3-dimensional printing process for integrated magnetics

Patent metadata

Field	Value
Publication number	US-2019319085-A1
Application number	US-201916454602-A
Country	US
Kind code	A1
Filing date	Jun 27, 2019
Priority date	Mar 29, 2017
Publication date	Oct 17, 2019
Grant date	—

Abstract

Integrated circuits (ICs) and method for forming IC devices are presented. In one embodiment, a method of forming a device with an integrated magnetic component using 3-dimensional (3-D) printing is disclosed. The method includes providing a substrate with a base dielectric layer, the base dielectric layer serves as a base for the integrated magnetic component. A first metal layer is formed on the substrate by spray coating metal powder over the substrate and performing selective laser melting on the metal powder. A magnetic core is formed on the substrate by spray coating magnet powder over the substrate and performing selective laser sintering on the magnet powder. A second metal layer is formed on the substrate by spray coating metal powder over the substrate and performing selective laser melting on the metal powder. A patterned dielectric layer separates the first and second metal layers and the magnetic core.

First claim

What is claimed is:

1 . A method of forming a device with an integrated magnetic component using three-dimensional printing, the method comprising:
providing a substrate with a first dielectric layer; forming a first layer of a metal winding on the first dielectric layer by spray coating a metal powder over the first dielectric layer and selective laser sintering the metal powder; forming a second dielectric layer over the first layer of the metal winding and the first dielectric layer; patterning the second dielectric layer to include a first plurality of openings extending to the first layer of the metal winding; forming a magnetic core on the second dielectric layer by spray coating a magnetic powder over the second dielectric layer and selective laser sintering the magnetic powder; forming a third dielectric layer over the magnetic core and the second dielectric layer; patterning the third dielectric layer to include a second plurality of openings connected with the first plurality of openings; and forming a second layer of the metal winding on the third dielectric layer by spray coating a metal powder over the substrate and selective laser sintering the metal powder, wherein the second dielectric layer and the third dielectric layer insulate the first and second layers of the metal winding from the magnetic core, and the spray coating of the metal powder of the second layer of the metal winding fills the first plurality of openings and the second plurality of openings such that, after selective layer sintering, the first and second layers of the metal winding are interconnected and surround the magnetic core.

2 . The method of claim 1 wherein the second dielectric layer is formed over the first layer of the metal winding by spray coating a dielectric polymer powder over the first layer of the metal winding and performing selective laser exposure and curing on the dielectric polymer powder.

3 . The method of claim 2 wherein the third dielectric layer is formed over the magnetic core and the second dielectric layer by spray coating a dielectric polymer powder over the magnetic core and the second dielectric layer and performing selective laser exposure and curing on the dielectric polymer powder.

4 . The method of claim 3 wherein the thickness of the dielectric polymer powder for forming the second dielectric layer and the third dielectric layer is about 10 μm.

5 . The method of claim 1 wherein the first dielectric layer comprises silicon oxide, and the second dielectric layer and the third dielectric layer each comprise polyimide or benzocyclobutene.

6 . The method of claim 1 wherein the first dielectric layer comprises silicon oxide, and the second dielectric layer comprises polyimide or benzocyclobutene.

7 . The method of claim 1 wherein the magnetic powder and the metal powder are spray coated in a sealed chamber with a vacuum or inert environment.

8 . The method of claim 1 wherein selective laser sintering the metal powder comprises:
scanning a high powered laser beam to selectively scan and fuse the metal powder.

9 . The method of claim 1 wherein selective laser sintering the magnetic powder comprises:
scanning a high powered laser beam to selectively scan and fuse the magnetic powder.

10 . The method of claim 1 wherein the device has a toroidal shape.

11 . The method of claim 1 wherein the metal powder and the magnetic powder that are spray coated comprise gas atomized powders.

12 . The method of claim 1 wherein the metal powder for forming the first layer and the second layer of the metal winding is about 20 μm.

13 . The method of claim 1 wherein the thickness of the magnetic powder for forming the magnetic core is about 10 μm.

14 . The method of claim 1 wherein the magnetic core comprises nickel, cobalt, an iron-based alloy, or a combination thereof, and the metal winding comprises copper or a copper-aluminum alloy.

15 . A structure comprising:
a substrate including a first dielectric layer, a second dielectric layer over the first dielectric layer, and a third dielectric layer over the second dielectric layer; a magnetic core on the second dielectric layer; and a metal winding including first layer on the first dielectric layer and a second layer on the third dielectric layer, wherein the second dielectric layer includes a first plurality of openings extending to the first layer of the metal winding, the third dielectric layer includes a second plurality of openings connected with the first plurality of openings, the second dielectric layer and the third dielectric layer insulate the first and second layers of the metal winding from the magnetic core, the metal winding includes portions in the first plurality of openings and the second plurality of openings, and the portions of the metal winding interconnect the first and second layers of the metal winding such that the metal winding surrounds the magnetic core.

16 . The structure of claim 15 wherein the magnetic core and the first and second layers of the metal winding have a toroidal shape.

17 . The structure of claim 15 wherein the first dielectric layer comprises silicon oxide, and the second dielectric layer and the third dielectric layer each comprise polyimide or benzocyclobutene.

18 . The structure of claim 15 wherein the first dielectric layer comprises silicon oxide, and the second dielectric layer comprises polyimide or benzocyclobutene.

19 . The structure of claim 15 wherein the magnetic core comprises nickel, cobalt, an iron-based alloy, or a combination thereof, and the metal winding comprises copper or a copper-aluminum alloy.

20 . The structure of claim 15 wherein the first layer and the second layer of the metal winding each have a thickness of about 20 μm, and the magnetic core has a thickness of about 10 μm.

Assignees

• Globalfoundries Sg Pte Ltd

Inventors

• Peng Lulu
• Disney Donald Ray
• Susai Lawrence Selvaraj
• Nair Rajesh Sankaranarayanan

Classifications

• H10P14/412

  Deposition of metallic or metal-silicide materials · CPC title

• H10W20/497

  Inductive arrangements or effects of, or between, wiring layers · CPC title

• B22F10/28

  Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM] · CPC title

• B22F10/32

  of the atmosphere, e.g. composition or pressure in a building chamber · CPC title

• B29C64/153

  using layers of powder being selectively joined, e.g. by selective laser sintering or melting · CPC title