Bubble removing device and coating apparatus

Patent metadata

Field	Value
Publication number	US-2019282931-A1
Application number	US-201715740721-A
Country	US
Kind code	A1
Filing date	Dec 13, 2017
Priority date	Nov 7, 2017
Publication date	Sep 19, 2019
Grant date	—

Abstract

This invention provides a bubble removing device. The device comprises a first container, a second container disposed in the first container, and an ultrasonic generator, wherein the second container is smaller than the first container, the first container and the second container are divided into a first cavity and a second cavity individually, and the first cavity and the second cavity are not connected with each other; wherein the first cavity contains water, the second cavity contains solution, and an outlet pipe, an inlet pipe, and an air vent are arranged in the second cavity in the second container. This invention also provides a coating apparatus comprises the aforesaid bubble removing device in the coating apparatus the outlet pipe is connected with the sprayer and the inlet pipe is connected with the storage container.

First claim

What is claimed is:

1 . A bubble removing device for polyimide solution, comprising a first container, a second container disposed in the first container, and an ultrasonic generator, wherein the second container is smaller than the first container, the first container and the second container are divided into a first cavity and a second cavity individually, and the first cavity and the second cavity are not connected with each other; wherein the first cavity contains water, the second cavity contains solution, and an outlet pipe, an inlet pipe, and an air vent are arranged in the second cavity in the second container.

2 . The device according to claim 1 , comprising a filter connected with the outlet pipe.

3 . The device according to claim 1 , wherein the second container is arranged beneath the first container.

4 . The device according to claim 1 , wherein the ultrasonic generator is disposed on the bottom of the first container.

5 . The device according to claim 3 , wherein the ultrasonic generator is disposed on the bottom of the first container.

6 . The device according to claim 1 , wherein the air vent is connected with an air evacuation valve.

7 . The device according to claim 1 , the inlet pipe is connected with a liquid inlet valve.

8 . The device according to claim 7 , wherein the inlet pipe is connected with a first pump.

9 . The device according to claim 7 , comprising a second pump connected with the outlet pipe, and disposed between the filter, the second container.

10 . A coating apparatus, comprising a storage container, a sprayer, and a bubble removing device for polyimide solution, wherein the device comprises a first container, a second container disposed in the first container, and an ultrasonic generator, wherein the second container is smaller than the first container, the first container and the second container are divided into a first cavity and a second cavity individually, and the first cavity and the second cavity are not connected with each other; wherein the first cavity contains water, the second cavity contains solution, and an outlet pipe, an inlet pipe, and an air vent are arranged in the second cavity in the second container; and wherein the outlet pipe is connected with the sprayer and the inlet pipe is connected with the storage container.

11 . The apparatus according to claim 10 , comprising a filter connected with the outlet pipe.

12 . The apparatus according to claim 10 , wherein the second container is arranged beneath the first container.

13 . The apparatus according to claim 10 , wherein the second container is arranged beneath the first container.

14 . The apparatus according to claim 12 , wherein the ultrasonic generator is disposed on the bottom of the first container.

15 . The apparatus according to claim 10 , wherein the ultrasonic generator is disposed on the bottom of the first container.

16 . The apparatus according to claim 10 , wherein the air vent is connected with an air evacuation valve.

17 . The apparatus according to claim 16 , wherein the inlet pipe is connected with a first pump.

18 . The apparatus according to claim 10 , comprising a second pump connected with the outlet pipe, and disposed between the filter, the second container.

Assignees

• Wuhan China Star Optoelectronics Semiconductor Display Tech Co Ltd

Inventors

• Zheng Ying

Classifications

• B05C11/1007

  responsive to condition of liquid or other fluent material (B05C11/1005 takes precedence) · CPC title

• B05C5/0254

  Coating heads with slot-shaped outlet (B05C5/0283 takes precedence) · CPC title

• B01D19/0078 Primary

  by vibration · CPC title

• B01D19/02 Primary

  Foam dispersion or prevention (during boiling B01B1/02; during fermentation C12) · CPC title

• B05C11/10

  Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material {(B05C1/0813, B05C5/0225, B05C17/002 and B05C19/06 take precedence)} · CPC title