Substrate gripping hand and substrate transfer device including this substrate gripping hand

Patent metadata

Field	Value
Publication number	US-2019263003-A1
Application number	US-201716344946-A
Country	US
Kind code	A1
Filing date	Oct 17, 2017
Priority date	Oct 27, 2016
Publication date	Aug 29, 2019
Grant date	—

Abstract

A substrate gripping hand which grips a substrate with a disc shape, includes a base plate, and a guide member provided at the base plate, and having a L-shape when viewed from a horizontal direction, the guide member having a shape in which a base end portion of a bottom surface has a horizontal portion and a first corner portion which is a corner portion formed by the bottom surface and an inner wall surface has a curve line shape.

First claim

1 . A substrate gripping hand which grips a substrate with a disc shape, the substrate gripping hand comprising:
a base plate; and a guide member provided at the base plate, and having a L-shape when viewed from a horizontal direction, the guide member having a shape in which a base end portion of a bottom surface has a horizontal portion and a first corner portion which is a corner portion formed by the bottom surface and an inner wall surface has a curve line shape.

2 . The substrate gripping hand according to claim 1 ,
wherein the guide member is disposed at the substrate gripping hand so that an end portion of the substrate is placed on the horizontal portion.

3 . The substrate gripping hand according to claim 2 wherein the guide member is disposed at the base plate so that an outermost end of a bottom surface of the substrate is placed on the horizontal portion.

4 . The substrate gripping hand according to claim 3 ,
wherein the guide member is disposed at the base plate so that an outermost end of a main surface of the substrate overlaps with the horizontal portion, when viewed from a normal direction of the base plate.

5 . The substrate gripping hand according to claim 1 ,
wherein the horizontal portion has a length of 0.2 mm to 3.0 mm.

6 . The substrate gripping hand according to claim 1 ,
wherein the first corner portion of the guide member is curved.

7 . The substrate gripping hand according to claim 1 ,
wherein the first corner portion of the guide member has a circular-arc shape.

8 . The substrate gripping hand according to claim 7 ,
wherein the first corner portion of the guide member has a curvature radius of 0.5 mm or more.

9 . The substrate gripping hand according to claim 1 ,
wherein the guide member has a shape in which the bottom surface is inclined so that a tip end portion of the bottom surface has a thickness reduced toward a tip end thereof.

10 . The substrate gripping hand according to claim 1 ,
wherein the inner wall surface of the guide member is inclined so that an angle formed between the horizontal portion and the inner wall surface is an obtuse angle.

11 . The substrate gripping hand according to claim 1 ,
wherein the guide member has a second corner portion formed by an upper surface and the inner wall surface, the second corner portion being formed by cutting a portion of the guide member.

12 . A substrate transfer device comprising the substrate gripping hand according to claim 1 .

Assignees

• Kawasaki Heavy Ind Ltd

Inventors

• Fukushima Takayuki
• Yoshida Tetsuya
• Kinoshita Shinya

Classifications

• H10P72/30

  for conveying, e.g. between different workstations · CPC title

• H10P72/7608

  characterised by a plurality of separate clamping members, e.g. clamping fingers · CPC title

• H10P72/7602 Primary

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/3411

  involving loading and unloading of wafers · CPC title

• H10P72/3402

  Mechanical parts of transfer devices · CPC title