Laser Machining Device

Patent metadata

Field	Value
Publication number	US-2019184491-A1
Application number	US-201816167559-A
Country	US
Kind code	A1
Filing date	Oct 23, 2018
Priority date	Dec 14, 2017
Publication date	Jun 20, 2019
Grant date	—

Abstract

To prevent an output decrease of laser light due to impurities that could be formed in a guide-light emitting device or an imaging device. A laser-light guiding section includes a transmission window section, an optical component disposed to cause an optical path of the UV laser light emitted from the laser-light output section and an optical path of transmitted light transmitted through the transmission window section to cross, and a sealing member in which the transmission window section is provided, the sealing member configuring a sealed space for airtightly housing the optical component. At least one of a guide-light emitting device configured to emit guide light for visualizing a scanning position of the UV laser light toward the transmission window section and an imaging device configured to receive light for imaging a workpiece via the transmission window section is disposed on the outer side of the sealed space.

First claim

What is claimed is:

1 . A laser machining device comprising:
an excitation-light generating section configured to generate excitation light; a laser-light output section configured to generate UV laser light on the basis of the excitation light generated by the excitation-light generating section and emit the UV laser light; a laser-light scanning section configured to irradiate the UV laser light emitted from the laser-light output section on a workpiece and scan the UV laser light on a surface of the workpiece; and a laser-light guiding section configured to form an optical path for guiding the UV laser light emitted from the laser-light output section to the laser-light scanning section, wherein the laser-light guiding section includes:
a transmission window section configured to transmit predetermined light;
an optical component disposed to cause an optical path of the UV laser light emitted from the laser-light output section and an optical path of transmitted light transmitted through the transmission window section to cross; and
a sealing member in which the transmission window section is provided, the sealing member configuring a sealed space for airtightly housing the optical component, and
at least one of a guide-light emitting device configured to emit guide light for visualizing a scanning position of the UV laser light toward the transmission window section and an imaging device configured to receive light for imaging the workpiece via the transmission window section is disposed on an outer side of the sealed space.

2 . The laser machining device according to claim 1 , wherein the optical component is configured to transmit one of the guide light emitted from the guide-light emitting device and the UV laser light output from the laser-light output section and reflect another.

3 . The laser machining device according to claim 1 , wherein the optical component is configured to transmit one of the light received by the imaging device and the UV laser light output from the laser-light output section and reflect another.

4 . The laser machining device according to claim 1 , wherein
the laser-light guiding section includes a focus adjusting mechanism configured to adjust a focal length of the UV laser light output from the laser-light output section, and the focus adjusting mechanism is disposed on an inner side of the sealed space.

5 . The laser machining device according to claim 1 , wherein
the optical component includes:
a first optical component configured to bend an optical path of UV laser light output from the laser-light output section toward one side in a predetermined first direction to thereby extend the optical path along a second direction substantially orthogonal to the first direction; and
a second optical component configured to bend the optical path bent by the first optical component again to thereby direct the optical path to another side in the first direction, and
the transmission window section includes:
a first transmission window section configured to guide the transmitted light to reach the first optical component; and
a second transmission window section configured to guide the transmitted light to reach the second optical component.

6 . The laser machining device according to claim 1 , wherein a drying agent is housed on an inner side of the sealed space.

Assignees

• Keyence Co Ltd

Inventors

• Idaka Mamoru
• Saito Masaki
• Yamakawa Hideki
• Ogawa Kazuyoshi

Classifications

• B23K26/0648 Primary

  comprising lenses · CPC title

• B23K26/046

  Automatically focusing the laser beam · CPC title

• B23K26/362

  Laser etching · CPC title

• B23K26/0622

  by shaping pulses · CPC title

• B23K26/0643

  comprising mirrors · CPC title