Managing thermal budget in annealing of substrates
US-2015357215-A1 · Dec 10, 2015 · US
US2019321912A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2019321912-A1 |
| Application number | US-201916503934-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jul 5, 2019 |
| Priority date | Jan 5, 2017 |
| Publication date | Oct 24, 2019 |
| Grant date | — |
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In order to create a laser tool, in particular for the structuring of cylinder running surfaces, that offers the possibility of adjusting the focal position of the laser beam with high process reliability and with high repeatability, it is provided that the laser tool has a laser source for producing laser beams, a collimator for producing a parallel course of the laser beams from the laser source, which are passed through a lens that is located within a rotatable spindle, wherein an optical device for deflecting the laser beams onto a material surface is attached to an end of the spindle facing away from the laser source, wherein the collimator is movable parallel to the laser beam by means of a drive.
Opening claim text (preview).
What is claimed is: 1 . A laser tool for structuring cylinder running surfaces, the laser tool comprising: a laser source for producing a laser beam; a collimator for producing a parallel course of the laser beam from the laser source, which is passed through a lens that is located within a rotatable spindle; and an optical device to deflect the laser beams onto a material surface, the optical device being attached to an end of the spindle facing away from the laser source, wherein the collimator is movable parallel to the laser beam via a drive. 2 . The laser tool according to claim 1 , wherein the drive is an electric drive, a servomotor, a pneumatic drive, or a hydraulic drive. 3 . The laser tool according to claim 1 , wherein the drive has an external position sensor. 4 . The laser tool according to claim 1 , wherein the drive has a control device to control a movement of the collimator based on at least one predefinable parameter. 5 . The laser tool according to claim 1 , wherein the at least one parameter is a feed of the collimator toward the optical device or a feed of the collimator toward the laser source. 6 . The laser tool according to claim 1 , wherein the laser tool has at least a lower stop and/or an upper stop that delimit the movement of the collimator. 7 . The laser tool according to claim 1 , wherein the lens is arranged in a fixed position in a lens tube. 8 . The laser tool according to claim 1 , wherein the lens is attached to the lens tube, and wherein the lens tube is attached to the collimator. 9 . The laser tool according to claim 1 , wherein the spindle is rotated by a hollow-shaft motor, and wherein the spindle is attached to the rotor of the hollow-shaft motor. 10 . The laser tool according to claim 1 , wherein the optical device includes a reflecting prism or a mirror. 11 . The laser tool according to claim 1 , wherein the laser tool has a control unit that controls the motion of the collimator as a function of a signal from a sensor. 12 . The laser tool according to claim 1 , wherein the laser tool has a centering device for moving the collimator in a plane substantially perpendicular to the laser beam. 13 . The laser tool according to claim 1 , wherein the laser tool has a tilting device via which the collimator is tilted out of at least one plane, which encloses an angle with an X-Y plane, into a plane that is substantially perpendicular to the laser beam. 14 . The laser tool according to claim 1 , wherein the tilting device is arranged between the side of the collimator facing the optical device and the centering device. 15 . The laser tool according to claim 1 , wherein the laser tool has a first nozzle system, wherein the first nozzle system has at least one air nozzle or at least two air nozzles that surround the laser beam that has emerged from the laser tool with an air jet such that workpiece particles removed from the workpiece surface by the laser beam are slowed down and/or the at least one air jet of the at least one air nozzle is directed at the material surface in order to clean the material surface. 16 . The laser tool according to claim 1 , wherein the laser tool has a second nozzle system, wherein the second nozzle system has at least one third air nozzle whose air jet proceeds the laser beam in front of a laser beam exit aperture of the laser tool such that an ingress of particles into the interior of the laser tool through the laser beam exit aperture is prevented. 17 . The laser tool according to claim 1 , wherein the laser tool has an oscillation generating device, via which the lens is placed in oscillation parallel to the laser beam, and wherein the oscillation frequency is controlled as a function of the rotational speed of the spindle. 18 . The laser tool according to claim 1 , wherein the oscillation generating device is an eccentric driven by a high-frequency motor, or is a system comprising a coil and a magnet. 19 . A method for setting a focal position of laser beams in a laser tool comprising a laser source for producing a laser beam and a collimator for producing a parallel course of the laser beam from the laser source, which is passed through a lens, the method comprising arranging the lens inside a rotatable spindle; attaching an optical device to an end of the spindle facing away from the laser source to deflect the laser beam onto a material surface; and moving the collimator substantially parallel to the laser beam via a drive, wherein at least one parameter is predefined by a controller that controls the motion of the collimator, and wherein the collimator is moved in a direction of the optical device or opposite to the direction of the optical device as a function of the at least one parameter. 20 . The method according to claim 19 , wherein the at least one parameter is the feed of the collimator toward the optical device or the feed of the collimator toward the laser source. 21 . The method according to claim 20 , wherein the lens is arranged in a fixed position in a lens tube that is attached to the collimator so that the lens follows the motion of the collimator.
for surface treatment · CPC title
Tubes · CPC title
Devices involving relative movement between laser beam and workpiece · CPC title
inside the workpiece · CPC title
Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam · CPC title
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