Sensing method, sensor and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-2019323970-A1
Application number	US-201816140889-A
Country	US
Kind code	A1
Filing date	Sep 25, 2018
Priority date	Apr 24, 2018
Publication date	Oct 24, 2019
Grant date	—

Abstract

A method of manufacturing a sensor comprises: providing a substrate; forming a photoresist layer on the substrate, wherein the photoresist layer comprises a hole array which comprises a plurality of holes which pass through from one side of the photoresist layer to the substrate; sputtering a metallic glass material on the photoresist layer to deposit the metallic glass material on a hole wall of each hole and a part of the substrate defined by the hole wall; removing the photoresist layer and forming a nanotube array structure of the metallic glass material, wherein the nanotube array structure comprises a plurality of nanotubes, and each nanotube has an open end opposite to the substrate; performing a surface treatment on the nanotube array structure to form a plurality of functional groups in each nanotube; and anchoring a plurality of aptamers in each nanotube by activating the plurality of functional groups.

First claim

What is claimed is:

1 . A sensor, comprising:
a substrate; a nanotube array structure formed on one side of the substrate, the nanotube array structure comprising a plurality of nanotubes, each nanotube having an open end opposite to the substrate; and a plurality of aptamers anchored in the plurality of nanotubes, which are processed by surface activation.

2 . The sensor of claim 1 , wherein a wall thickness-to-diameter ratio of each nanotube ranges from 1:2 to 1:10.

3 . The sensor of claim 1 , wherein a height-to-width ratio of each nanotube ranges from 1:0.5 to 1:10.

4 . The sensor of claim 1 , wherein a duty ratio of the plurality of nanotubes ranges from 0.5 to 6.

5 . The sensor of claim 1 , wherein the nanotube array structure comprises an ordered array composed of the plurality of nanotubes, and a diameter of each nanotube ranges from 10 nm to 100 μm.

6 . The sensor of claim 1 , wherein a diffractive reflectance intensity or a diffractive transmittance intensity of the nanotube array structure for transverse electric polarization and transverse magnetic polarization is increased with an increase in a diameter of each nanotube.

7 . The sensor of claim 1 , wherein the nanotube array structure comprises at least one material selected from the group consisting of: a zirconium-based metallic glass, a titanium-based metallic glass, a palladium-based metallic glass, an iron-based metallic glass, a copper-based metallic glass, a nickel-based metallic glass, an aluminium-based metallic glass, a tungsten-based metallic glass, and a magnesium-based metallic glass.

8 . A method of manufacturing a sensor, comprising:
providing a substrate; forming a photoresist layer on the substrate, wherein the photoresist layer comprises a hole array, and the hole array comprises a plurality of holes which pass through from one side of the photoresist layer to the substrate; sputtering a metallic glass material on the photoresist layer to deposit the metallic glass material on a hole wall of each hole and a part of the substrate defined by the hole wall; removing the photoresist layer and forming a nanotube array structure of the metallic glass material, wherein the nanotube array structure comprises a plurality of nanotubes, and each nanotube has an open end opposite to the substrate; performing a surface treatment on the nanotube array structure to form a plurality of functional groups in each nanotube; and anchoring a plurality of aptamers in each nanotube by activating the plurality of functional groups.

9 . The method of claim 8 , wherein an inner surface of each nanotube is modified by a solution of 0.1 wt % to 10 wt % 3-aminopropyltriethoxysilane in methanol to form the plurality of functional groups when the surface treatment is performed.

10 . The method of claim 9 , wherein the plurality of functional groups are activated by a solution containing 1-ethyl-3-(3-dimethylaminopropyl)carbodiimide and N-hydroxysuccinimide, and the plurality of aptamers are combined with the plurality of functional groups by adding a 2 wt % to 20 wt % buffer solution of the plurality of aptamers.

11 . The method of claim 8 , wherein the plurality of aptamers are antibodies, DNA probes, or biotins.

12 . The method of claim 8 , further comprising:
filling targets to be sensed into the plurality of nanotubes after the plurality of aptamers have been anchored.

13 . A sensing method for the sensor as claimed in claim 1 , comprising:
placing the sensor in a fluid with targets to be sensed; projecting an incident light to the nanotube array structure of the sensor from a light source and receiving a reflected light of the incident light; and analyzing an optical property of the reflected light to determine a sensing result of the targets to be sensed.

14 . The method of claim 13 , wherein the optical property is associated with a reflection angle of the reflected light with maximum reflectivity.

15 . The method of claim 13 , wherein the optical property is associated with a color of the reflected light.

Assignees

• Univ Nat Taiwan Science & Technology

Inventors

• Chu Jinn P
• Chen Chien-Kuang

Classifications

• B82Y30/00

  Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title

• C22C45/10

  with molybdenum, tungsten, niobium, tantalum, titanium, or zirconium {or Hf} as the major constituent · CPC title

• C22C45/08

  with aluminium as the major constituent · CPC title

• C22C45/04

  with nickel or cobalt as the major constituent · CPC title

• C22C45/02

  with iron as the major constituent · CPC title