Pellicle frame and pellicle

Patent metadata

Field	Value
Publication number	US-2019302607-A1
Application number	US-201716316537-A
Country	US
Kind code	A1
Filing date	Jun 30, 2017
Priority date	Jul 12, 2016
Publication date	Oct 3, 2019
Grant date	—

Abstract

The present invention provides a pellicle frame which can effectively inhibit deformation of an exposure master plate (8) caused by affixing the pellicle (1), and which does not have a complex shape, and a pellicle which uses said pellicle frame are provided. The pellicle frame with an anodized film on a surface of an aluminum alloy frame is characterized in that: the aluminum alloy frame comprises an aluminum alloy which contains Ca: 5.0 to 10.0% by weight with the remainder aluminum and unavoidable impurities are contained, and has an area (volume) ratio of an Al4Ca phase, which is a dispersed phase, is greater than or equal to 25%, and a crystal structure of a part of the Al4Ca phase is monoclinic; wherein the anodized film contains Al4Ca particles.

First claim

1 . A pellicle frame with an anodized film on a surface of an aluminum alloy frame, characterized in that:
the aluminum alloy frame comprises an aluminum alloy which contains Ca: 5.0 to 10.0% by weight with the remainder aluminum and unavoidable impurities are contained, and has an area (volume) ratio of an Al 4 Ca phase, which is a dispersed phase, is greater than or equal to 25%, and a crystal structure of a part of the Al 4 Ca phase is monoclinic; wherein the anodized film has Al 4 Ca particles.

2 . The pellicle frame according to claim 1 , wherein a V content and a Fe content of the aluminum alloy are 0.0001 to 0.005% by weight and 0.05 to 1.0% by weight, respectively.

3 . The pellicle frame according to claim 1 , wherein an average crystal grain size of the Al 4 Ca phase is 1.5 μm or less.

4 . A method for manufacturing a pellicle frame, comprising:
a first step for obtaining an aluminum alloy plastic worked by subjecting an aluminum alloy ingot which contains 5.0 to 10.0% by weight of Ca with the remainder aluminum and inevitable impurities, and has a volume ratio of an Al 4 Ca phase which is a dispersed phase of 25% or more to a plastic working, a second step for subjecting the aluminum alloy plastic worked to a heat treatment in a temperature range of 100 to 300° C., and a third step for subjecting the heat-treated aluminum alloy plastic worked to an anodizing treatment with an alkaline electrolytic solution containing an alkali metal and/or an alkaline earth metal as an electrolyte, or an alkaline electrolytic solution containing at least one organic acid selected from maleic acid, oxalic acid, salicylic acid and citric acid.

5 . The method for manufacturing a pellicle frame according to claim 4 , wherein a V content and a Fe content of the aluminum alloy are 0.0001 to 0.005% by weight and 0.05 to 1.0% by weight, respectively.

6 . The method for manufacturing a pellicle frame according to claim 5 , wherein, before the first step, the aluminum alloy ingot is subjected to a heat treatment where the ingot is maintained at a temperature of 400° C. or more.

7 . The method for manufacturing a pellicle frame according to claim 4 , wherein, after the third step, a secondary electrolytic coloring is further achieved with an electrolytic solution containing a metal salt.

8 . A pellicle comprising the pellicle frame according to claim 1 and a pellicle film supported by the pellicle frame.

Assignees

• Nippon Light Metal Co

Inventors

• Taguchi Yoshihiro
• Yamaguchi Takayuki
• Yu Jun
• Ishiwata Yasuo

Classifications

• C25D11/16

  Pretreatment {, e.g. desmutting} · CPC title

• C25D11/246

  for sealing layers · CPC title

• C25D11/10

  containing organic acids · CPC title

• C22F1/002

  by rapid cooling or quenching; cooling agents used therefor · CPC title

• B22F2998/10

  Processes characterised by the sequence of their steps · CPC title