film and at a temperature (T2) on the opposite side of the polymer film, wherein the difference (T1−T2) is in a range of 40° C. to 500° C.

14 . The method for producing a patterned substrate according to claim 13 , wherein the polymer film is formed in direct contact with the substrate.

15 . The method for producing a patterned substrate according to claim 13 , further comprising:
selectively removing any one polymer segment of the block copolymer forming the self-assembled structure to expose a surface of the substrate, the exposed surface of the substrate underlying the portion of the polymer film that is removed.

16 . The method for producing a patterned substrate according to claim 15 , further comprising:
etching the exposed surface of the substrate using the polymer film as a mask.

Assignees

• Lg Chemical Ltd

Inventors

• Ryu Hyung Ju
• Ku Se Jin
• Lee Mi Sook
• Yoon Sung Soo
• Park No Jin
• Kim Jung Keun
• Lee Je Gwon
• Choi Eun Young

Classifications

• G03F7/0002 Primary

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• C08J7/123

  Treatment by wave energy or particle radiation (C08J7/18 takes precedence) · CPC title

• C08J2325/06

  Polystyrene · CPC title

• C08J2367/04

  Polyesters derived from hydroxy carboxylic acids, e.g. lactones (C08J2367/06 takes precedence) · CPC title

• C08J2371/02

  Polyalkylene oxides · CPC title